Structured discrete beam formation for cutting transparent substrates

Patent metadata

Field	Value
Publication number	US-12564898-B2
Application number	US-202117556655-A
Country	US
Kind code	B2
Filing date	Dec 20, 2021
Priority date	Dec 21, 2020
Publication date	Mar 3, 2026
Grant date	Mar 3, 2026

Abstract

A method includes emitting an ultra-short pulse laser beam from a laser source. The method also includes forming the laser beam into a plurality of discrete beams via an optical array, where intersecting discrete beams form a structured light pattern comprising a plurality of voxels. A first subset of the plurality of voxels defining a line and a second subset of the plurality of voxels lie outside the line. The method also includes forming a plurality of voids in a substrate by aligning the structured light pattern onto the substrate, each voxel of the plurality of voxels forming a discrete void in the substrate, each void separated by the substrate. The method includes, after forming the plurality of voids in the substrate at a plurality of different positions, forming an article by separating one portion of the substrate from a base portion of the substrate.

First claim

What is claimed is:

1 . A method comprising:
emitting an ultra-short pulse laser beam from a laser source; forming the laser beam into a plurality of discrete beams via an optical array, wherein intersecting discrete beams form a structured light pattern comprising a plurality of voxels at intersections of the intersecting discrete beams, a first subset of the plurality of voxels defining a line and a second subset of the plurality of voxels lying outside the line; forming a plurality of voids in a substrate by aligning the structured light pattern onto the substrate, each voxel of the plurality of voxels of the aligned structured light pattern forming a discrete void in the substrate, each void separated by unmodified portions of the substrate, wherein the intersecting discrete beams intersect within the substrate to form the plurality of voids at the plurality of voxels; and after forming the plurality of voids in the substrate at a plurality of different positions, forming an article by separating one portion of the substrate from a base portion of the substrate.

2 . The method of claim 1 , wherein the article includes an edge surface defined by the line.

3 . The method of claim 2 , wherein the article includes a top surface defining a horizontal plane, wherein the edge surface is perpendicular to the horizontal plane, and wherein a chamfer surface connecting the top surface and the edge surface is defined by the second subset of the plurality of voxels.

4 . The method of claim 3 , wherein the chamfer surface is a first chamfer surface, wherein the plurality of discrete beams form a third subset of voxels lying outside the line, and a second chamfer surface connecting a bottom surface of the article and the edge surface is defined by the third subset of voxels.

5 . The method of claim 1 , further comprising translating the optical array relative to the substrate.

6 . The method of claim 5 , further comprising rotating a polarization of the laser beam by rotating a polarization rotator of the optical array.

7 . The method of claim 1 , wherein the optics array includes a spatial light modulator or diffractive optics that is configured to form the plurality of discrete beams from the laser beam.

8 . The method of claim 1 , further comprising:
translating the optical array relative to the substrate in a circular path defined by a plurality of positions; and forming a respective plurality of voids at each position of the plurality of positions.

9 . A system, comprising:
a laser source configured to emit an ultra-short pulse laser beam; an optical array configured to form the laser beam into a plurality of discrete beams; and a lens configured to focus the plurality of discrete beams into a structured light pattern, intersecting discrete beams forming a structured light pattern comprising a plurality of voxels at intersections of the intersecting discrete beams, a first subset of the plurality of voxels defining a line and a second subset of the plurality of voxels lying outside the line, the structured light pattern being aligned onto a substrate to form a plurality of voids in a substrate, each voxel of the plurality of voxels forming a discrete void in the substrate, each void separated by unmodified portions of the substrate, wherein an article is formed by separating one portion of the substrate from a base portion of the substrate after forming the plurality of voids in the substrate at a plurality of different positions.

10 . The system of claim 9 , wherein the article includes an edge surface defined by the line.

11 . The system of claim 10 , wherein the article includes a top surface defining a horizontal plane, wherein the edge surface is perpendicular to the horizontal plane, and wherein a chamfer surface connecting the top surface and the edge surface is defined by the second subset of the plurality of voxels.

12 . The system of claim 11 , wherein the chamfer surface is a first chamfer surface, wherein the plurality of discrete beams form a third subset of voxels lying outside the line, and a second chamfer surface connecting a bottom surface of the article and the edge surface is defined by the third subset of voxels.

13 . The system of claim 9 , further comprising a motor configured to move the optical array to translate the optical array relative to the substrate.

14 . The system of claim 13 , further comprising a polarization rotator configured to rotate a polarization of the laser beam.

15 . The system of claim 9 , the optics array including a spatial light modulator or diffractive optics that is configured to form the plurality of discrete beams from the laser beam.

16 . The system of claim 9 , further comprising:
a motor configured to move the optical array to translate the optical array relative to the substrate in a circular path defined by a plurality of positions, wherein a respective plurality of voids is formed at each position of the plurality of positions.

Assignees

• Seagate Technology Llc

Inventors

• Ahner Joachim
• Tung David

Classifications

• B23K26/0676

  into dependently operating sub-beams, e.g. an array of spots with fixed spatial relationship or for performing simultaneously identical operations · CPC title

• B23K26/55 Primary

  for creating voids inside the workpiece, e.g. for forming flow passages or flow patterns · CPC title

• B23K26/0648

  comprising lenses · CPC title

• B23K2103/54

  Glass · CPC title

• B23K26/53

  for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks · CPC title