Sensor and electronic device

Patent metadata

Field	Value
Publication number	US-12529561-B2
Application number	US-202318174551-A
Country	US
Kind code	B2
Filing date	Feb 24, 2023
Priority date	Sep 14, 2022
Publication date	Jan 20, 2026
Grant date	Jan 20, 2026

Abstract

According to one embodiment, a sensor includes a base, a first support portion fixed to the substrate, and a first member supported by the first support portion. A gap is provided between the base and the first member. The first beam electrode and the second beam electrode satisfy at least one of a first condition, a second condition, a third condition, a fourth condition, a fifth condition, a sixth condition, a seventh condition, or an eighth condition.

First claim

What is claimed is:

1 . A sensor, comprising:
a base; a first support portion fixed to the base; and a first member supported by the first support portion, a gap being provided between the base and the first member, the first member including a first support region, a first connection structure, a second connection structure, a first beam, a second beam, a first beam electrode, and a second beam electrode, the first support portion being provided between the base and the first support region in a first direction from the base to the first support portion, the first support region being supported by the first support portion, the first beam and the second beam extending along a second direction crossing the first direction, a direction from the first connection structure to the second connection structure being along the second direction, the first support region being provided between the first connection structure and the second connection structure in the second direction, the first beam including a first end and a first other end, the first end being connected to the first connection structure, the first other end being connected to the first support region, the second beam including a second end and a second other end, the second end being connected to the second connection structure, the second other end being connected to the first support region, the first beam electrode being connected to the first beam, a direction from the first beam to the first beam electrode being along a third direction crossing a plane including the first direction and the second direction, the second beam electrode being connected to the second beam, a direction from the second beam to the second beam electrode being along the third direction; the first beam electrode having a first mass, a first thickness along the first direction, and a first layer configuration, the first beam electrode including a first material and a plurality of first holes each having a first size and a first shape, the first holes in the first beam having a first density and a first number, the second beam electrode having a second mass, a second thickness along the first direction, and a second layer configuration, the second beam electrode including a second material and a plurality of second holes each having a second size and a second shape, the second holes in the second beam having a second density and a second number, the first beam electrode and the second beam electrode are configured to satisfy at least one of a first condition, a second condition, a third condition, a fourth condition, a fifth condition, a sixth condition, a seventh condition, or an eighth condition, in the first condition, the second mass of the second beam electrode being different from the first mass of the first beam electrode, in the second condition, the second thickness along the first direction of the second beam electrode being different from the first thickness along the first direction of the first beam electrode, in the third condition, at least a part of the second material included in the second beam electrode being different from at least a part of the first material included in the first beam electrode, in the fourth condition, the second size of the second holes included in the second beam electrode being different from the first size of the first holes included in the first beam electrode, in the fifth condition, the second density of the second holes being different from the first density of the first holes, in the sixth condition, the second number of the second holes being different from the first number of the first holes, in the seventh condition, the second shape of the second holes being different from the first shape of the first holes, and in the eighth condition, the second layer configuration of the second beam electrode being different from the first layer configuration of the first beam electrode, wherein
the first member further includes a first movable region and a second movable region,
in the second direction, the first support region is provided between the first movable region and the second movable region,
the first connection structure is supported by the first movable region,
the first connection structure is provided between the first movable region and the first support region in the second direction,
the second connection structure is supported by the second movable region, and
the second connection structure is provided between the first support region and the second movable region in the second direction,
the first member includes a first counter beam electrode and a second counter beam electrode,
the first counter beam electrode is connected to the first beam,
in the third direction, the first beam is provided between the first counter beam electrode and the first beam electrode,
the second counter beam electrode is connected to the second beam,
in the third direction, the second beam is provided between the second counter beam electrode and the second beam electrode,
the first counter beam electrode having a first counter mass, a first counter thickness along the first direction, and a first counter layer configuration,
the first counter beam electrode including a first counter material and a plurality of first counter holes each having a first counter size and a first counter shape,
the first counter holes having a first counter density and a first counter number,
the second counter beam electrode having a second counter mass, a second counter thickness along the first direction, and a second counter layer configuration,
the second counter beam electrode including a second counter material and a plurality of second counter holes each having a second counter size and a second counter shape,
the second counter holes having a second counter density and a second counter number,
the first counter beam electrode and the second counter beam electrode are configured to satisfy at least one of a ninth condition, a tenth condition, an eleventh condition, a twelfth condition, a thirteenth condition, a fourteenth condition, a fifteenth condition, or a sixteenth condition,
in the ninth condition, the second counter mass of the second counter beam electrode is different from the first counter mass of the first counter beam electrode,
in the tenth condition, the second counter thickness along the first direction of the second counter beam electrode is different from the first counter thickness along the first direction of the first counter beam electrode,
in the eleventh condition, at least a part of the second counter material included in the second counter beam electrode is different from at least a part of the first counter material included in the first counter beam electrode,
in the twelfth condition, the second counter size of the second counter holes included in the second counter beam electrode is different from the first counter size of the first counter holes included in the first counter beam electrode,
in the thirteenth condition, the second counter density of the second counter holes is different from the first counter density of the first counter holes,
in the fourteenth condition, the second counter number of the second counter holes is different from the first counter number of the first counter holes,
in the fifteenth condition, the second counter shape of the second counter hole is different from a first counter shape of the first counter hole, and
in the sixteenth condition, the second counter layer configuration of the second counter beam electrode is different from the first counter layer configuration of the first counter beam electrode,
the first member further includes a first structure and a first support structure,
a first structure position of the first structure in the second direction is located between a first movable re

Assignees

• Toshiba Kk

Inventors

• Masunishi Kei
• Ogawa Etsuji
• Tomizawa Yasushi
• Miyazaki Fumito
• Ono Daiki
• Uchida Kengo
• Hiraga Hiroki
• Kaji Shiori
• Murase Hideaki

Classifications

• G01C19/5663

  Manufacturing; Trimming; Mounting; Housings · CPC title

• G01P15/0802

  Details · CPC title

• G01C19/5656 Primary

  the devices involving a micromechanical structure · CPC title

• G01P15/097 Primary

  by vibratory elements · CPC title