Resistive oxygen gas sensor and oxygen sensor device
US-2024210342-A1 · Jun 27, 2024 · US
US12480905B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12480905-B2 |
| Application number | US-202418941306-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 8, 2024 |
| Priority date | Nov 20, 2023 |
| Publication date | Nov 25, 2025 |
| Grant date | Nov 25, 2025 |
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Provided is a gas concentration measuring device including a heat generating resistor that generates heat when electricity is supplied and a stage supporting the resistor. The resistor and the stage overlap in plan view. The stage has a plan view area S of 3.6×10 7 μm 2 or less. The ratio of the area S to the total volume V of the heat generating resistor and the stage, S/V, ranges from 0.0010 to 10 μm −1 . The device is configured to measure an oxygen gas concentration in a sample gas on the basis of the resistance of the heat generating resistor.
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The invention claimed is: 1. A method for measuring a concentration of oxygen gas in a sample gas, the method comprising: receiving the sample gas containing the oxygen gas and nitrogen gas via a gas concentration measuring device, wherein the gas concentration measuring device includes: a heat generating resistor configured to generate heat when electricity is supplied thereto; and a stage supporting the heat generating resistor; and measuring the concentration of the oxygen gas in the sample gas based on a resistance of the heat generating resistor of the gas concentration measuring device, wherein the heat generating resistor and the stage overlap each other in a plan view, the stage has an area S of 1.0×106 μm 2 or less in the plan view, and a ratio of the area S to a total volume V of the heat generating resistor and the stage, S/V, is in a range of 0.0010 μm −1 to 10 μm −1 . 2. The method according to claim 1 , wherein the concentration of the oxygen gas is measured while a temperature difference between the heat generating resistor and the sample gas is maintained at 30° C. or more by supplying the electricity to the heat generating resistor.
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