Optical inspection apparatus

Patent metadata

Field	Value
Publication number	US-12498316-B2
Application number	US-202318532379-A
Country	US
Kind code	B2
Filing date	Dec 7, 2023
Priority date	Jun 22, 2020
Publication date	Dec 16, 2025
Grant date	Dec 16, 2025

Abstract

An optical inspection apparatus includes a stage that supports a target substrate, the target substrate including a plurality of light emitting elements, a jig that applies an electrical signal to the target substrate, the jig including a regulation resistor, a microscope that generates magnified image data of the target substrate, a camera that captures the magnified image data to generate a color image of the target substrate, and an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate.

First claim

What is claimed is:

1 . An optical inspection apparatus comprising:
a stage that supports a target substrate, the target substrate including a plurality of light emitting elements; a laser that irradiates inspection light to the plurality of light emitting elements; a microscope that generates magnified image data of the target substrate; a camera that captures the magnified image data to generate a color image of the target substrate; and an optical measurement device that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate, wherein the spectrum image includes a plurality of pixels, the optical measurement device measures an optical characteristic value corresponding to each of the plurality of pixels of the spectrum image, the microscope includes a plurality of lenses to magnify a surface of the target substrate, and a size of a pixel of the plurality of pixels of the spectrum image is smaller than a size of a light emitting element of the plurality of light emitting elements included in the magnified image data.

2 . The optical inspection apparatus of claim 1 , wherein the optical measurement device includes a two-dimensional spectroscope.

3 . The optical inspection apparatus of claim 1 , wherein the plurality of light emitting elements absorb light energy of the inspection light and emit light.

4 . The optical inspection apparatus of claim 3 , wherein a wavelength of the inspection light is shorter than a wavelength of the light emitted by the plurality of light emitting elements.

5 . The optical inspection apparatus of claim 1 , further comprising:
a light path adjusting device that adjusts a light path of light of the magnified image data of the target substrate to the camera.

6 . The optical inspection apparatus of claim 1 , wherein each of the plurality of light emitting elements has a diameter in a range of about 30 nm to about 700 nm and a height in a range of about 1 micron to about 10 microns.

7 . The optical inspection apparatus of claim 1 , wherein
each of the light emitting elements is comprised of an active layer disposed between a first semiconductor layer and a second semiconductor layer, and the active layer has a length in a range of about 50 nm to about 100 nm.

8 . The optical inspection apparatus of claim 1 , further comprising a controller that determines an occurrence of noise in the optical measurement device by receiving the color image from the camera, receiving the spectrum image from the optical measurement device, and comparing the color image with the spectrum image.

9 . The optical inspection apparatus of claim 1 , further comprising a controller that is programmed and configured to receive the color image from the camera, receive the spectrum image from the optical measurement device, and determine an occurrence of noise in the optical inspection apparatus by comparing the color image with the spectrum image.

10 . An optical inspection apparatus comprising:
a stage that supports a target substrate, the target substrate including a plurality of light emitting elements; a laser that irradiates inspection light to the plurality of light emitting elements; a microscope that generates magnified image data of the target substrate; a camera that captures the magnified image data to generate a color image of the target substrate; an optical measurement device that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate; a light path adjusting device that adjusts a light path of light of the magnified image data of the target substrate to the camera; and a controller that determines an occurrence of noise in the optical measurement device, wherein the controller receives the color image from the camera, receives the spectrum image from the optical measurement device, and compares the color image with the spectrum image.

Assignees

• Samsung Display Co Ltd

Inventors

• Yoo Je Won
• Veidhes Basrur
• Kim Dae Hyun
• Cho Hyun Min
• Lee Jong Won
• Lee Joo Yeol

Classifications

• G01R31/2656

  using non-ionising electromagnetic radiation, e.g. optical radiation · CPC title

• G01R31/2635

  Testing light-emitting diodes, laser diodes or photodiodes · CPC title

• G02B21/26

  Stages; Adjusting means therefor · CPC title

• G01N21/1717

  with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance · CPC title

• G02B21/361

  Optical details, e.g. image relay to the camera or image sensor (G02B21/364 takes precedence; illumination details G02B21/06 and subgroups) · CPC title