Graphite disc

Patent metadata

Field	Value
Publication number	US-12494392-B2
Application number	US-202318301502-A
Country	US
Kind code	B2
Filing date	Apr 17, 2023
Priority date	Nov 12, 2020
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

Disclosed is a graphite disc solving a problem of poor performance uniformity of the epitaxial wafer, which is obtained during material epitaxial growth by using the graphite disc. The graphite disc includes a graphite disc body, where the graphite disc body includes a groove and a plurality of projections on a bottom wall of the groove, and the plurality of projections divide the groove into a plurality of independent regions. According to the graphite disc provided by the present disclosure, a plurality of regions are defined in the groove by using the projections, each region corresponds to one substrate, and different regions are interconnected. Compared with the graphite disc structure with one groove corresponding to one substrate in the related art, a space for gas flow is enlarged, therefore a problem that an edge of the epitaxial wafer is too thick caused by gas flow is alleviated.

First claim

What is claimed is:

1 . A graphite disc, comprising:
a graphite disc body, wherein the graphite disc body comprises a groove and a plurality of projections on a bottom wall of the groove, and the plurality of projections divide the groove into a plurality of regions independent from each other.

2 . The graphite disc according to claim 1 , wherein an edge of an orthographic projection of the groove on the graphite disc body comprises at least one arc segment, and a side wall corresponding to each of the at least one arc segment and at least one of the plurality of projections enclose a region among the plurality of regions.

3 . The graphite disc according to claim 2 , wherein the at least one arc segment is a minor arc.

4 . The graphite disc according to claim 2 , wherein the edge of the orthographic projection of the groove on the graphite disc body comprises a plurality of arc segments and a straight-line segment between adjacent two arc segments.

5 . The graphite disc according to claim 4 , wherein the straight-line segment is tangent to adjacent arc segments.

6 . The graphite disc according to claim 2 , wherein the edge of the orthographic projection of the groove on the graphite disc body comprises a plurality of arc segments and a polygonal-line segment between adjacent two arc segments.

7 . The graphite disc according to claim 2 , wherein the side wall corresponding to each of the at least one arc segment and multiple projections enclose the region among the plurality of regions, and the multiple projections are separated from each other.

8 . The graphite disc according to claim 7 , wherein a distance between adjacent two of the multiple projections is greater than or equal to 1 mm.

9 . The graphite disc according to claim 2 , wherein the plurality of regions comprise a first region and a second region, the plurality of projections comprise a common projection, and the common projection is a part of both a side wall of the first region and a side wall of the second region.

10 . The graphite disc according to claim 1 , wherein each of the plurality of projections is board-shaped or column-shaped.

11 . The graphite disc according to claim 1 , wherein each of the plurality of projections comprises a through-hole running through the projection in a direction parallel to the bottom wall of the groove.

12 . The graphite disc according to claim 1 , wherein a material of the plurality of projections is any one of SiC, quartz, graphite and sapphire.

13 . The graphite disc according to claim 1 , wherein a surface of each of the plurality of regions is convex or concave.

Assignees

• Enkris Semiconductor Inc

Inventors

• Cheng Kai
• Zhang Liyang

Classifications

• H10P72/135 Primary

  characterised by a material, a roughness, a coating or the like · CPC title

• H10P72/10

  using carriers specially adapted therefor, e.g. front opening unified pods [FOUP] · CPC title

• C30B25/12

  Substrate holders or susceptors · CPC title

• C23C16/4584

  the substrate being rotated · CPC title

• H01L21/67316 Primary

  Electricity · mapped topic