Unit for storing liquid and apparatus for treating substrate

Patent metadata

Field	Value
Publication number	US-12465935-B2
Application number	US-202217941526-A
Country	US
Kind code	B2
Filing date	Sep 9, 2022
Priority date	Sep 17, 2021
Publication date	Nov 11, 2025
Grant date	Nov 11, 2025

Abstract

The inventive concept provides a liquid storage unit. The liquid storage unit includes a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet.

First claim

What is claimed is:

1 . A liquid storage unit comprising:
a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet, wherein a part or all of the inlet at least partially overlaps the first guide surface when seen from above.

2 . The liquid storage unit of claim 1 , wherein the first guide surface is configured to be formed so a flow of a liquid introduced from the inlet is guided further away from the outlet.

3 . The liquid storage unit of claim 1 , wherein the first guide surface is provided to have a height which decreases in a direction toward a part at which the inlet is provided from a part at which the outlet is provided.

4 . The liquid storage unit of claim 1 , wherein the outlet is positioned outside of a region at which the first guide surface is projected in an up/down direction.

5 . The liquid storage unit of claim 1 , wherein the first guide surface is a portion among a bottom surface defining the storing space, and
the bottom surface has a center which upwardly protrudes and a height which decreases from the center toward an edge direction, and wherein the first guide surface is defined as a surface having the height which decreases, and the liquid outlet pipe is provided penetrating through the center which upwardly protrudes.

6 . The liquid storage unit of claim 1 , wherein the first guide surface is a rounded shape.

7 . The liquid storage unit of claim 2 , wherein a bottom surface includes a second guide surface having a height which increases from an end portion of the first guide surface toward an edge direction.

8 . The liquid storage unit of claim 7 , wherein the second guide surface is a rounded shape.

9 . The liquid storage unit of claim 1 , wherein the inlet of the liquid inlet pipe is positioned adjacent to a bottom surface of the storing space.

10 . The liquid storage unit of claim 9 , wherein the inlet is positioned at a position lower than a top end of the first guide surface or at a same level.

11 . The liquid storage unit of claim 1 , wherein the outlet is positioned at a position higher than a top portion of the first guide surface or at a same level.

12 . The liquid storage unit of claim 1 , wherein the inlet is positioned at a position lower than a top end of the first guide surface or at a same level, and
wherein the outlet is positioned at a position higher than a top portion of the first guide surface or at a same level.

13 . The liquid storage unit of claim 1 , wherein a level of the outlet is higher than a level at which the inlet is positioned.

14 . A liquid storage unit comprising:
a tank housing defining a storing space therein; and a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon; and a first line connecting the liquid outlet pipe and the liquid inlet pipe, and wherein the outlet is positioned at a position higher than a position of the inlet.

15 . The liquid storage unit of claim 14 further comprising a pump provided at the first line and configured to generate a flow of a liquid from the liquid outlet pipe to the liquid inlet pipe.

16 . The liquid storage unit of claim 14 further comprising a liquid charging line connected through a liquid supply source and a second line, and penetrating into the tank housing.

17 . A liquid storage unit comprising:
a tank housing defining a storing space therein; a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and wherein a first guide surface is provided between the outlet and the inlet, and the first guide surface is defined as a bottom surface defining the storing space.

18 . The liquid storage unit of claim 17 , wherein the first guide surface is a rounded shape.

19 . The liquid storage unit of claim 18 , wherein the bottom surface includes a second guide surface having a height which increases from an end portion of the first guide surface toward an edge direction.

20 . The liquid storage unit of claim 17 , wherein the outlet is positioned outside of a region at which the first guide surface is projected in an up/down direction.

Assignees

• Semes Co Ltd

Inventors

• Choi Moon Soon
• Lim Chae Young
• Ha Do Gyeong
• An Gu Yeol

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• B08B3/02

  Cleaning by the force of jets or sprays · CPC title

• B05C11/1042

  provided with means for heating or cooling the liquid or other fluent material in the supplying means upstream of the applying apparatus · CPC title

• B65D1/323

  the container comprising internally a dip tube through which the contents pass · CPC title