Glass pallet for sputtering systems

Patent metadata

Field	Value
Publication number	US-11133158-B2
Application number	US-201414893502-A
Country	US
Kind code	B2
Filing date	Jun 9, 2014
Priority date	Jun 10, 2013
Publication date	Sep 28, 2021
Grant date	Sep 28, 2021

Abstract

Pallets for transporting one or more glass substrates in a substantially vertical orientation through a sputtering system. In some cases, a pallet comprising a frame with an aperture and an adjustable grid array within the aperture. The adjustable grid array is configurable to hold a plurality of glass substrates of different shapes and/or sizes. In one case, the adjustable grid array comprises a system of vertical and horizontal support bars, wherein the vertical support bars configured to both support the plurality of glass substrates at their vertical edges, wherein the horizontal support bars are configured to support the plurality of glass substrates at their horizontal edges, wherein the ends of the horizontal support bars are slideably engaged with the vertical support bars.

First claim

What is claimed is:

1. A pallet, comprising:
a frame comprising an aperture; and
an adjustable grid array located within the aperture, the adjustable grid array adjustable to hold a plurality of glass substrates of different shapes and/or sizes at the same time in a substantially vertical orientation while the pallet is transporting a plurality of glass substrates through a sputtering apparatus;
wherein the adjustable grid array is adjustable to hold each glass substrate of said plurality of glass substrates by at least two straight edges;
wherein the adjustable grid array comprises a plurality of vertical support bars configured to hold the plurality of glass substrates along their vertical edges; and
wherein the adjustable grid array is configured without intervening horizontal support structure for supporting horizontal edges between adjacent glass substrates of the plurality of glass substrates such that the glass substrates are stacked upon each other vertically.

2. The pallet of claim 1 , wherein the aperture is between about 60 inches and 130 inches along a first dimension, and between about 72 inches and about 205 inches along a second dimension.

3. The pallet of claim 1 , further comprising an electrically conductive component configured to establish electrical communication with an electrically conductive coating on a work surface of at least one glass substrate of the plurality of glass substrates.

4. The pallet of claim 1 , further comprising an overlapping portion configured to prevent backside contamination of the plurality of glass substrates during sputtering.

5. The pallet of claim 1 , wherein the pallet is configured to hang from a drive system in the sputtering apparatus.

6. The pallet of claim 1 , further comprising one or more shields covering one or more portions of the pallet.

7. The pallet of claim 6 , further comprising a shield-retaining feature that accommodates thermal expansion and/or thermal contraction between the one or more shields and the frame.

8. The pallet of claim 1 , further comprising edge portions of the frame, the edge portions configured to overlap with one or more adjacent pallets, and configured to protect the backside of the plurality of glass substrates from sputter deposits.

9. The pallet of claim 1 , wherein the vertical support bars comprise a spring that allows for each of the plurality of glass substrates to expand and contract while keeping each of the plurality of glass substrates centered in space between two vertical support bars.

10. The pallet of claim 1 , wherein the pallet is configured to maintain its temperature to within +5° C. of the temperature of the glass substrate while the pallet is transported through the sputtering apparatus during sputtering.

11. The pallet of claim 1 , further comprising a guide plate along a top edge of the frame to align the frame with one or more rollers in the sputtering apparatus.

12. The pallet of claim 1 , further comprising a guide bar along a bottom edge of the frame to align the frame with a drive system in the sputtering apparatus.

13. The pallet of claim 1 , wherein the pallet is configured to mechanically link with adjacent pallets in a train of pallets configured to translate through the sputtering apparatus.

14. The pallet of claim 13 , wherein the pallet is configured to allow a variable gap between the adjacent pallets when mechanically linked.

15. An integrated sputter deposition system comprising:
a plurality of deposition stations;
a plurality of pallets, each pallet comprising:
a frame comprising an aperture; and
an adjustable grid array located within the aperture, the adjustable grid array adjustable to hold a plurality of glass substrates of different shapes and/or sizes at the same time in a substantially vertical orientation while the pallet is transporting a plurality of glass substrates through a sputtering apparatus;
wherein the adjustable grid array is adjustable to hold each glass substrate of said plurality of glass substrates by at least two straight edges;
wherein the adjustable grid array comprises a plurality of vertical support bars configured to hold the plurality of glass substrates along their vertical edges; and
wherein the adjustable grid array is configured without intervening horizontal support structure for supporting horizontal edges between adjacent glass substrates of the plurality of glass substrates such that the glass substrates are stacked upon each other vertically; and

a drive system for controlling movement of the plurality of pallets through the plurality of deposition stations.

16. The integrated sputter deposition system of claim 15 , wherein at least one pallet of the plurality of pallets is configured to mechanically link with adjacent pallets in the plurality of pallets.

17. The integrated sputter deposition system of claim 15 , wherein drive system is configured to maintain a variable gap between adjacent pallets in the plurality of pallets.

18. The integrated sputter deposition system of claim 17 , wherein the drive system is configured to maintain at least a minimum gap adjacent pallets in the plurality of pallets.

Assignees

• View Inc

Inventors

• Frank Trevor
• Rozbicki Robert T
• Satern Jason

Classifications

• H10P72/3314

  Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers · CPC title

• H10P72/3206

  the substrate being handled substantially vertically · CPC title

• H10P72/17

  specially adapted for supporting large square shaped substrates · CPC title

• B65G13/02 Primary

  having driven rollers · CPC title

• C23C14/568

  Transferring the substrates through a series of coating stations (C23C14/562 takes precedence) · CPC title