RRAM cell structure and fabrication method therefor

Patent metadata

Field	Value
Publication number	US-12501627-B2
Application number	US-202017786523-A
Country	US
Kind code	B2
Filing date	Jul 23, 2020
Priority date	Dec 18, 2019
Publication date	Dec 16, 2025
Grant date	Dec 16, 2025

Abstract

The present invention disclosures a RRAM cell structure, comprising a first transistor and a second transistor which are connected in parallel and commonly connected to a resistive switching device; wherein, the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device. The present invention uses cell area of a traditional 1T1R to manufacture a 2T1R cell structure, which can take into account various operating voltage requirements of the resistive switching device simultaneously, so as to significantly improve cell performances thereof.

First claim

What is claimed is:

1 . A resistive random-access memory (RRAM) cell structure, comprising a first transistor and a second transistor which are connected in parallel and a resistive switching device connected with the first transistor and the second transistor commonly; wherein,
the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device; the RRAM cell structure is set on a semiconductor substrate, a raised cuboid is set on the surface of the semiconductor substrate, the first drain and the second drain are set on the top surface of the raised cuboid, the first gate and the second gate are respectively set on the two sidewalls of the raised cuboid, and the first source and the second source are respectively set on the semiconductor substrate adjacent to the two sides of the raised cuboid, a first gate dielectric layer and a second gate dielectric layer are respectively set to separate the first gate and the second gate from the semiconductor substrate; the first transistor is set with a first channel, the second transistor is set with a second channel, the first channel and the second channel are commonly set in the raised cuboid to respectively form a vertical channel structure; a dielectric layer is set on the surface of the semiconductor substrate, and the resistive switching device is set in the dielectric layer; and the thicknesses of the first gate dielectric layer and the second gate dielectric layer are different, the types and doses of the ion implantations of the first transistor and the second transistor are different.

2 . The RRAM cell structure of claim 1 , wherein the first transistor and the second transistor in layout is equivalent to a planar MOS transistor; wherein, the first source and the second source in layout is equivalent to the source and drain of the planar MOS transistor, and the first drain and the second drain in layout is equivalent to the gate of the planar MOS transistor, the first gate and the second gate are corresponding to the two gate sidewalls of the planar MOS transistor.

3 . The RRAM cell structure of claim 1 , wherein the resistive switching device comprises a resistive switching stack, which comprises a top electrode, a resistive switching layer and a bottom electrode in sequence, the first drain and the second drain are connected to the bottom electrode of the resistive switching device through a contact hole set in the dielectric layer, and the bit signal is applied to the top electrode of the resistive switching device.

4 . The RRAM cell structure of claim 1 , wherein the first transistor is used for the forming operation of the RRAM cell, and the second transistor is used for the data set/reset/read operations of the RRAM cell; or, the first transistor is used for the forming/set operations of the RRAM cell, and the second transistor is used for the data reset/read operations of the RRAM cell, or, the first transistor is used for the forming/reset operations of the RRAM cell, and the second transistor is used for the data set/read operations of the RRAM cell.

5 . A fabrication method for a resistive random-access memory (RRAM) cell structure, wherein the RRAM cell structure comprises a first transistor and a second transistor which are connected in parallel and a resistive switching device connected with the first transistor and the second transistor commonly; wherein,
the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device, the fabrication method comprising: S 1 : providing a planar silicon substrate, defining a device region of the first transistor and the second transistor on the silicon substrate, and forming a raised cuboid on the silicon substrate in the device region; S 2 : forming the first drain of the first transistor and the second drain of the second transistor on the top surface of the raised cuboid, connecting the first drain and the second drain, and forming the first source of the first transistor and the second source of the second transistor respectively on the semiconductor substrate adjacent to the two sides of the raised cuboid; S 3 : forming the first gate dielectric layer of the first transistor and the second gate dielectric layer of the second transistor respectively on each of the two sides of the raised cuboid and the surface of the semiconductor substrate adjacent to the two sides of the raised cuboid; S 4 : forming a first sidewall gate of the first transistor and a second sidewall gate of the second transistor respectively on the first gate dielectric layer and the second gate dielectric layer on each of the two sides of the raised cuboid; and S 5 : forming a dielectric layer on the silicon substrate, forming back-end metal layers in the dielectric layer, and forming a resistive switching stack of a resistive switching device above the first drain and the second drain, thus forming the RRAM cell structure; wherein, using a standard ion implantation process in CMOS technique, performing ion implantation processes with different types and doses to the first drain and the second drain, the first source and the second source and the first gate and the second gate respectively.

6 . The fabrication method of claim 5 , wherein, in S 4 : using a standard self-aligned sidewall process in CMOS technique comprising a gate material deposition process and a sidewall etching process to form the first gate and the second gate.

7 . A fabrication method for a resistive random-access memory (RRAM) cell structure, wherein the RRAM cell structure comprises a first transistor and a second transistor which are connected in parallel and a resistive switching device connected with the first transistor and the second transistor commonly; wherein,
the first transistor is set with a first gate, a first source and a first drain, a first control signal is applied to the first gate, and a first source signal is applied to the first source; the second transistor is set with a second gate, a second source and a second drain, a second control signal is applied to the second gate, and a second source signal is applied to the second source; the first drain is connected with the second drain, which are commonly connected to one terminal of the resistive switching device, and a bit signal is applied to another terminal of the resistive switching device, the fabrication method comprising: S 1 : providing a planar silicon substrate, defining a device region of the first transistor and the second transistor on the silicon substrate, and forming a raised cuboid on the silicon substrate in the device region; S 2 : forming the first drain of the first transistor and the second drain of the second transistor on the too surface of the raised cuboid, connec

Assignees

• Shanghai Integrated Circuit Equipment & Mat Industry Innovation Center Co Ltd
• Shanghai Ic R&D Ct Co Ltd

Inventors

• Guo Ao

Classifications

• H10N70/011

  Manufacture or treatment of multistable switching devices · CPC title

• G11C13/0028

  Word-line or row circuits · CPC title

• G11C13/0026

  Bit-line or column circuits · CPC title

• G11C2213/15

  Current-voltage curve · CPC title

• G11C2213/74

  Array wherein each memory cell has more than one access device · CPC title