Semiconductor processing tool and methods of operation

Patent metadata

Field	Value
Publication number	US-12500106-B2
Application number	US-202217661838-A
Country	US
Kind code	B2
Filing date	May 3, 2022
Priority date	May 3, 2022
Publication date	Dec 16, 2025
Grant date	Dec 16, 2025

Abstract

Some implementations described herein provide a deposition tool that includes a grounding component between an edge ring of a substrate stage and a pumping plate component. The grounding component includes a grounding strap having a deformation region. The deformation region includes a recessed edge to reduce a likelihood of the grounding strap rubbing against a surface of the pumping plate component during operation of the deposition tool. Material properties of the grounding strap may reduce a likelihood of plastic deformation of the grounding strap during repeated cycling. In this way, an amount of particulates dislodged from the surface of the pumping plate component may be decreased to improve a yield of semiconductor product fabricated using the deposition tool. Furthermore, a frequency of servicing the grounding component may be decreased to decrease a downtime of the deposition tool and increase a throughput of semiconductor product fabricated using the deposition tool.

First claim

What is claimed is:

1 . A method, comprising:
transmitting, by a controller to a positioning system of a deposition tool, a first signal to cause the positioning system to raise a semiconductor substrate carried by a substrate stage to a deposition region in which a pumping plate component is configured to draw a flow of a gas over the semiconductor substrate during a deposition operation,
wherein an edge ring is attached to the substrate stage,
wherein the edge ring includes a protrusion extending outwardly from an outer perimeter of the substrate stage,
wherein a grounding component is between a top-side surface of the protrusion and an under-side surface of an overhang region of the pumping plate component,
wherein the grounding component comprises a grounding strap and a coupling component that couples attach regions at opposing ends of the grounding strap to form an elliptical portion of the grounding component, and
wherein the grounding strap comprises a deformation region including at least one recessed edge along the elliptical portion; and
transmitting, by the controller to the positioning system, a second signal to lower the semiconductor substrate from the deposition region.

2 . The method of claim 1 , wherein transmitting the first signal to cause the positioning system to raise the semiconductor substrate is to further cause the grounding strap to become compressed between the top-side surface of the protrusion and the under-side surface of the overhang region,
wherein becoming compressed engages the deformation region of the grounding strap to the under-side surface of the overhang region to close an electrically-conductive path between the substrate stage and the pumping plate component.

3 . The method of claim 1 , wherein transmitting the second signal to cause the positioning system to lower the semiconductor substrate is to further cause the grounding strap to become uncompressed between the top-side surface of the protrusion and the under-side surface of the overhang region,
wherein becoming uncompressed disengages the deformation region of the grounding strap from the under-side surface of the overhang region to open an electrically-conductive path between the substrate stage and the pumping plate component.

4 . The method of claim 1 , further comprising:
determining a need to service the grounding component; and transmitting a third signal to cause a notification system to present an indication of the need to service the grounding component.

5 . The method of claim 4 , wherein determining the need to service the grounding component comprises:
using a machine-learning model that correlates one or more historical operating conditions of the deposition tool to a likelihood of the grounding component causing a contamination condition, wherein the one or more historical operating conditions correspond to one or more of:
a number of compressive cycles of the grounding strap,
a contact resistance between the grounding strap and the under-side surface of the overhang region, or
a detected contamination condition of the semiconductor substrate.

6 . The method of claim 1 , wherein the deformation region has a width that is lesser relative to a width of one or more of the attach regions.

7 . The method of claim 1 , wherein a first lead-in from a first edge of a first attach region, of the attach regions, and a second lead-in from a second edge of a second attach region, of the attach regions, form the recessed edge.

8 . A method, comprising:
transmitting, by a controller to a deposition tool, a first signal to raise a semiconductor substrate carried by a substrate stage to a deposition region in which a pumping component, comprising an overhang region, is configured to draw a flow of a gas over the semiconductor substrate,
wherein an edge ring is attached to the substrate stage and includes a protrusion,
wherein a grounding component is between a top-side surface of the protrusion and an under-side surface of the overhang region,
wherein the grounding component comprises a grounding strap that comprises a first attach region configured to be attached to the protrusion, a second attach region configured to be attached to the protrusion, and a deformation region between the first attach region and the second attach region,
wherein a first lead-in from a first edge of the first attach region and a second lead-in from a second edge of the second attach region create a recessed edge within the deformation region; and
transmitting, by the controller to the deposition tool, a second signal to lower the semiconductor substrate from the deposition region.

9 . The method of claim 8 , wherein attachment of the first attach region and the second attach region to the protrusion creates an approximate elliptical portion of the grounding component.

10 . The method of claim 8 , wherein:
the first attach region comprises a first pair of alignment holes configured to attach the first attach region to the protrusion, and the second attach region comprises a second pair of alignment holes configured to attach the second attach region to the protrusion.

11 . The method of claim 8 , wherein the grounding strap is configured to become compressed between the top-side surface of the protrusion and the under-side surface of the overhang region based on raising the semiconductor substrate.

12 . The method of claim 11 , wherein compression of the grounding strap closes an electrically-conductive path between the substrate stage and the pumping component.

13 . An apparatus, comprising:
a controller configured to:
transmit a first signal to raise a semiconductor substrate carried by a substrate stage to a deposition region in which a pumping plate component is configured to draw a flow of a gas over the semiconductor substrate,
wherein an edge ring, attached to the substrate stage, includes a protrusion extending outwardly from an outer perimeter of the substrate stage,
wherein a grounding component is between a top-side surface of the protrusion and an under-side surface of an overhang region of the pumping plate component,
wherein the grounding component comprises a grounding strap that has attach regions at opposing ends of the grounding strap, and
wherein the grounding strap comprises a deformation region including at least one recessed edge along an elliptical portion; and

transmit a second signal to lower the semiconductor substrate from the deposition region.

14 . The apparatus of claim 13 , wherein a property of the grounding strap comprises one or more of:
a tensile strength greater than approximately 200 megapascals, a modulus of elasticity greater than approximately 100 gigapascals, a Brinell hardness number greater than approximately 100, or an electrical conductivity greater than approximately 0.9×10 6 siemens per meter.

15 . The apparatus of claim 13 , wherein a material of the grounding strap comprises:
a type 301 stainless steel material.

16 . The apparatus of claim 13 , wherein dimensional properties of the grounding strap comprise:
a length that is included in a range of approximately 108.9 millimeters to approximately 133.1 millimeters.

17 . The apparatus of claim 13 , wherein dimensional properties of the deformation region comprise:
a length that is included in a range of approximately 70.2 millimeters to approximately 85.8 millimeters, or a width that is included in a range of approximately 5.9 millimeters to approximately 7.3 millimeters.

18 . The apparat

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Peng Hsuan-Ying
• Lee Chin-Szu
• Shih Chiang Hsien
• Wu Chih-Chang
• Tung Che-Wei

Classifications

• H10P72/7618 Primary

  characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel · CPC title

• H10W20/056

  by filling conductive material into holes, grooves or trenches · CPC title

• H10W20/035

  combinations of barrier, adhesion or liner layers, e.g. multi-layered barrier layers · CPC title

• H10W20/425

  Barrier, adhesion or liner layers · CPC title

• H10W20/081

  by forming openings in the dielectric parts · CPC title