Method and system for determining the state of a sensor whose mechanical behaviour is nonlinear as a function of the amplitude of the pressure exerted

Patent metadata

Field	Value
Publication number	US-12560498-B2
Application number	US-202218072556-A
Country	US
Kind code	B2
Filing date	Nov 30, 2022
Priority date	Dec 23, 2021
Publication date	Feb 24, 2026
Grant date	Feb 24, 2026

Abstract

A method for determining the state of at least one sensor whose mechanical behaviour is nonlinear as a function of the amplitude of the pressure exerted against the sensor, the sensor and an electromechanical transducer being able to be coupled to a support, the method comprising the steps of: applying an electrical signal at a first amplitude to the terminals of the first electromechanical transducer, and determining a first set of values of a parameter characteristic of the electrical impedance of the first electromechanical transducer in response to the application of the electrical signal; applying the electrical signal at a second amplitude to the terminals of the first electromechanical transducer, and determining a second set of values of the parameter characteristic of the impedance; measuring a deviation between the first set of values and the second set of values; determining a state of the sensor as a function of the deviation between the first set of values and the second set of values.

First claim

The invention claimed is:

1 . A method for determining the state of at least one sensor whose mechanical behaviour is nonlinear as a function of the amplitude of the pressure exerted against said sensor, said sensor and an electromechanical transducer being in contact with a support, the method comprising the steps of:
applying an electrical signal (Vin) at a first amplitude to the terminals of the electromechanical transducer at different frequencies by means of a sensor state determination unit which comprises a voltage source, or a current source, which is electrically connected to the electromechanical transducer so as to impose respectively a sinusoidal voltage at a predefined maximum amplitude, or a sinusoidal current at a predefined maximum amplitude, performing a plurality of measurements of the impedance as seen by the electromechanical transducer for said frequencies, and determining a first set of values (Mod 1 , Arg 1 ) based on said plurality of measurements; applying said electrical signal (Vin) at a second amplitude at different frequencies, performing a plurality of measurements of the impedance as seen by the electromechanical transducer for said frequencies of the signal, and determining a second set of values (Mod 2 , Arg 2 ) based on said plurality of measurements of the impedance; measuring a deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ); and determining a state of the sensor as a function of the deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ).

2 . The method according to claim 1 , wherein the sensor is a capacitive air gap sensor which comprises at least one air gap, the step of determination of a state of the sensor comprising a determination of the air gap, and wherein:
the air gap is considered nil if the deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ) is lower than a predetermined deviation value; and the air gap is considered non-zero if the deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ) is above said predetermined deviation value.

3 . The method according to claim 1 , wherein the sensor is a capacitive air gap sensor which comprises at least one air gap, the method comprising the steps of:
determining a first value (Mod 1 , Arg 1 ) of a parameter characteristic of the electrical impedance of the first electromechanical transducer, at the first amplitude, determining a second value (Mod 2 , Arg 2 ) of a parameter characteristic of the electrical impedance of the first electromechanical transducer, at the second amplitude, the first value and the second value being such that the deviation is non-zero, applying the electrical signal at a third amplitude, the third amplitude lying between the first amplitude and the second amplitude, and determining a third value (Mod 3 , Arg 3 ) of a parameter characteristic of the electrical impedance of the first electromechanical transducer, at the third amplitude, and determining the air gap as a function of the first value, of the second value, and of the third value.

4 . A system for determining the state of at least one sensor whose mechanical behaviour is nonlinear as a function of the amplitude of the pressure exerted against said sensor, said sensor and an electromechanical transducer being in contact with a support, the system comprising a sensor state determination unit, the sensor state determination unit being configured to:
apply an electrical signal (Vin) at a first amplitude to the terminals of the electromechanical transducer at different frequencies by means of a sensor state determination unit which comprises a voltage source, or a current source, which is electrically connected to the electromechanical transducer so as to impose respectively a sinusoidal voltage at a predefined maximum amplitude, or a sinusoidal current at a predefined maximum amplitude, perform a plurality of measurements of the impedance as seen by the electromechanical transducer for said frequencies, and determine a first set of values (Mod 1 , Arg 1 ) based on said plurality of measurements; apply said electrical signal (Vin) at a second amplitude at different frequencies, perform a plurality of measurements of the impedance as seen by the electromechanical transducer for said frequencies of the signal, and determine a second set of values (Mod 2 , Arg 2 ) based on said plurality of measurements; measure a deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ); and determine a state of the sensor as a function of the deviation between the first set of values (Mod 1 , Arg 1 ) and the second set of values (Mod 2 , Arg 2 ).

5 . The system according to claim 4 , wherein the sensor is a capacitive air gap sensor which comprises: a first air gap and a second air gap, the first air gap and the second air gap both having a rectilinear profile or a dished profile, the first air gap and the second air gap being superposed and sufficiently close to one another, such that they form a diaphragm, whose thickness is less than a wavelength of an acoustic wave being propagated in the sensor.

6 . The system according to claim 4 , wherein the sensor is a force sensor, or a strain gauge, or a gas pressure sensor, or a liquid sensor, or a temperature sensor, or a humid sensor.

7 . The system according to claim 4 , wherein the sensor comprises at least one air gap.

8 . The system according to claim 7 , wherein said at least one air gap is produced in the form of a disjointed repeated pattern.

9 . The system according to claim 4 , wherein the sensor comprises a first air gap and a second air gap, the first air gap and the second air gap both having a rectilinear profile or a dished profile, the first air gap and the second air gap being superposed, the first air gap and the second air gap comprising different inter-plate spacings.

10 . The system according to claim 4 , wherein the sensor comprises a first air gap and a second air gap, the first air gap and the second air gap both having a rectilinear profile, the first air gap and the second air gap being aligned, the first air gap and the second air gap comprising different inter-plate spacings.

11 . The system according to claim 4 , wherein the sensor comprises an air gap having a profile whose thickness varies progressively.

12 . The system according to claim 4 , wherein the sensor comprises an air gap having a serrated profile, the height of at least some of the serrations being variable.

13 . The system according to claim 8 , wherein the sensor comprises a first air gap and a second air gap, produced in the form of a repeated pattern, the first air gap and the second air gap being superposed, the edge of each pattern of the first air gap being aligned with the centre of a pattern of the second air gap, and vice versa.

14 . The system according to claim 8 , wherein the pattern comprises a rectilinear air gap part, that can be brought into contact when a pressure is exerted against the sensor, and two pillars disposed on either side of the rectilinear air gap part, at right angles to said air gap part.

Assignees

• Commissariat Energie Atomique

Inventors

• Despesse Ghislain

Classifications

• H04R7/08

  comprising superposed layers separated by air or other fluid · CPC title

• G01L1/255

  using acoustic waves, or acoustic emission (G01L1/10 and G01L1/16 take precedence) · CPC title

• G01L1/2287

  constructional details of the strain gauges (adjustable resistors H01C10/00) · CPC title

• G01L1/225

  Measuring circuits therefor · CPC title

• G01L9/0001

  Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means (G01L9/0026, G01L9/0033, G01L9/0082, G01L9/0089, G01L9/0091 take precedence) · CPC title