Oled material vacuum thermal evaporating mask plate

Patent metadata

Field	Value
Publication number	US-2016348227-A1
Application number	US-201514429352-A
Country	US
Kind code	A1
Filing date	Feb 9, 2015
Priority date	Dec 4, 2014
Publication date	Dec 1, 2016
Grant date	—

Abstract

The present invention provides an OLED material vacuum thermal evaporating mask plate, comprising a mask frame ( 1 ), a quickset ( 3 ) fixed on the mask frame ( 1 ) and a mask ( 5 ) fixed on the quickset ( 3 ); the mask frame ( 1 ) comprises four edges, and the four edges surround to form an opening corresponding to the mask ( 5 ); each edge of the mask frame ( 1 ) comprises a groove ( 11 ) dented at the upper surface; the quickset ( 3 ) is fixed in the groove ( 11 ); the mask ( 5 ) is fixed on the quickset ( 3 ) by point weld, and welding points ( 7 ) are on the quickset ( 3 ). When the mask deforms and the replacement is necessary, only the quickset is extracted for polishing or is replaced. The mask frame can be repeatedly used to diminish the waste amount and to raise the availability of the mask frame. Meanwhile, the spare amount of the mask frame can be reduced to save material and production cost.

First claim

What is claimed is:

1 . An OLED material vacuum thermal evaporating mask plate, comprising a mask frame, a quickset fixed on the mask frame and a mask fixed on the quickset;
the mask frame comprises four edges, and the four edges surround to form an opening corresponding to the mask; a surface of one side of the mask frame close to the mask is defined to be an upper surface, and each edge of the mask frame comprises a groove dented at the upper surface; the quickset is fixed in the groove; the mask is fixed on the quickset by point weld, and welding points are on the quickset.

2 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein the quickset and the groove form a seamless tight fit in dimension.

3 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein at least two first stepped holes are located under each groove, and the first stepped hole comprises a first sink hole and a light aperture; the quickset comprises tapping holes corresponding to the first stepped holes; a first screw penetrates the light aperture to be locked in the tapping hole, and thus to fix the quickset in the groove.

4 . The OLED material vacuum thermal evaporating mask plate according to claim 3 , wherein at least one second stepped hole is located under each groove, and the second stepped hole comprises a second sink hole and a tapping through hole; a second screw is screwed in the tapping through hole; as quickset is to be extracted from the groove, the quickset can be lifted by rotating the second screw to push the quickset out of the groove.

5 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein a width of the groove is larger than 1.5 times of a diameter of the welding point, and a depth of the groove is smaller than ½ of a thickness of the mask frame.

6 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein sectional shapes of the groove and the quickset are the same, and both are squares or rectangles.

7 . The OLED material vacuum thermal evaporating mask plate according to claim 4 , wherein depths of the first sink hole and the second sink hole are smaller than ⅓ of a thickness of the mask frame.

8 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein planenesses of an upper surface of the quickset and the upper surface of the mask frame are then same, and both are controlled to be less than 50 micrometers.

9 . The OLED material vacuum thermal evaporating mask plate according to claim 1 , wherein materials of the quickset and the mask frame are the same, and both are stainless.

10 . The OLED material vacuum thermal evaporating mask plate according to claim 4 , wherein the quickset is an unitary type or a combined type.

11 . An OLED material vacuum thermal evaporating mask plate, comprising a mask frame, a quickset fixed on the mask frame and a mask fixed on the quickset;
the mask frame comprises four edges, and the four edges surround to form an opening corresponding to the mask; a surface of one side of the mask frame close to the mask is defined to be an upper surface, and each edge of the mask frame comprises a groove dented at the upper surface; the quickset is fixed in the groove; the mask is fixed on the quickset by point weld, and welding points are on the quickset; wherein the quickset and the groove form a seamless tight fit in dimension; wherein at least two first stepped holes are located under each groove, and the first stepped hole comprises a first sink hole and a light aperture; the quickset comprises tapping holes corresponding to the first stepped holes; a first screw penetrates the light aperture to be locked in the tapping hole, and thus to fix the quickset in the groove.

12 . The OLED material vacuum thermal evaporating mask plate according to claim 11 , wherein at least one second stepped hole is located under each groove, and the second stepped hole comprises a second sink hole and a tapping through hole; a second screw is screwed in the tapping through hole; as quickset is to be extracted from the groove, the quickset can be lifted by rotating the second screw to push the quickset out of the groove.

13 . The OLED material vacuum thermal evaporating mask plate according to claim 11 , wherein a width of the groove is larger than 1.5 times of a diameter of the welding point, and a depth of the groove is smaller than ½ of a thickness of the mask frame.

Assignees

• Shenzhen China Star Optoelect

Inventors

• Wu Tsungyuan
• Liu Yawei

Classifications

• C23C14/24

  Vacuum evaporation · CPC title

• H01L51/0011

  Electricity · mapped topic

• C23C14/042 Primary

  using masks · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C14/04

  Coating on selected surface areas, e.g. using masks · CPC title