Air shrouds with integrated heat exchanger

Patent metadata

Field	Value
Publication number	US-12492867-B2
Application number	US-202217730038-A
Country	US
Kind code	B2
Filing date	Apr 26, 2022
Priority date	Apr 26, 2022
Publication date	Dec 9, 2025
Grant date	Dec 9, 2025

Abstract

A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

First claim

What is claimed is:

1 . A heating module for a process chamber suitable for use in semiconductor manufacturing, the heating module comprising:
an outer housing including a sidewall extending to a lid; a reflector plate disposed in the outer housing; a plurality of heating lamps associated with the reflector plate; and a first heat exchange module disposed in the outer housing between the reflector plate and the lid, the first heat exchange module including:
a plurality of first heat exchange tubes disposed between a first inner shroud and a first outer shroud; and
a baffle extending from the first outer shroud to the lid.

2 . The heating module of claim 1 , wherein the first heat exchange module further comprises a plurality of plates coupled to each first heat exchange tube.

3 . The heating module of claim 1 , wherein each first heat exchange tube is coupled to a coolant inlet and a coolant outlet.

4 . The heating module of claim 3 , wherein each first heat exchange tube is arranged in multiple passes between the first inner shroud and the first outer shroud, and includes one or more U-bends.

5 . The heating module of claim 1 , wherein the first heat exchange module further comprises a first fan disposed between the reflector plate and the lid.

6 . The heating module of claim 5 , wherein:
an annular heat shield extends from the reflector plate; a space within the heating module is divided into:
a first region between the first fan and the lid;
a second region between the first fan and the reflector plate; and
a third region between the annular heat shield and the outer housing; and
the first fan is configured to blow a cooling gas within the heating module in a circuit comprising:
drawing the cooling gas from the first region into the second region;
blowing the cooling gas from the second region through a plurality of apertures in the reflector plate and through the annular heat shield;
conveying the cooling gas from the annular heat shield into the third region; and
conveying the cooling gas from the third region between the first inner shroud and the first outer shroud around the first heat exchange tubes, and into the first region.

7 . The heating module of claim 1 , wherein the first heat exchange module further comprises a skirt extending from the first inner shroud to a reflector mounting ring coupled to the reflector plate.

8 . The heating module of claim 1 , further comprising a second heat exchange module disposed between the reflector plate and the lid, the second heat exchange module including a plurality of second heat exchange tubes disposed between a second inner shroud and a second outer shroud.

9 . The heating module of claim 8 , further comprising a second fan disposed between the reflector plate and the lid.

10 . The heating module of claim 1 , further comprising a cooling tube coupled to the reflector plate.

11 . The heating module of claim 10 , wherein the first heat exchange tubes are configured to convey a first coolant, and the cooling tube is configured to convey a second coolant different from the first coolant.

12 . A processing chamber suitable for use in semiconductor manufacturing, comprising:
a chamber body including a upper window disposed above a lower window, the upper window and the lower window forming boundaries of a processing volume; and an upper heating module coupled to the chamber body above the upper window, the upper heating module including:
a first outer housing including a sidewall extending to a first lid;
a first reflector plate disposed in the first outer housing;
a plurality of first heating lamps associated with the first reflector plate; and
a first heat exchange module disposed in the first outer housing between the first reflector plate and the first lid, the first heat exchange module including a plurality of first heat exchange tubes disposed between a first inner shroud and a first outer shroud; and
a baffle extending from the first outer shroud to the first lid.

13 . The processing chamber of claim 12 , further comprising:
a lower heating module coupled to the chamber body below the lower window, the lower heating module including:
a second outer housing;
a second lid on the second outer housing;
a second reflector plate disposed in the second outer housing;
a plurality of second heating lamps associated with the second reflector plate; and
a second heat exchange module disposed between the second reflector plate and the second lid, the second heat exchange module including a plurality of second heat exchange tubes disposed between a second inner shroud and a second outer shroud.

14 . The processing chamber of claim 13 , further comprising a controller configured to control operation of a first fan of the first heat exchange module and a second fan of the second heat exchange module.

Assignees

• Applied Materials Inc

Inventors

• Palaty Abraham
• Ramachandran Vinodh
• Lau Shu-Kwan
• Nellikka Shainish
• Dhamodharan Raja Murali
• Wang Danny D

Classifications

• F28D1/024 Primary

  with an air driving element · CPC title

• F28F1/24

  and extending transversely (F28F1/38 takes precedence) · CPC title

• F28D2001/0286

  Radiating plates; Decorative panels · CPC title

• F28D1/0477

  the conduits being bent in a serpentine or zig-zag · CPC title

• C30B25/105

  by irradiation or electric discharge · CPC title