Thermal coupled quartz dome heat sink

Patent metadata

Field	Value
Publication number	US-9748121-B2
Application number	US-201414175459-A
Country	US
Kind code	B2
Filing date	Feb 7, 2014
Priority date	Mar 5, 2013
Publication date	Aug 29, 2017
Grant date	Aug 29, 2017

Abstract

Embodiments described herein generally relate to apparatus for processing substrates. The apparatus generally include a process chamber having a substrate support therein. A plurality of lamps are positioned to provide radiant energy through an optically transparent window to a substrate positioned on the substrate support. The plurality of lamps are positioned in a lamp housing. A cooling channel is formed in the lamp housing. A surface of the lamp housing is spaced a distance from the optically transparent window to form a gap therebetween. The gap functions as a fluid channel and is adapted to contain a fluid therein to facilitate cooling of the optically transparent window. Turbulence inducing features, such as openings, formed in the surface of the lamp housing induce a turbulent flow of the cooling fluid, thus improving heat transfer between the optically transparent window and the lamp housing.

First claim

What is claimed is:

1. A process chamber, comprising:
a chamber body including an optically transparent window;
a lamp housing having an upper surface disposed adjacent to the optically transparent window, the lamp housing having a plurality of openings formed within the upper surface of the lamp housing, the optically transparent window and the lamp housing having a gap therebetween, wherein the upper surface of the lamp housing comprises turbulence-inducing features adjacent the gap, the turbulence-inducing features including bumps or ridges;
a plurality of lamps disposed within the lamp housing and positioned to direct radiant energy through the plurality of openings formed within the upper surface of the lamp housing;
one or more cooling channels disposed within the lamp housing, the one or more cooling channels defined between the plurality of lamps and the upper surface of the lamp housing, the upper surface of the lamp housing disposed between the one or more cooling channels and the gap; and
a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent window and the lamp housing.

2. The process chamber of claim 1 , wherein the lamp housing comprises copper or aluminum.

3. The process chamber of claim 1 , wherein the temperature control unit includes a heat exchanger.

4. The process chamber of claim 1 , wherein the temperature control unit includes a forced induction unit.

5. The process chamber of claim 1 , wherein the optically transparent window is a lower dome.

6. The process chamber of claim 1 , wherein the optically transparent window comprises quartz.

7. The process chamber of claim 6 , wherein the gap has a size of about 0.5 millimeters to about 10 millimeters.

8. The process chamber or claim 6 , wherein each lamp comprises a bulb surrounded by a reflector.

9. A process chamber, comprising:
a chamber body including an optically transparent window;
a lamp housing having an upper surface disposed adjacent to the optically transparent window, the lamp housing having a plurality of openings formed within the upper surface of the lamp housing, the optically transparent window and the lamp housing having a gap therebetween, wherein the upper surface of the lamp housing comprises turbulence-inducing features adjacent the gap, the turbulence-inducing features including bumps or ridges;
a plurality of lamps disposed within the lamp housing and positioned to direct radiant energy through the plurality of openings formed in the upper surface of the lamp housing, wherein each lamp comprises a bulb surrounded by a reflector;
one or more cooling channels disposed within the lamp housing, the one or more cooling channels defined between the plurality of lamps and the upper surface of the lamp housing, the upper surface of the lamp housing disposed between the one or more cooling channels and the gap; and
a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent window and the lamp housing.

10. The process chamber of claim 9 , wherein the optically transparent window is a lower dome.

11. The process chamber of claim 10 , wherein the gap has a size of about 0.5 millimeters to about 10 millimeters.

12. The process chamber of claim 11 , wherein the turbulence-inducing features include bumps or ridges formed on the upper surface of the lamp housing.

13. A process chamber, comprising:
a chamber body including an optically transparent window;
a lamp housing having an upper surface disposed adjacent to the optically transparent window, the upper surface having a plurality of openings formed within the lamp housing, the optically transparent window and the lamp housing having a gap therebetween, the gap having a size of about 0.5 millimeters to about 10 millimeters, wherein the upper surface of the lamp housing comprises turbulence-inducing features adjacent the gap, the turbulence-inducing features including bumps or ridges;
a plurality of lamps disposed within the lamp housing and positioned to direct radiant energy through the plurality of openings formed in the upper surface of the lamp housing, wherein each lamp comprises a bulb surrounded by a reflector;
one or more cooling channels disposed within the lamp housing, the one or more cooling channels defined between the plurality of lamps and the upper surface of the lamp housing, the upper surface of the lamp housing disposed between the one or more cooling channels and the gap; and
a temperature control unit adapted to provide a cooling fluid to the gap between the optically transparent window and the lamp housing.

14. The process chamber of claim 13 , wherein the temperature control unit includes a heat exchanger.

15. The process chamber of claim 14 , wherein the temperature control unit includes a forced induction unit.

Assignees

• Applied Materials Inc

Inventors

• Ranish Joseph M
• Samir Mehmet Tugrul
• Brillhart Paul

Classifications

• H10P72/0436 Primary

  mainly by radiation · CPC title

• C23C16/4411

  Cooling of the reaction chamber walls (C23C16/45572 takes precedence) · CPC title

• H01L21/67115 Primary

  Electricity · mapped topic

• C23C16/463

  Cooling of the substrate · CPC title