MEMS solenoid inductor and manufacturing method thereof
US-12136509-B2 · Nov 5, 2024 · US
US12488935B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12488935-B2 |
| Application number | US-202217824674-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 25, 2022 |
| Priority date | Jun 3, 2021 |
| Publication date | Dec 2, 2025 |
| Grant date | Dec 2, 2025 |
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An inductor component comprising a base body; a coil on the base body and wound helically along an axis; and first and second external electrodes disposed on the base body and connected electrically to the coil. The base body includes a substrate having first and second main surfaces that face each other; and an insulating layer on the first main surface. The coil includes first and second coil wires respectively disposed on the first and second main surfaces and covered with the insulating layer; and first and second through wires extending through the substrate from the first main surface to the second main surface and opposite to each other with respect to the axis. The first coil wire, the first through wire, the second coil wire, and the second through wire are connected in the mentioned order, to make up at least a part of the helical.
Opening claim text (preview).
What is claimed is: 1 . An inductor component comprising: a base body; a coil disposed on the base body and wound helically along an axis; and a first external electrode and a second external electrode disposed on the base body and connected electrically to the coil, the base body including: a substrate having a first main surface and a second main surface that face each other; and an insulating layer disposed on the first main surface, the coil including: a first coil wire disposed on the first main surface and covered with the insulating layer; a second coil wire disposed on the second main surface; and a first through wire and a second through wire both extending through the substrate from the first main surface to the second main surface and arranged opposite to each other with respect to the axis, the first coil wire, the first through wire, the second coil wire, and the second through wire being connected in mentioned order, to make up at least a part of the helical, the first coil wire and the second coil wire are closest to a first end surface of the substrate that extends between the first main surface and the second main surface, at least a part of the first external electrode being disposed above the first coil wire and on the insulating layer spaced apart from the first coil wire, and when viewed from a direction orthogonal to the first main surface, the first external electrode overlaps each of the first coil wire and the second coil wire, with an overlapping portion between the first external electrode and the first coil wire being smaller in area than an overlapping portion between the first external electrode and the second coil wire. 2 . The inductor component of claim 1 , wherein the substrate includes glass. 3 . The inductor component of claim 2 , wherein the substrate contains Si element. 4 . The inductor component of claim 2 , wherein the first through wire and the second through wire extend in a direction orthogonal to the first main surface. 5 . The inductor component of claim 2 , wherein the insulating layer has a thickness that is one third or less of the thickness of the substrate, and the insulating layer has a permittivity that is smaller than the permittivity of the substrate. 6 . The inductor component of claim 1 , wherein the first through wire and the second through wire extend in a direction orthogonal to the first main surface. 7 . The inductor component of claim 1 , wherein the insulating layer has a thickness that is one third or less of the thickness of the substrate, and the insulating layer has a permittivity that is smaller than the permittivity of the substrate. 8 . The inductor component of claim 1 , wherein the first coil wire extends in only one direction. 9 . The inductor component of claim 1 , wherein the second coil wire extends in only one direction. 10 . The inductor component of claim 1 , wherein when viewed from a direction orthogonal to the first main surface, a first end of the first coil wire overlaps a first end of the second coil wire, and an angle defined between the first coil wire and the second coil wire is an acute angle. 11 . The inductor component of claim 10 , wherein the angle is from 5 degrees to 45 degrees. 12 . The inductor component of claim 1 , wherein the first coil wire includes a plurality of first coil wires, with the second coil wire including a plurality of second coil wires, when viewed from a direction orthogonal to the first main surface, a first end of one first coil wire overlaps a first end of one second coil so that the one first coil wire and the one second coil wire make up one set of a plurality of sets, and when viewed from a direction orthogonal to the first main surface, an angle defined between the first coil wire and the second coil wire of at least one set differs from an angle defined between the first coil wire and second coil wire of another set. 13 . The inductor component of claim 1 , wherein the first coil wire includes a plurality of first coil wires, the first through wire includes a plurality of first through wires, with the second through wire including a plurality of second through wires, one first coil wire and one first through wire and one second through wire connected respectively to ends of the one first coil wire make up one set of a plurality of sets, and when viewed from a direction orthogonal to the first main surface, an extension direction of the first coil wire connected to the first through wire and the second through wire of at least one set is orthogonal to the direction of the axis of the coil, with the first through wire and the second through wire of the at least one set being arranged line-symmetric with respect to the axis of the coil. 14 . The inductor component of claim 1 , wherein the second coil wire includes a plurality of second coil wires, the first through wire includes a plurality of first through wires, with the second through wire including a plurality of second through wires, one second coil wire and one first through wire and one second through wire connected respectively to ends of the one second coil wire make up one set of a plurality of sets, and when viewed from a direction orthogonal to the first main surface, an extension direction of the second coil wire connected to the first through wire and the second through wire of at least one set is orthogonal to the direction of the axis of the coil, with the first through wire and the second through wire of the at least one set being arranged line-symmetric with respect to the axis of the coil. 15 . The inductor component of claim 1 , wherein at least one of the first through wire and the second through wire has a circular section orthogonal to an extension direction thereof. 16 . The inductor component of claim 1 , wherein at least one of the first through wire and the second through wire includes a plurality of conductor layers, and at least one of the plurality of conductor layers contains copper as a main component. 17 . The inductor component of claim 1 , wherein at least one of the first through wire and the second through wire includes a plurality of conductor layers, and at least one of the plurality of conductor layers is made of conductive resin. 18 . The inductor component of claim 1 , wherein when viewed from a direction orthogonal to the first main surface, the first coil wire has a recess on an upper surface of a portion that overlaps an end surface, toward the first coil wire, of the through wire connected to the first coil wire. 19 . The inductor component of claim 1 , wherein the base body is of a rectangular parallelepiped shape having a length, a width, and a height, the inductor component has a volume of 0.08 mm 3 or less, and the inductor component has a long side whose length is 0.65 mm or less. 20 . The inductor component of claim 1 , wherein the first coil wire, the second coil wire, the first through wire, and the second through wire contain copper as a main component. 21 . An inductor component comprising: a base body; a coil disposed on the base body and wound helically along an axis; and a first external electrode and a second external electrode disposed on the base body and connected electrically to the coil, the base body including: a substrate having a first main surface and a second main surface that face each other; and an insulating layer disposed on the
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