Electrostatic chuck

Patent metadata

Field	Value
Publication number	US-12557596-B2
Application number	US-202217837115-A
Country	US
Kind code	B2
Filing date	Jun 10, 2022
Priority date	Dec 21, 2018
Publication date	Feb 17, 2026
Grant date	Feb 17, 2026

Abstract

An electrostatic chuck includes a base plate and a ceramic dielectric substrate. The ceramic dielectric substrate has a first major surface. The first major surface includes at least a first region and a second region. At least one first gas introduction hole connected to at least one of multiple first grooves. The first grooves include a first boundary groove, and at least one first in-region groove. Multiple second grooves and at least one second gas introduction hole are provided in the second region. The second grooves are include a second boundary groove extending along the first boundary and are provided to be most proximal to the first boundary. A groove end portion-end portion distance between the first boundary groove and the second boundary groove is smaller than a groove end portion-end portion distance between the first boundary groove and the first in-region groove.

First claim

What is claimed is:

1 . An electrostatic chuck, comprising:
a base plate; and a ceramic dielectric substrate having a first major surface and being provided on the base plate, the first major surface being exposed externally, the first major surface including at least a first region, a second region adjacent to the first region, and a plurality of protruding dots which are configured to support a workpiece placed on the electrostatic chuck, the first region of the first major surface having a plurality of first grooves and at least one first gas introduction hole provided therein, the at least one first gas introduction hole being connected to at least one of the plurality of first grooves, the plurality of first grooves including
a first boundary groove adjacent to and extending along a first boundary between the first region and the second region, the first boundary groove being connected to the at least one first gas introduction hole, and
at least one first in-region groove different from the first boundary groove and spaced further away from the first boundary than is the first boundary groove,
the second region of the first major surface having a plurality of second grooves and at least one second gas introduction hole provided therein, the at least one second gas introduction hole being connected to at least one of the plurality of second grooves, the plurality of second grooves including a second boundary groove adjacent to and extending along the first boundary, a distance between the first boundary groove and the second boundary groove being shorter than a distance between the first boundary groove and one of the at least one first in-region grooves closest to the first boundary groove, when the workpiece is supported by the plurality of dots one enclosed space is formed between the first major surface and the workpiece, the one enclosed space covers the first boundary groove and the second boundary groove and the first boundary therebetween, whereby when a gas is introduced from the first gas introduction hole while the workpiece is supported by the dots, pressure in a first portion of the one enclosed space between the first region and the workpiece becomes a first pressure, when the gas is introduced from the second gas introduction hole while the workpiece is supported by the dots, pressure in a second portion of the one enclosed space between the second region and the workpiece becomes a second pressure different from the first pressure, and pressure in a third portion of the one enclosed space between the first boundary and the workpiece being a value between first pressure and second pressure.

2 . The chuck according to claim 1 , wherein
the first major surface further has a lift pin hole provided in the first major surface, and a distance between the lift pin hole and the first boundary groove is greater than a distance between the lift pin hole and the first in-region groove most proximal to the lift pin hole.

3 . The chuck according to claim 1 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the at least one first gas introduction hole overlaps the first boundary groove, the first direction being from the base plate toward the ceramic dielectric substrate.

4 . The chuck according to claim 1 , wherein when projected onto a plane perpendicular to a first direction, at least a portion of the at least one second gas introduction hole overlaps the second boundary groove, the first direction being from the base plate toward the ceramic dielectric substrate.

5 . The chuck according to claim 4 , wherein the at least one first gas introduction hole is configured to supply the gas to the first boundary groove, and at least two first gas introduction holes are provided.

6 . The chuck according to claim 5 , the at least one second gas introduction hole is configured to supply the gas to the second boundary groove, and at least two second gas introduction holes are provided.

7 . The chuck according to claim 1 , wherein an angle between the first boundary and a line connecting a center of the at least one first gas introduction hole and a center of the second gas introduction hole is less than 90°.

8 . The chuck according to claim 1 , wherein an angle between the first boundary and a line connecting a center of the at least one first gas introduction hole and a center of the second gas introduction hole is 90°.

Assignees

• Toto Ltd

Inventors

• Ikeguchi Masafumi
• Itoyama Tetsuro
• Saigan Shuichiro
• Shiraishi Jun

Classifications

• H10P72/7612

  characterised by lifting arrangements, e.g. lift pins · CPC title

• H10P72/72

  using electrostatic chucks · CPC title

• H10P72/0434

  mainly by convection · CPC title

• Y10T279/23

  with magnetic or electrostatic means · CPC title

• H10P72/7614

  characterised by a plurality of individual support members, e.g. support posts or protrusions · CPC title