Generator with controllable source impedance

Patent metadata

Field	Value
Publication number	US-12505983-B2
Application number	US-202218090069-A
Country	US
Kind code	B2
Filing date	Dec 28, 2022
Priority date	Apr 20, 2018
Publication date	Dec 23, 2025
Grant date	Dec 23, 2025

Abstract

A power supply system controls the source impedance of a generator in real time utilizing two amplifiers having asymmetrical power profiles in reference to a nominal load impedance that are diametrically opposite in reference to the nominal load impedance. Variations in power profiles may be achieved by using different topologies for each of the amplifiers or implementing a phase delay network. The output power from the first and second amplifiers may be combined using a combiner circuit or device and the output power from the combiner is transmitted to a plasma load. The output power of each amplifier may be independently controlled to alter one or more characteristics of the output power signal provided by the individual amplifiers. By changing the ratio of the output power of the first amplifier to the output power of the second amplified, the source impedance of the generators may be varied in real time.

First claim

What is claimed is:

1 . A power generating system comprising:
a first amplifier to amplify a first power signal; a second amplifier to amplify a second power signal; a combiner configured to combine power from the first amplifier with power from the second amplifier to provide output power; and a power control system configured, responsive to a signal indicative of load impedance, to: send a first control signal to the first amplifier; and send a second control signal to the second amplifier; wherein the first and second power signals are different than the first control signal and the second control signal.

2 . The power generating system of claim 1 comprising:
a feedback system configured to provide the signal indicative of the load impedance.

3 . The power generating system of claim 1 , wherein the power control system is configured to send the first control signal to adjust the first amplifier so a peak power of the output power is based at least on the signal indicative of the load impedance.

4 . The power generating system of claim 1 , wherein the power control system is configured to send the first control signal to adjust the first amplifier and send the second control signal to the second amplifier such that a source impedance of the output power matches the load impedance.

5 . The power generating system of claim 1 comprising a power supply to produce the first power signal provided to the first amplifier and produce the second power signal provided to the second amplifier.

6 . The power generating system of claim 5 , wherein the power supply is an RF power supply and the first power signal and the second power signal comprise an RF power signal.

7 . The power generating system of claim 1 , wherein the power control system is configured to send, responsive to the signal indicative of the load impedance, the first control signal to the first amplifier and the second control signal to the second amplifier to adjust a first power profile of the first amplifier and a second power profile of the second amplifier to produce a combined power profile.

8 . The power generating system of claim 1 , wherein the power control system is configured to send, responsive to the signal indicative of the load impedance, the first control signal to the first amplifier and the second control signal to the second amplifier to adjust a first power profile of the first amplifier to have a different peak power magnitude than a second power profile of the second amplifier to produce the output power that produces peak power at the load impedance.

9 . The power generating system of claim 1 , wherein the first control signal is different than the second control signal.

10 . A method of operating a power generating system comprising:
amplifying a first power signal with a first amplifier; amplifying a second power signal with a second amplifier; and in response to a signal indicative of a load impedance, providing separate control signals to the first amplifier and the second amplifier to provide output power based, at least, on the signal indicative of the load impedance wherein the first power signal and the second power signal is are different than the separate control signals.

11 . The method of claim 10 comprising:
adjusting at least one of the separate control signals such that a peak power of the output power is based, at least, on the signal indicative of the load impedance.

12 . The method of claim 10 comprising:
adjusting at least one of the separate control signals such that a peak power of the output power is produced to match a source impedance of the output power to the load impedance.

13 . The method of claim 10 , wherein the separate control signals are different control signals.

14 . A power generating system comprising:
a first amplifier to amplify a first power signal; a second amplifier to amplify a second power signal; a combiner configured to combine power from the first amplifier with power from the second amplifier to provide output power; and a power control system configured to send a first control signal to the first amplifier and a second control signal to the second amplifier to adjust a difference between the power from the first amplifier and the power from the second amplifier to produce a change in an impedance of the power generating system, wherein the first power signal and the second power signal are different than the first control signal and the second control signal.

15 . The power generating system of claim 14 wherein the power control system is configured to adjust the difference between power from the first amplifier and power from the second amplifier.

16 . The power generating system of claim 14 wherein the power control system is configured to receive a signal indicative of a load impedance and adjust the difference between the power from the first amplifier and the power from the second amplifier based upon the signal indicative of the load impedance.

17 . The power generating system of claim 16 comprising:
a feedback system to provide the signal indicative of the load impedance.

18 . The power generating system of claim 17 wherein the feedback system comprises at least one probe to obtain a measure of the output power that is indicative of the load impedance.

19 . The power generating system of claim 14 , wherein the power control system is configured to send, responsive to a signal indicative of a load impedance, the first control signal to the first amplifier and the second control signal to the second amplifier to adjust the difference between a magnitude of the output power of the first amplifier and a magnitude of the output power of the second amplifier to produce a change in an impedance of the power generating system responsive to the signal indicative of the load impedance.

20 . The power generating system of claim 14 , wherein the first control signal is different than the second control signal.

Assignees

• Advanced Energy Ind Inc

Inventors

• Gurov Gennady G
• Mueller Michael
• Benham Zebulun Whitman

Classifications

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title

• H01J37/32146

  Amplitude modulation, includes pulsing · CPC title

• H01J37/32183 Primary

  Matching circuits · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J37/32082 Primary

  Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence) · CPC title