Heating device and control method of led

Patent metadata

Field	Value
Publication number	US-12557182-B2
Application number	US-202117543012-A
Country	US
Kind code	B2
Filing date	Dec 6, 2021
Priority date	Dec 11, 2020
Publication date	Feb 17, 2026
Grant date	Feb 17, 2026

Abstract

A heating device using an LED is provided. The heating device includes a heater for heating a target with LED light, an LED controller for controlling power supplied to the LED such that a temperature of the target is adjusted with the power being in the range where a current thereof does not exceed an allowable current Imax, a correction unit for correcting Imax, and a voltage measurement unit for measuring a voltage of the LED. The correction unit estimates a junction temperature Tjm of the LED when Imax is supplied based on a measurement result by the voltage measurement unit when an estimation current Ie is supplied after Imax is supplied to the LED for correction. When Tjm of the LED when Imax is supplied exceeds Tmax corresponding to Imax, the correction unit corrects Imax.

First claim

What is claimed is:

1 . A heating device comprising:
a heater which includes a light-emitting diode (LED) and heats a heating target with light emitted from the LED; an LED controller which controls power supplied to the LED and controls, when a temperature of the heating target is adjusted, the power supplied to the LED in a range in which a current thereof does not exceed a maximum allowable current; a voltage measurement unit configured to measure a voltage of the LED; and a main controller including a processor and a program storage unit storing program thereon, the program when executed by the processor causes the processor to: set the maximum allowable current in a current range in which light output is linearly changed with respect to a current in a previously acquired current-light output characteristic of the LED, wherein the current-light output characteristic represents a relationship between the current and the light output of the LED; estimate a junction temperature of the LED when the maximum allowable current is supplied, based on respective voltages of the LED measured by the voltage measurement unit for respective estimation current supplied, wherein the estimation currents are different from each other and the estimation currents are supplied after the maximum allowable current for correction has been supplied to the LED; and correct the maximum allowable current when the estimated junction temperature exceeds an allowable junction temperature corresponding to the maximum allowable current.

2 . The heating device of claim 1 ,
wherein the program when executed by the processor further causes the processor to: supply the power to the LED to actually cause the LED to emit light and acquires the current-light output characteristic of the LED; and set the maximum allowable current based on the acquired current-light output characteristic of the LED.

3 . The heating device of claim 1 , wherein the program when executed by the processor further causes the processor to correct the maximum allowable current based on a difference between the allowable junction temperature and the estimated junction temperature of the LED.

4 . The heating device of claim 2 , wherein the program when executed by the processor further causes the processor to correct the maximum allowable current based on a difference between the allowable junction temperature and the estimated junction temperature of the LED.

5 . A control method of a light-emitting diode (LED) for heating a heating target with light, the control method comprising:
a process of controlling power supplied to the LED in a range in which a current thereof does not exceed a maximum allowable current; and a process of correcting the allowable current, wherein: the maximum allowable current is set in a current range in which light output is linearly changed with respect to a current in a previously acquired current-light output characteristic of the LED, the current-light output characteristic representing a relationship between the current and the light output of the LED; and the process of the correcting includes estimating a junction temperature of the LED when the maximum allowable current is supplied, based on respective voltages of the LED measured by the voltage measurement unit for respective estimation current supplied, wherein the estimation currents are different from each other and the estimation currents are supplied after the maximum allowable current for correction has been supplied to the LED, and correcting the maximum allowable current when the estimated junction temperature exceeds an allowable junction temperature corresponding to the maximum allowable current.

6 . The control method of claim 5 , further comprising:
a process of supplying the power to the LED to actually cause the LED to emit light and acquiring the current-light output characteristic of the LED; and a process of setting the maximum allowable current based on the acquired current-light output characteristic of the LED.

7 . The control method of claim 5 , wherein the maximum allowable current is corrected based on a difference between the allowable junction temperature and the estimated junction temperature of the LED.

8 . The control method of claim 6 , wherein the maximum allowable current is corrected based on a difference between the allowable junction temperature and the estimated junction temperature of the LED.

Assignees

• Tokyo Electron Ltd

Inventors

• Kasai Shigeru
• Morifuji Yoshiyuki

Classifications

• H05B3/0019

  Circuit arrangements · CPC title

• H05B45/14

  using electrical feedback from LEDs or from LED modules · CPC title

• G01R19/30

  Measuring the maximum or the minimum value of current or voltage reached in a time interval (G01R19/04 takes precedence) · CPC title

• G01R19/165

  Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values · CPC title

• H05B45/30

  Driver circuits · CPC title