Substrate storage apparatus and apparatus for processing substrate using the same

Patent metadata

Field	Value
Publication number	US-2020105565-A1
Application number	US-201916538067-A
Country	US
Kind code	A1
Filing date	Aug 12, 2019
Priority date	Sep 28, 2018
Publication date	Apr 2, 2020
Grant date	—

Abstract

Provided are a substrate storage apparatus and a substrate processing apparatus using the substrate storage apparatus. The substrate storage apparatus includes a housing having a loading/unloading port for loading/unloading of a substrate and configured to provide a loading space for a loaded substrate, a separation membrane coupled to the housing to divide the loading space into a plurality of separation spaces isolated from each other, a gas supplier configured to supply a purge gas into the loading space to clean the substrate, a gas discharger configured to discharge the purge gas accommodated in the loading space, and a controller configured to control supply and discharge of the purge gas for each of the plurality of separation spaces.

First claim

What is claimed is:

1 . A substrate storage apparatus comprising:
a housing having a loading/unloading port for loading/unloading a substrate and configured to provide a loading space for a loaded substrate; a separation membrane coupled to the housing to divide the loading space into a plurality of separation spaces isolated from each other; a gas supplier configured to supply a purge gas to the loading space to clean the substrate; a gas discharger configured to discharge the purge gas accommodated in the loading space; and a controller configured to control supply and discharge of the purge gas for each of the plurality of separation spaces.

2 . The substrate storage apparatus of claim 1 , wherein the separation membrane divides the loading space into an upper space and a lower space.

3 . The substrate storage apparatus of claim 1 , wherein the separation membrane is attachable to or detachable from the housing.

4 . The substrate storage apparatus of claim 1 , wherein each of the plurality of separation spaces accommodates substrates that are subjected to the same process or are in the same state.

5 . The substrate storage apparatus of claim 1 , wherein a plurality of gas suppliers and a plurality of gas dischargers are provided for each of the plurality of separation spaces, and
the controller individually controls the plurality of gas suppliers and the plurality of gas dischargers provided for each of the plurality of separation spaces.

6 . The substrate storage apparatus of claim 5 , wherein the controller controls the plurality of gas suppliers and the plurality of gas dischargers through one of a filling mode, in which each of the plurality of separation spaces is kept filled with the purge gas, and an exhaust mode, in which each of the plurality of separation spaces is exhausted so that a gas flow is formed for the plurality of separation spaces.

7 . The substrate storage apparatus of claim 6 , wherein the controller implements the filling mode or the exhaust mode by adjusting the number of operations of the plurality of gas suppliers and the number of operations of the plurality of gas dischargers provided in each of the plurality of separation spaces.

8 . The substrate storage apparatus of claim 6 , wherein the gas suppliers include a first supplier and a second supplier, and
the controller controls such that the purge gas is supplied through the first supplier and the second supplier in the filling mode, and the purge gas is supplied through the first supplier in a state in which supply of the purge gas through the second supplier is blocked in the exhaust mode.

9 . The substrate storage apparatus of claim 8 , wherein the first supplier is located closer to the loading/unloading port than the second supplier.

10 . The substrate storage apparatus of claim 8 , wherein each of the first supplier and the second supplier includes:
a gas supply line configured to provide a transfer path of the purge gas supplied to the loading space; a gas supply valve configured to adjust an amount of the purge gas transferred along the gas supply line; and a spray nozzle configured to spray the purge gas transferred through the gas supply line into the loading space.

11 . The substrate storage apparatus of claim 6 , wherein the gas discharger includes a first discharger and a second discharger, and
the controller controls such that the purge gas is exhausted through the first discharger and the second discharger in the exhaust mode, and the purge gas is discharged through the first discharger in a state in which discharge of the purge gas through the second discharger is blocked in the filling mode.

12 . The substrate storage apparatus of claim 11 , wherein the first discharger is located closer to the loading/unloading port than the second discharger.

13 . The substrate storage apparatus of claim 11 , wherein each of the first discharger and the second discharger includes:
a gas discharge line configured to provide a transfer path of the purge gas discharged from the loading space; a gas discharge valve configured to adjust an amount of the purge gas transferred along the gas discharge line; and a discharge port configured to collect the purge gas accommodated in the loading space to guide the purge gas to the gas discharge line.

14 . The substrate storage apparatus of claim 13 , wherein the gas discharger further includes a third discharger,
discharge ports of the first discharger and the second discharger are disposed on an upper surface or a lower surface of the separation space, and a discharge port of the third discharger is disposed on a rear surface of the separation space.

15 . A substrate processing apparatus comprising:
a process module having at least one process unit and configured to perform a manufacturing process on an input substrate; an index module configured to insert a substrate into the process module and eject the substrate on which the manufacturing process is completed in the process module; and a substrate storage apparatus configured to perform a cleaning operation by loading the substrate inserted into the process module or the substrate ejected from the process module, wherein the substrate storage apparatus includes a plurality of separation spaces for separating and loading substrates having mutually different states.

16 . The substrate processing apparatus of claim 15 , wherein the substrate storage apparatus includes:
a housing configured to provide a loading space for the substrate; and a separation membrane coupled to the housing to divide the loading space into the plurality of separation spaces.

17 . The substrate processing apparatus of claim 16 , wherein the separation membrane divides the loading space into an upper space and a lower space.

18 . The substrate storage apparatus of claim 16 , wherein the separation membrane is attachable to or detachable from the housing.

19 . The substrate processing apparatus of claim 16 , wherein each of the plurality of separation spaces accommodates substrates that are subjected to the same process or are in the same state.

20 . The substrate processing apparatus of claim 16 , wherein the substrate storage apparatus includes:
a gas supplier configured to supply a purge gas into the loading space to clean the substrate; a gas discharger configured to discharge the purge gas accommodated in the loading space; and a controller configured to control supply and discharge of the purge gas for each of the plurality of separation spaces.

21 . The substrate processing apparatus of claim 20 , wherein the controller controls the plurality of gas suppliers and the plurality of gas dischargers through one of a filling mode, in which each of the plurality of separation spaces is kept filled with the purge gas, and an exhaust mode, in which each of the plurality of separation spaces is exhausted so that a gas flow is formed for the plurality of separation spaces.

22 . The substrate processing apparatus of claim 15 , wherein the substrate storage apparatus includes a side storage.

Assignees

• Semes Co Ltd

Inventors

• Son Duk Hyun
• Kim Je Ho

Classifications

• H10P72/1922

  characterised by the construction of the closed carrier · CPC title

• H10P72/0408

  for drying · CPC title

• H10P72/3404 Primary

  Storage means · CPC title

• B08B5/02

  Cleaning by the force of jets, e.g. blowing-out cavities {(airguns or nozzles per se B05B1/005)} · CPC title

• H01L21/67034

  Electricity · mapped topic