Delay time measurement method and system

Patent metadata

Field	Value
Publication number	US-12494341-B2
Application number	US-202318120278-A
Country	US
Kind code	B2
Filing date	Mar 10, 2023
Priority date	Sep 11, 2020
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

A method of measuring a delay time of a propagation of a signal in a line in a circuit structure, the method comprises irradiating the line by pulses of a charged particle beam, wherein a pulse repetition frequency of the pulses of the charged particle beam is varied. The method further comprises measuring, for each of the pulse repetition frequencies, a secondary charged particle emission responsive to the irradiating the line by the pulses of the charged particle beam at the respective pulse repetition frequency, and deriving the delay time of the line based on the secondary charged particle emission responsive to the varying of the pulse repetition frequency.

First claim

The invention claimed is:

1 . A computer-readable medium storing instructions that, when executed by a computer, cause the computer to perform operations comprising:
irradiating a line by pulses of a charged particle beam, wherein a pulse repetition frequency of the pulses of the charged particle beam is varied, measuring, for each of the pulse repetition frequencies, a secondary charged particle emission responsive to the irradiating the line by the pulses of the charged particle beam at the respective pulse repetition frequency, and deriving a delay time of the line based on the secondary charged particle emission responsive to the varying of the pulse repetition frequency.

2 . The computer readable medium of claim 1 , wherein the pulse repetition is varied over a pulse repetition frequency range which includes a frequency defined by one over the delay time of the line.

3 . The computer readable medium of claim 1 , wherein the delay time of the line is determined as a high frequency roll off point in the secondary charged particle emission responsive to the varying of the pulse repetition frequency.

4 . The computer readable medium of claim 1 , wherein a pulse width of the pulses is smaller than a pulse repetition time determined by the pulse repetition frequency.

5 . The computer readable medium of claim 1 , wherein for each pulse repetition frequency, the irradiating the line by at least two subsequent pulses is repeated, the secondary charged particle emission responsive to the at least two subsequent pulses is measured with each repetition, and the measured secondary charged particle emissions for each repetition frequency are averaged.

6 . The computer readable medium of claim 5 , wherein the delay time of the line is derived from a relation between the averaged secondary charged particle emission and the pulse repetition frequency.

7 . A system for measuring a delay time of propagation of a signal in a line in a circuit structure, the system comprising:
a charged particle beam source configured to irradiate the line by pulses of a charged particle beam, wherein a pulse repetition frequency of the pulses of the charged particle beam is varied, a secondary charge particle emission detector to measure, for each of the pulse repetition frequencies, a secondary charged particle emission responsive to the irradiating the line by the pulses of the charged particle beam at the respective pulse repetition frequency, and a data processing device configured to derive the delay time of the line based on the secondary charged particle emission responsive to the varying of the pulse repetition frequency.

8 . The system according to claim 7 , wherein the charged particle beam source is configured to vary the pulse repetition over a pulse repetition frequency range which includes a frequency defined by one over the delay time of the line.

9 . The system according to claim 7 , wherein the data processing device is configured to determine the delay time of the line as a high frequency roll off point in the secondary charged particle emission responsive to the varying of the pulse repetition frequency.

10 . The system according to claim 7 , wherein a pulse width of the pulses is smaller than a pulse repetition time determined by the pulse repetition frequency.

11 . The system according to claim 7 , wherein the charged particle beam is configured to repeat, for each pulse repetition time, the irradiating the line by at least two subsequent pulses, the detector being configured to measure the secondary charged particle emission responsive to the at least two subsequent pulses with each repetition, and the data processing device is configured to average the measured secondary charged particle emissions for each repetition time.

12 . The system according to claim 11 , wherein the data processing device is configured to derive the delay time of the line from a change of the averaged secondary charged particle emission as a function of the pulse repetition time between the two subsequent pulses of the charge particle beam.

13 . The system according to claim 7 , wherein the charged particle beam is an electron beam, the secondary charged particle emission being secondary electron emission.

14 . The system according to claim 7 , wherein the circuit structure is a die.

15 . The system according to claim 7 , wherein the pulses of the charged particle beam charge the line to a potential, the potential of the line affecting the secondary charged particle emission, wherein the data processing device is configured to derive the delay time of the line from a decay of the potential of the line, and to derive the decay of the potential of the line from an effect of a change of the pulse repetition frequency on the secondary charged particle emission.

Assignees

• Asml Netherlands Bv

Inventors

• Gaury Benoit Herve
• Van Rens Jasper Frans Mathijs

Classifications

• H01J37/28

  with scanning beams {(H01J37/268, H01J37/292, H01J37/2955 take precedence)} · CPC title

• H01J37/244

  Detectors; Associated components or circuits therefor · CPC title

• G01R27/2682

  using optical methods or electron beams · CPC title

• G01R29/14

  Measuring field distribution · CPC title

• G01R29/023

  Measuring pulse width · CPC title