Amplitude and phase detection circuit

Patent metadata

Field	Value
Publication number	US-11150283-B2
Application number	US-202016743492-A
Country	US
Kind code	B2
Filing date	Jan 15, 2020
Priority date	Jun 29, 2015
Publication date	Oct 19, 2021
Grant date	Oct 19, 2021

Abstract

In one embodiment, a phase detection circuit includes a current signal input to receive a current signal indicative of a current amplitude of an RF signal and a voltage signal input to receive a voltage signal indicative of a voltage amplitude of the RF signal. A high-pass filter and a low-pass filter are each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current signal and a phase angle of the voltage signal. A phase difference circuit receives the filtered current signal and the filtered voltage signal to determine a phase angle difference between the current signal and the voltage signal.

First claim

What is claimed is:

1. A phase detection circuit comprising:
a current signal input configured to receive a current signal indicative of a current amplitude of an RF signal;
a voltage signal input configured to receive a voltage signal indicative of a voltage amplitude of the RF signal;
a high-pass filter and a low-pass filter each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current signal and a phase angle of the voltage signal; and
a phase difference circuit configured to receive the filtered current signal and the filtered voltage signal to determine a phase angle difference between the current signal and the voltage signal.

2. The phase detection circuit of claim 1 further comprising a current detection circuit coupled between the current signal input of the phase detection circuit and a detection circuit input receiving the RF signal, the current detection circuit configured to output the current signal indicative of the current amplitude of the RF signal at the RF input.

3. The phase detection circuit of claim 2 wherein the current detection circuit comprises at least one inductor coupled to the RF input, and a component in series with the at least one inductor, the component being a resistor or a capacitor.

4. The phase detection circuit of claim 3 wherein a buffer is coupled between the at least one inductor and the current signal input of the phase detection circuit.

5. The phase detection circuit of claim 4 further comprising a current amplitude sensor configured to detect the current signal indicative of the current amplitude of the RF signal.

6. The phase detection circuit of claim 1 further comprising a voltage detection circuit coupled between the voltage signal input of the phase detection circuit and a detection circuit input receiving the RF signal, the voltage detection circuit configured to output the voltage signal indicative of the voltage amplitude of the RF signal at the RF input.

7. The phase detection circuit of claim 6 wherein the voltage detection circuit comprises a capacitive voltage divider comprising a first capacitor and a second capacitor in series between the RF input and a common ground, the first capacitor having a higher impedance and being coupled between the RF input and the second capacitor, the second capacitor being coupled between the first capacitor and the common ground, the first and second capacitors sharing a common node.

8. The phase detection circuit of claim 7 wherein a buffer is coupled between the common node of the capacitive voltage divider and the voltage signal input of the phase detection circuit.

9. The phase detection circuit of claim 8 further comprising a voltage amplitude sensor configured to detect the current signal indicative of the current amplitude of the RF signal.

10. The phase detection circuit of claim 1 further comprising buffer amplifiers, wherein each of the current signal and the voltage signal pass through one of the buffer amplifiers before being received by the high-pass filter or the low-pass filter to isolate the signals.

11. The phase detection circuit of claim 10 wherein each buffer amplifier is a limiting amplifier that amplifies the current or voltage signal while setting a maximum and minimum voltages at or near zero.

12. The phase detection circuit of claim 1 wherein each of the high-pass filter and the low-pass filter comprise either a resistor and a capacitor or a resistor and an inductor.

13. The phase detection circuit of claim 1 wherein the phase difference circuit (a) multiplies the filtered current signal and the filtered voltage signal to generate a multiplied signal, and (b) filters out an alternating current (AC) portion of the multiplied signal to leave a direct current (DC) offset indicative of the phase angle difference between the current signal and the voltage signal.

14. The phase detection circuit of claim 1 wherein the phase difference circuit comprises a mixer or an XOR gate.

15. An impedance matching network comprising:
a radio frequency (RF) input configured to operably couple to an RF source and to receive an RF signal from the RF source;
an RF output configured to operably couple to a plasma chamber;
at least one electronically variable capacitor (EVC); and
a phase detection circuit comprising:
a current signal input configured to receive a current signal indicative of a current amplitude of the RF signal;
a voltage signal input configured to receive a voltage signal indicative of a voltage amplitude of the RF signal;
a high-pass filter and a low-pass filter each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current signal and a phase angle of the voltage signal; and
a phase difference circuit configured to receive the filtered current signal and the filtered voltage signal to determine a phase angle difference between the current signal and the voltage signal.

16. A semiconductor processing tool comprising:
a plasma chamber configured to deposit a material onto a substrate or etch a material from the substrate; and
an impedance matching network operably coupled to the plasma chamber, the matching network comprising:
a radio frequency (RF) input configured to operably couple to an RF source and to receive an RF signal from the RF source;
an RF output configured to operably couple to a plasma chamber;
at least one electronically variable capacitor (EVC); and
a phase detection circuit comprising:
a current signal input configured to receive a current signal indicative of a current amplitude of the RF signal;
a voltage signal input configured to receive a voltage signal indicative of a voltage amplitude of the RF signal;
a high-pass filter and a low-pass filter each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current signal and a phase angle of the voltage signal; and
a phase difference circuit configured to receive the filtered current signal and the filtered voltage signal to determine a phase angle difference between the current signal and the voltage signal.

17. A method of matching an impedance comprising:
coupling an RF input of a matching network to an RF source to receive an RF signal from the RF source;
coupling an RF output of the matching network to a plasma chamber, wherein the matching network comprises:
at least one electronically variable capacitor (EVC); and
a phase detection circuit comprising:
a current signal input configured to receive a current signal indicative of a current amplitude of the RF signal;
a voltage signal input configured to receive a voltage signal indicative of a voltage amplitude of the RF signal;
a high-pass filter and a low-pass filter each configured to filter one of (i) the current signal from the current signal input or (ii) the voltage signal from the voltage signal input, wherein the high-pass filter and the low-pass filter collectively cause a substantially 90 degree offset between a phase angle of the current sig

Assignees

• Reno Tech Inc

Inventors

• Ulrich Michael Gilliam

Classifications

• H10P72/0421

  for drying etching · CPC title

• H10P50/242

  of Group IV materials · CPC title

• H03J2200/06

  Tuning of antenna · CPC title

• H01J37/32183 Primary

  Matching circuits · CPC title

• H03J5/246

  using electronic means (H03J5/244 takes precedence) · CPC title