Glass pallet for sputtering systems

Patent metadata

Field	Value
Publication number	US-12505990-B2
Application number	US-202117444990-A
Country	US
Kind code	B2
Filing date	Aug 12, 2021
Priority date	Jun 10, 2013
Publication date	Dec 23, 2025
Grant date	Dec 23, 2025

Abstract

Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.

First claim

What is claimed is:

1 . A pallet for transporting at least one non-rectangular glass substrate through a sputtering apparatus, the pallet comprising:
a frame; an adjustable grid array attached to the frame and comprising an articulated chain; an aperture in the frame; and one or more shields covering one or more portions of the pallet; wherein the articulated chain is configured to hold the at least one non-rectangular glass substrate by at least two edges, and in a substantially vertical orientation during transport through the sputtering apparatus.

2 . The pallet of claim 1 , further comprising an electrically conductive component configured to establish electrical communication with an electrically conductive coating on a work surface of the at least one non-rectangular glass substrate.

3 . The pallet of claim 2 , wherein the electrically conductive component comprises one or more springs.

4 . The pallet of claim 1 , wherein the pallet is configured to maintain its temperature to within ±5° C. of a temperature of the at least one non-rectangular glass substrate while the pallet is transported through the sputtering apparatus during sputtering.

5 . The pallet of claim 1 , further comprising a guide plate along a top edge of the frame to align the frame with one or more rollers in the sputtering apparatus.

6 . The pallet of claim 1 wherein the grid array comprises one or more springs that allow the at least one non-rectangular glass substrate to expand and contract while keeping the at least one non-rectangular glass substrate centered in space between inner vertical edges of the frame.

7 . The pallet of claim 1 , wherein the one or more shields reversibly attach to the frame.

8 . The pallet of claim 7 , further comprising a shield retaining feature that accommodates differences in thermal expansion between the one or more shields and the frame.

9 . The pallet of claim 8 , further comprising edge portions of the frame configured to overlap with adjacent pallets, the edge portions configured to protect a backside of the at least one non-rectangular glass substrate from sputter deposits.

10 . The pallet of claim 1 , wherein the pallet is configured to mechanically link with adjacent pallets in a modular format to form a train of pallets configured to translate through the sputtering apparatus.

11 . The pallet of claim 10 , wherein the pallet is configured to allow a variable gap between the adjacent pallets when mechanically linked, the variable gap controlled actively by a drive system of the sputtering apparatus.

12 . The pallet of claim 11 , wherein the drive system is configured to maintain at least a minimum distance in the variable gap.

13 . The pallet of claim 1 , wherein a work surface of the at least one non-rectangular glass substrate is masked about its periphery between 2 mm and 15 mm.

14 . The pallet of claim 1 , wherein the frame is made of stainless steel.

15 . The pallet of claim 1 , wherein the frame comprises a U-channel.

16 . The pallet of claim 1 , further comprising a guide bar along a bottom edge of the frame to aid alignment with a drive system in the sputtering apparatus.

17 . The pallet of claim 16 , wherein the pallet is configured to hang from the drive system in the sputtering apparatus.

18 . The pallet of claim 1 , wherein the pallet is configured to be transported by a magnetic levitation drive system.

19 . The pallet of claim 1 , wherein:
the one or more shields are coupled to the frame; and the one or more shields are configured to prevent backside contamination of the at least one non-rectangular glass substrate while the at least one non-rectangular glass substrate is transported in the substantially vertical orientation through the sputtering apparatus during sputtering.

20 . The pallet of claim 1 , wherein the pallet is configured to hold the at least one non-rectangular glass substrate within the aperture by the at least two edges.

21 . The pallet of claim 1 , wherein the pallet is configured to hold the non-rectangular glass substrate by an element selected from a group consisting of: a support bar and a plurality of support grids.

Assignees

• View Inc
• View Operating Corp

Inventors

• Frank Trevor
• Rozbicki Robert T
• Satern Jason

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3206

  the substrate being handled substantially vertically · CPC title

• H10P72/17

  specially adapted for supporting large square shaped substrates · CPC title

• H01J2237/332

  Coating · CPC title

• H01J2237/20221

  Translation · CPC title