Methods for calibrating an optical emission spectrometer

Patent metadata

Field	Value
Publication number	US-12487121-B2
Application number	US-202418581626-A
Country	US
Kind code	B2
Filing date	Feb 20, 2024
Priority date	Apr 26, 2019
Publication date	Dec 2, 2025
Grant date	Dec 2, 2025

Abstract

One or more embodiments described herein generally relate to systems and methods for calibrating an optical emission spectrometer (OES) used for processing semiconductor substrates. In embodiments herein, a light fixture is mounted to a plate within a process chamber. A light source is positioned within the light fixture such that it provides an optical path that projects directly at a window through which the OES looks into the process chamber for its reading. When the light source is on, the OES measures the optical intensity of radiation from the light source. To calibrate the OES, the optical intensity of the light source is compared at two separate times when the light source is on. If the optical intensity of radiation at the first time is different than the optical intensity of radiation at the second time, the OES is modified.

First claim

We claim:

1 . A method for calibrating an optical emission spectrometer (OES), comprising:
measuring an optical intensity of radiation from a first light source mounted within a first process chamber with a first OES located outside the first process chamber; measuring an optical intensity of radiation from a second light source mounted within a second process chamber with a second OES located outside the second process chamber; determining a correction factor by comparing the optical intensity of radiation within the first chamber with the optical intensity of radiation within the second chamber; and modifying the second OES by the correction factor when the optical intensity of radiation within the first chamber is different than the optical intensity of radiation of the second chamber.

2 . The method of claim 1 , wherein the first light source and the second light source are the same light source.

3 . The method of claim 1 , wherein the first light source and the second light source each have a wavelength spectrum in a range from about 200 nm to about 800 nm.

4 . The method of claim 1 , wherein a first optical path travels from the first light source into a first diffuser located inside the first process chamber, and a second optical path travels from the second light source into a second diffuser located inside the second process chamber.

5 . The method of claim 4 , wherein a first optical path travels from the first diffuser through a first optical window attached to a side wall of the first process chamber and a second optical path travels from the second diffuser through a second optical window attached to a side wall of the second process chamber.

6 . The method of claim 5 , wherein the first optical path travels through the first optical window into a first fiber optic line, and the second optical path travels from the second optical window into a second fiber optic line.

7 . The method of claim 6 , wherein the first fiber optic line and the second fiber optic line each have a 400 μm core.

8 . A method for calibrating an optical emission spectrometer (OES), comprising:
mounting a first light fixture within a first process chamber, wherein the light fixture includes a first light source; measuring an optical intensity of radiation from the first light source with a first OES located outside the first process chamber; removing the first light fixture from the first process chamber after measuring the optical intensity of radiation; mounting a second light fixture within a second process chamber, wherein the second light fixture includes a second light source; measuring an optical intensity of radiation from the second light source with a second OES located outside the second process chamber; comparing the optical intensity of radiation within the first process chamber with the optical intensity of radiation within the second process chamber; and modifying the second OES when the optical intensity of radiation within the first chamber is different than the optical intensity of radiation within the second process chamber.

9 . The method of claim 8 , wherein the first light source and the second light source are the same light source.

10 . The method of claim 8 , wherein the first light source and the second light source are xenon flash lamps.

11 . The method of claim 8 , wherein a first optical path travels from the first light source into a first diffuser located inside the first process chamber and a second optical path travels from the second light source into a second diffuser located inside the second process chamber.

12 . The method of claim 11 , wherein the first optical path travels from the first diffuser through a first optical window attached to a side wall of the first process chamber and the second optical path travels from the second diffuser through a second optical window attached to a side wall of the second process chamber.

13 . The method of claim 12 , wherein the first optical path travels through the first optical window into a first fiber optic line, and the second optical path travels from the second optical window into a second fiber optic line.

14 . The method of claim 13 , wherein the first light source and the second light source each have a wavelength spectrum in a range from about 200 nm to about 800 nm.

15 . A process system, comprising:
a plurality of process chambers; a plate mounted within at least two of the plurality of the process chambers; an optical emission spectrometer (OES) located outside the each of at least two of the process chambers; a light fixture mounted to each plate, wherein each light fixture includes a light source, wherein:
an optical path is provided between the light source and the OES, and wherein the OES measures an optical intensity of radiation from the light source; and
a computer-readable storage medium configured to receive information from the OES, and when executed by a processor performs an operation, comprising:
comparing the optical intensity of radiation from a first chamber of the plurality of chambers with the optical intensity of radiation from a second chamber of the plurality of chambers; and
modifying the OES from the second chamber of the plurality of chambers when the optical intensity of radiation of the first chamber is different than the optical intensity of radiation of the second chamber.

16 . The system of claim 15 , wherein the light source is a xenon flash lamp.

17 . The system of claim 16 , wherein the light source has a wavelength spectrum in a range from about 200 nm to about 800 nm.

18 . The system of claim 15 , wherein the optical path travels from the light source into a diffuser located inside each process chamber.

19 . The system of claim 18 , wherein the optical path travels from the diffuser through an optical window attached to a side wall of each process chamber.

20 . The system of claim 19 , wherein the optical path travels through the optical window into a fiber optic line.

Assignees

• Applied Materials Inc

Inventors

• Lo Kin Pong
• Hawrylchak Lara
• Bevan Malcolm J
• Guarini Theresa Kramer
• Liu Wei
• Hwang Bernard L

Classifications

• G01J3/0218 Primary

  using optical fibers · CPC title

• G01J3/443

  Emission spectrometry · CPC title

• G01J2003/2879

  Calibrating scan, e.g. Fabry Perot interferometer · CPC title

• G01J3/10

  Arrangements of light sources specially adapted for spectrometry or colorimetry · CPC title

• G01J3/28 Primary

  Investigating the spectrum (using colour filters G01J3/51) · CPC title