Wafer carrier and method

Patent metadata

Field	Value
Publication number	US-12516442-B2
Application number	US-202218073780-A
Country	US
Kind code	B2
Filing date	Dec 2, 2022
Priority date	Apr 3, 2017
Publication date	Jan 6, 2026
Grant date	Jan 6, 2026

Abstract

A wafer carrier includes a pocket sized and shaped to accommodate a wafer, the pocket having a base and a substantially circular perimeter, and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face.

First claim

What is claimed is:

1 . A wafer carrier, comprising:
a pocket sized and shaped to accommodate a wafer, the pocket comprising a base and a substantially circular perimeter; and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face, wherein the inner surface extends into a first arcuate surface at the first end of the flat face and into a second arcuate surface at a second end of the flat face, the second end opposing the first end, the flat face forming a chord with the first arcuate surface and the second arcuate surface, and wherein the first arcuate surface and the second arcuate surface each align with an inner face of the circular perimeter of the pocket when the removable orientation maker is assembled together with the pocket.

2 . The wafer carrier of claim 1 , wherein the removable orientation member further comprises an additional notch arranged at a second end of the flat face, the second end opposing the first end.

3 . A wafer carrier, comprising:
a pocket sized and shaped to accommodate a wafer, the pocket comprising a base and a substantially circular perimeter; and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face, wherein an arcuate section of the substantially circular perimeter comprises a depression sized and shaped to accommodate the removable orientation marker, wherein the removable orientation marker further comprises a peripheral leg sized and shaped to engage with an outer surface of the substantially circular perimeter.

4 . A wafer carrier, comprising:
a pocket sized and shaped to accommodate a wafer, the pocket comprising a base and a substantially circular perimeter; and a removable orientation marker, the removable orientation marker comprising an outer surface and an inner surface, the outer surface having an arcuate form sized and shaped to mate with the substantially circular perimeter of the pocket, and the inner surface comprising a flat face, wherein the removable orientation marker further comprises a notch at a first end of the flat face, wherein an arcuate section of the substantially circular perimeter comprises a depression sized and shaped to accommodate the removable orientation marker.

5 . The wafer carrier of claim 4 , wherein the arcuate section of the substantially circular perimeter further comprises first engaging means for engaging with the removable orientation marker.

6 . The wafer carrier of claim 5 , wherein the removable orientation marker further comprises a lower surface comprising second engaging means for engaging with the first engaging means.

7 . The wafer carrier of claim 6 , wherein the second engaging means comprises a protrusion arranged, shaped and sized to engage with a depression in the substantially circular perimeter, or the second engaging means comprises a depression arranged shaped and sized to engage with a protrusion in the substantially circular perimeter.

8 . The wafer carrier of claim 6 , wherein the second engaging means comprises a protrusion arranged, shaped and sized to engage with a depression in the substantially circular perimeter and the protrusion comprises an outer engaging surface that extends at an angle inclined towards the flat face.

9 . The wafer carrier of claim 8 , wherein the protrusion comprises an inner engaging surface that extends substantially perpendicularly from the lower surface.

Assignees

• Infineon Technologies Americas Corp

Inventors

• Tungare Mihir
• Kim Peter
• Wan Jianwei
• Choi Chankyung

Classifications

• H10P72/7408

  the auxiliary support including alignment aids · CPC title

• H10P72/7608

  characterised by a plurality of separate clamping members, e.g. clamping fingers · CPC title

• H10P72/7606

  characterised by edge clamping, e.g. clamping ring · CPC title

• H10P72/74

  using temporarily an auxiliary support · CPC title

• H10P14/3416

  Nitrides · CPC title