Method for manufacturing mask and deposition apparatus including mask

Patent metadata

Field	Value
Publication number	US-12480197-B2
Application number	US-202117478083-A
Country	US
Kind code	B2
Filing date	Sep 17, 2021
Priority date	Dec 8, 2020
Publication date	Nov 25, 2025
Grant date	Nov 25, 2025

Abstract

A deposition apparatus includes a chamber, a deposition source disposed in the chamber, a mask assembly, and a base substrate disposed on the mask assembly. The mask assembly includes a frame including frame openings, a mask disposed on the frame and including deposition holes, and a welding stick disposed on the mask. A welding groove is disposed along an edge of the frame and has a depth in the thickness direction of the frame. The welding stick overlaps the welding groove.

First claim

What is claimed is:

1 . A deposition apparatus comprising:
a chamber; a deposition source disposed in the chamber; a mask assembly comprising:
a frame including frame openings;
a mask disposed on the frame, the mask including deposition holes; and
a welding stick disposed on the mask; and
a base substrate disposed on the mask assembly, wherein the frame comprises:
a body part having a rectangular frame extending in a first direction and a second direction intersecting the first direction; and
the frame openings extending in a third direction perpendicular to a plane formed by the first and second directions,
a welding groove is defined in the body part of the frame extending along the first direction, the welding groove having a depth in the third direction of the frame, the welding stick overlaps the welding groove with the mask disposed between the welding stick and the welding groove in the third direction, the welding stick extending in the first direction along the welding groove, an upper surface of the welding stick and a portion, spaced apart from the upper surface of the welding stick, of an upper surface of the mask provide a flat surface on which the base substrate is disposed, the upper surface of the welding stick and the portion of the upper surface of the mask both contact with the base substrate, and the mask has a portion disposed in the welding groove.

2 . The deposition apparatus of claim 1 , wherein
the mask comprises:
a base layer comprising a first surface contacting the base substrate and a second surface opposite the first surface, the base layer including first openings; and
a metal layer disposed on the second surface of the base layer, the metal layer including second openings, wherein
the first openings and the second openings include at least one first opening and at least one second opening which overlap each other to form the deposition holes disposed in the mask, and a width of the at least one first opening is less than a width of the at least one second opening.

3 . The deposition apparatus of claim 2 , wherein a portion of the second surface is exposed from the metal layer by the at least one second opening.

4 . The deposition apparatus of claim 2 , wherein
the base layer has a first side surface which defines the at least one first opening and is inclined from the first surface of the base layer, and the metal layer has a second side surface which defines the at least one second opening and is inclined from the second surface of the base layer in a same direction as the first side surface of the base layer.

5 . The deposition apparatus of claim 4 , wherein each of the first openings and the second openings has a trapezoidal shape in a cross-sectional view.

6 . The deposition apparatus of claim 2 , wherein
the mask further comprises an additional layer disposed between the base layer and the metal layer, and the additional layer includes third openings.

7 . The deposition apparatus of claim 6 , wherein
the first openings, the second openings, and the third openings include at least one first opening, at least one second opening, and at least one third opening which overlap each other to form the deposition holes disposed in the mask, and a width of the at least one third opening is greater than the width of the at least one first opening and less than the width of the at least one second opening.

8 . The deposition apparatus of claim 2 , wherein
the base layer comprises an organic material, and the metal layer comprises at least one of aluminum, copper, and transparent conductive oxide.

9 . The deposition apparatus of claim 1 , wherein the portion of the mask disposed in the welding groove overlaps the welding stick.

10 . The deposition apparatus of claim 1 , further comprising a magnetic plate disposed above the mask assembly to provide a magnetic force to the mask.

11 . The deposition apparatus of claim 1 , wherein
the frame comprises:
first partition parts extending in the first direction; and
second partition parts extending in the second direction, and
the frame openings of the frame are formed by the first partition parts and the second partition parts.

12 . The deposition apparatus of claim 1 , wherein
the deposition source comprises an organic material, and the deposition source evaporates the organic material and injects the evaporated organic material to the frame openings.

13 . The deposition apparatus of claim 1 , wherein
the mask is provided in plural, the plurality of masks are arranged in the first direction and extend in the second direction, and the welding stick extends in the first direction to overlap an end of each of the masks.

Assignees

• Samsung Display Co Ltd

Inventors

• Son Ji-Hee
• Moon Youngmin
• Kim Jaeuoon
• Song Seungyong
• Im Sungsoon
• Choung Jong-Hyun
• Cho Hyunmin

Classifications

• H10P14/61

  using masks · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C16/042

  using masks · CPC title

• C23C14/12

  Organic material · CPC title

• C23F1/04

  Chemical milling · CPC title