Pressure sensor and method for manufacturing same, and electronic device

Patent metadata

Field	Value
Publication number	US-12540869-B2
Application number	US-202218556307-A
Country	US
Kind code	B2
Filing date	Nov 15, 2022
Priority date	Nov 15, 2022
Publication date	Feb 3, 2026
Grant date	Feb 3, 2026

Abstract

Provided is a pressure sensor. The pressure sensor has a sensing region and a non-sensing region, and includes: a first flexible film layer, wherein a first groove is disposed in a first surface of the first flexible film layer, and the first groove is within the sensing region; a first electrode layer; a first insulative layer, disposed on a side, distal from the first flexible film layer, of the first electrode layer; a second electrode layer, wherein the second electrode layer is disposed on a side, distal from the first flexible film layer, of the first insulative layer; and a second flexible film layer, wherein the second flexible film layer is disposed on a side, distal from the first flexible film layer, of the second electrode layer.

First claim

What is claimed is:

1 . A pressure sensor, having a sensing region and a non-sensing region, and comprising:
a first flexible film layer, wherein a first groove is disposed in a first surface of the first flexible film layer, and the first groove is within the sensing region; a first electrode layer, wherein the first electrode layer is disposed on the first surface of the first flexible film layer, and the first electrode layer at least comprises a first electrode and a first electrode lead connected to the first electrode, wherein the first electrode is disposed in the first groove within the sensing region, and the first electrode lead is within the non-sensing region; a first insulative layer, disposed on a side, distal from the first flexible film layer, of the first electrode layer, wherein the first insulative layer is within the non-sensing region and outside the sensing region; a second electrode layer, wherein the second electrode layer is disposed on a side, distal from the first flexible film layer, of the first insulative layer, and the second electrode layer at least comprise a second electrode and a second electrode lead connected to the second electrode, wherein the second electrode is within the sensing region, a cavity is defined between the second electrode and the first electrode, the cavity is formed at least based on the first groove, and the second electrode lead is within the non-sensing region; and a second flexible film layer, wherein the second flexible film layer is disposed on a side, distal from the first flexible film layer, of the second electrode layer.

2 . The pressure sensor according to claim 1 , wherein a second groove is disposed in a second surface, close to the first flexible film layer, of the second flexible film layer, the second groove is within the sensing region;
wherein the second electrode is disposed in the second groove within the sensing region, the cavity between the second electrode and the first electrode is formed based on the first groove and the second groove.

3 . The pressure sensor according to claim 1 , wherein a plurality of through holes are disposed in the second electrode, and the second flexible film layer is within the plurality of through holes.

4 . The pressure sensor according to claim 3 , wherein a third groove and a convex structure are disposed on a third surface, distal from the first flexible film layer, of the second flexible film layer; wherein
an orthographic projection of the third groove on the first flexible film layer covers an orthographic projection of at least one of the through holes on the first flexible film layer; and an orthographic projection of the convex structure on the first flexible film layer is not overlapped with orthographic projections of the plurality of through holes on the first flexible film layer.

5 . The pressure sensor according to claim 3 , wherein a ratio of an area of orthographic projections of the plurality of through holes on the first flexible film layer to an area of an orthographic projection of the cavity on the first flexible film layer ranges from 25% to 70%.

6 . The pressure sensor according to claim 1 , further comprising a second insulative layer and a third insulative layer; wherein
the second insulative layer is disposed between the first flexible film layer and the first electrode layer, and the second insulative layer is within the non-sensing region and outside the sensing region; and the third insulative layer is disposed between the second flexible film layer and the second electrode layer, and the third insulative layer is within the non-sensing region and outside the sensing region.

7 . The pressure sensor according to claim 1 , wherein the first flexible film layer comprises a first flexible substrate, a fourth insulative layer, and a second flexible substrate that are stacked sequentially;
wherein the second flexible substrate is close to the first electrode layer relative to the first flexible substrate, and the first groove is disposed in a surface, distal from the first flexible substrate, of the second flexible substrate.

8 . An electronic device, comprising a first detection circuit, a second detection circuit, and the pressure sensor as defined in claim 1 ; wherein
the first detection circuit is connected to the first electrode lead and the second electrode lead of the pressure sensor to detect a capacitance between the first electrode connected to the first electrode lead and the second electrode connected to the second electrode lead; and the second detection circuit is connected to the first detection circuit to determine the pressure of an environment in which the pressure sensor is disposed based on the capacitance between the first electrode and the second electrode.

9 . The electronic device according to claim 8 , wherein a second groove is disposed in a second surface, close to the first flexible film layer, of the second flexible film layer, the second groove is within the sensing region;
wherein the second electrode is disposed in the second groove within the sensing region, the cavity between the second electrode and the first electrode is formed based on the first groove and the second groove.

10 . The electronic device according to claim 8 , wherein a plurality of through holes are disposed in the second electrode, and the second flexible film layer is within the plurality of through holes.

11 . The electronic device according to claim 10 , wherein a third groove and a convex structure are disposed on a third surface, distal from the first flexible film layer, of the second flexible film layer; wherein
an orthographic projection of the third groove on the first flexible film layer covers an orthographic projection of at least one of the through holes on the first flexible film layer; and an orthographic projection of the convex structure on the first flexible film layer is not overlapped with orthographic projections of the plurality of through holes on the first flexible film layer.

12 . The electronic device according to claim 10 , wherein a ratio of an area of orthographic projections of the plurality of through holes on the first flexible film layer to an area of an orthographic projection of the cavity on the first flexible film layer ranges from 25% to 70%.

13 . The electronic device according to claim 8 , wherein the pressure sensor further comprises a second insulative layer and a third insulative layer; wherein
the second insulative layer is disposed between the first flexible film layer and the first electrode layer, and the second insulative layer is within the non-sensing region and outside the sensing region; and the third insulative layer is disposed between the second flexible film layer and the second electrode layer, and the third insulative layer is within the non-sensing region and outside the sensing region.

14 . A method for manufacturing a pressure sensor, wherein the pressure sensor has a sensing region and a non-sensing region, and the method comprises:
providing a first flexible film layer, wherein a first groove is disposed in a first surface of the first flexible film layer, and the first groove is within the sensing region; forming a first electrode layer on the first surface of the first flexible film layer, wherein the first electrode layer at least comprises a first electrode and a first electrode lead connected to the first electrode, wherein the first electrode is disposed in the first groove within the sensing region, and the first electrode lead is within the non-sensing region; forming a first insulative la

Assignees

• Beijing Boe Technology Dev Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Liang Kui
• He Yurong
• Wang Yingzi

Classifications

• B81C2201/0108

  Sacrificial polymer, ashing of organics · CPC title

• B81B2203/04

  Electrodes · CPC title

• B81B2203/0315

  Cavities · CPC title

• B81B2203/019

  characterized by their profile · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title