Corrosion resistant film on a chamber component and methods of depositing thereof
US-2021032745-A1 · Feb 4, 2021 · US
Advanced barrier nickel oxide (BNiO) coating development for process chamber components via ozone treatment
US12522923B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12522923-B2 |
| Application number | US-202217692351-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 11, 2022 |
| Priority date | Mar 11, 2022 |
| Publication date | Jan 13, 2026 |
| Grant date | Jan 13, 2026 |
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- Title
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Abstract
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Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O 2 , O 3 at a temperature from about 25° C. to about 350° C.
First claim
Opening claim text (preview).
What is claimed is: 1 . A method of protecting a chamber component, consisting of: forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas, wherein the barrier layer comprises nickel oxide and mitigates formation of a black film. 2 . The method of claim 1 , wherein the performing the ozone treatment occurs at a temperature of from about 25° C. to about 350° C. 3 . The method of claim 1 , wherein the performing the ozone treatment occurs at atmospheric pressure. 4 . The method of claim 1 , wherein the performing the ozone treatment occurs for about 1 hour to about 50 hours. 5 . The method of claim 1 , wherein the barrier layer has a thickness from about 10 nm to about 50 nm. 6 . The method of claim 1 , wherein the metal plating further comprises phosphorus. 7 . The method of claim 1 , wherein the body comprises an aluminum alloy, aluminum nitride, alumina, or combinations thereof. 8 . A method of protecting a chamber component, consisting of: forming a metal plating directly on a surface of a body of the chamber component by performing electroless metal plating, wherein the metal plating comprises nickel, and subsequently forming a barrier layer directly on the metal plating using a one-step process consisting of performing an ozone treatment on the chamber component by contacting the body of the chamber component with an ozone gas and at least of air, nitrogen, argon, or O 2 , wherein the barrier layer comprises nickel oxide and mitigates formation of a black film.
Assignees
Inventors
Classifications
Oxides · CPC title
by cathodic sputtering · CPC title
After-treatment · CPC title
Oxidation · CPC title
Coating with nickel, cobalt or mixtures thereof with phosphorus or boron (C23C18/50 takes precedence) · CPC title
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Frequently asked questions
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- What does patent US12522923B2 cover?
- Described herein is a chamber component including a metal layer comprising nickel and a barrier layer of nickel oxide over the metal layer. The barrier layer of nickel oxide may be formed by ozone treating the chamber component with air, nitrogen or argon O 2 , O 3 at a temperature from about 25° C. to about 350° C.
- Who is the assignee on this patent?
- Applied Materials Inc
- What technology area does this patent fall under?
- Primary CPC classification C23C16/45565. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Jan 13 2026 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 5 related publications on this page (citations in our corpus or others sharing the same primary CPC).