Manifold for a substrate container

Patent metadata

Field	Value
Publication number	US-12469728-B2
Application number	US-202117192715-A
Country	US
Kind code	B2
Filing date	Mar 4, 2021
Priority date	Mar 6, 2020
Publication date	Nov 11, 2025
Grant date	Nov 11, 2025

Abstract

A substrate container includes a shell defining an interior space and a manifold with an inlet and a gas distributing surface. The shell includes a front opening, a bottom wall, and a rear wall. The manifold is attached to the bottom wall and is closer to the front opening than the rear wall. The gas distributing surface is configured to distribute purge gas into the interior space. A method of purging an open substrate container includes supplying a first stream of purge gas to a manifold and supplying a second stream of purge gas to an interior space of the substrate container. The method also including the manifold distributing the purge gas of the first stream within the interior space of the substrate container.

First claim

What is claimed is:

1 . A substrate container, comprising:
a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, a bottom wall, and a front edge extending between opposing walls along the front opening of the shell; and a manifold attached at the bottom wall, the top wall, the first sidewall and/or the second side wall closer to the front opening of the shell than the rear wall, the manifold including:
an inlet configured to receive a stream of purge gas; and
a gas distributing portion including a gas distributing surface configured to distribute the stream of purge gas into the interior space, the gas distributing portion including the gas distributing surface extending in a direction between opposing walls along a front edge of the shell, wherein the gas distributing surface includes a plurality of openings arranged along a length of the gas distributing surface between opposing walls.

2 . The substrate container of claim 1 , wherein the inlet of the manifold is attached to an inlet port in the bottom wall of the shell.

3 . The substrate container of claim 1 , wherein the gas distributing portion has a length that extends along a majority of a distance between the first side wall and the second side wall.

4 . The substrate container of claim 1 , wherein the gas distributing surface is configured to distribute at least a portion of the purge gas in a direction towards the front opening of the shell by the plurality of openings.

5 . The substrate container of claim 1 , wherein the gas distributing surface comprises a porous material.

6 . The substrate container of claim 1 , wherein the manifold includes an outlet configured to facilitate exhaustion of the purge gas from the interior space of the substrate container.

7 . The substrate container of claim 1 , wherein each of the bottom wall, top wall, first side wall or second side wall has an interior surface that faces the interior space, and the manifold is configured to distribute the purge gas from the gas distributing surface at an angle relative to the interior surface of respective bottom wall, top wall, first side wall or second side wall to which it is attached.

8 . The substrate container of claim 1 , wherein the manifold includes at least a first gas distributing portion having a gas distributing surface that extends along the front edge of the first side wall and a second gas distributing portion having a gas distributing surface that extends along one of a front edge of the second side wall of the shell, wherein the first side wall is opposite the second side wall of the shell.

9 . The substrate container of claim 1 , wherein the manifold includes a frame that supports the gas distributing portion including the gas distributing surface.

10 . The substrate container of claim 1 , further comprising:
an outlet port for discharging gas from the interior space, wherein the gas distributing portion extends between the inlet and the outlet port.

11 . The substrate container of claim 1 , wherein the manifold further comprises a gas diffusion portion connected to an outlet port for discharging gas from the interior space.

12 . The substrate container of claim 1 , wherein
the rear wall is opposite to the front opening, and the bottom wall includes a rear inlet port for introducing an additional stream of purge gas into the interior space, the rear inlet port being disposed near the rear wall than the front opening.

13 . The substrate container of claim 1 , further comprising:
a door configured to be received within the front opening defined by the shell to enclose the interior space.

14 . A substrate container, comprising:
a shell defining an interior space, the shell including a front opening, a first side wall, a second side wall, a rear wall, a top wall, a bottom wall and including a front edge extending between opposing walls along the front opening of the shell, and a port in the bottom wall and/or the top wall of the shell; and a manifold attached to the shell near the front opening, the manifold including:
a gas diffusion portion including a gas diffusion surface configured to permit the diffusion of the stream of purge gas from the interior space into the manifold, the gas diffusion portion including the gas diffusion surface extending in a direction between the first side wall and the second side wall of the shell, the gas diffusion surface comprising a plurality of openings configured to release gas in a same direction; and
an outlet coupled to the at least one port in the shell, the outlet configured to exhaust the purge gas from the manifold to the port in the shell to an exterior of the substrate container.

15 . The substrate container of claim 14 , wherein the manifold is attached to the port in the bottom wall or the top wall of the shell.

Assignees

• Entegris Inc

Inventors

• Fuller Matthew
• Harr Colton J
• Dutro Ian

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/1924 Primary

  characterised by atmosphere control · CPC title

• H10P72/1926 Primary

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1918 Primary

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H01L21/67386

  Electricity · mapped topic