Method and apparatus for evaluating electrostatic or nonlinear devices

Patent metadata

Field	Value
Publication number	US-12459809-B2
Application number	US-202117540719-A
Country	US
Kind code	B2
Filing date	Dec 2, 2021
Priority date	Feb 7, 2018
Publication date	Nov 4, 2025
Grant date	Nov 4, 2025

Abstract

Aspects are directed to a MEMS device configurable to receive signals from a first, a second, a third, and a fourth signal source operating at a first, a second, a third, and a fourth frequency, respectively. The MEMS device may be configured to combine the first signal with the second signal generating a first combined signal, and to combine the third signal with the fourth signal generating a second combined signal. The first combined signal may be coupled to the first terminal of the MEMS device while the second combined signal may be coupled to the second terminal of the MEMS device. The first common terminal may be configured to produce an output associated with the second and fourth frequencies. The MEMS device may be further configured to derive from the produced output a signal indicative of nonlinearities or of changes in capacitance related to the MEMS device.

First claim

What is claimed is:

1 . A method for use with a MEMS apparatus, the method comprising:
actuating the MEMS apparatus via an input signal, wherein the MEMS apparatus has an arrangement of at least one micro-mirror that is integrated with a capacitive portion and that provides a field of view; using modulation circuitry to modulate the input signal via signal modulation selected as including one or a combination from among the following: drive amplitude modulation, phase modulation, and frequency modulation; and using the modulated input signal to drive the MEMS apparatus and to cause a change or increase in the field of view provided by the arrangement of at least one micro-mirror.

2 . The method of claim 1 , further including using the MEMS apparatus for scanning with a configurable field of view facilitated via the modulated input signal driving the MEMS apparatus.

3 . The method of claim 1 , wherein the signal modulation includes drive amplitude modulation.

4 . The method of claim 1 , wherein the signal modulation includes phase modulation.

5 . The method of claim 1 , wherein the signal modulation includes frequency modulation.

6 . The method of claim 1 , wherein the signal modulation includes two of the following: drive amplitude modulation, phase modulation, and frequency modulation.

7 . The method of claim 1 , wherein the modulated input signal is used to drive the MEMS apparatus and therein to set desired scan patterns by the change or increase in the field of view.

8 . The method of claim 1 , further including scanning, in response to the modulated input signal being used to drive the MEMS apparatus.

9 . The method of claim 1 , further including combining a first driving signal with a first high-frequency signal to generate the modulated input signal, wherein the frequency of the first high-frequency signal is higher than the frequency of the first driving signal.

10 . The method of claim 9 , wherein the first driving signal has a frequency of at least 1 Megahertz and is to prevent detectable movements associated with the MEMS apparatus.

11 . The method of claim 1 , further including using signal combiner circuitry to:
combine a first driving signal with a first high-frequency signal to generate the modulated input signal, wherein the frequency of the first high-frequency signal is higher than the frequency of the first driving signal; and combine a second driving signal with a second high-frequency signal, wherein the frequency of the second high-frequency signal is higher than the frequency of the second driving signal.

12 . The method of claim 11 , wherein the first high-frequency signal and the second high-frequency signal have respective phases differing by 90 degrees.

13 . The method of claim 1 , further including generating the modulated input signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal.

14 . The method of claim 1 , further including generating the modulated input signal as a phase-modulated signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal.

15 . The method of claim 1 , further including generating the modulated input signal as an amplitude-modulated signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal.

16 . The method of claim 1 , further including generating the modulated input signal as a frequency-modulated signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal.

17 . The method of claim 1 , further including: generating the modulated input signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal; and demodulating a signal that is associated with the modulated input signal due to use of the MEMS apparatus, wherein the step of demodulating a signal involves the use of a frequency-demodulation circuit to discern frequencies that are carried by the first high-frequency signal and associated with the first driving signal.

18 . The method of claim 1 , further including: generating the modulated input signal by using signal combining circuitry with inputs corresponding to a first high-frequency signal and a first driving signal; and demodulating a signal that is associated with the modulated input signal due to use of the MEMS apparatus, wherein the step of demodulating a signal involves the use of a phase-detector or phase-demodulation circuit to discern phases that are carried by the first high-frequency signal and associated with the first driving signal.

19 . The method of claim 1 , further including: using signal combining circuitry to provide the modulated input signal as a drive signal, corresponding to at least one of an amplitude modulated signal and a phase modulated signal, and driving a drive input terminal of the MEMs apparatus with the modulated input signal; and using the MEMS apparatus as driven by the modulated input signal to cause fluctuations in displacement of the MEMS apparatus and, in response, to provide one or more desired scan patterns via the field of view, wherein the fluctuations are to enable a modulation detector, responsive to the MEMS apparatus, to measure the displacement as a function of variation relating to said at least one of the amplitude modulated signal and the phase modulated signal.

20 . An apparatus comprising:
a MEMS device to be actuated using an input signal, the MEMS device including at least one micro-mirror and including capacitive circuitry, the capacitive circuitry being integrated with the at least one micro-mirror to provide a field of view; and modulation circuitry to
provide an input drive signal via signal modulation selected as including one or a combination from among: amplitude modulation, phase modulation, and frequency modulation, and
drive the MEMS device with the input drive signal to cause a change or increase in the field of view.

21 . The apparatus of claim 20 , further including a detector circuit comprising a phase shifting circuit, a first squaring circuit, a second squaring circuit, and a summed-squared circuit, wherein the modulation circuitry is to provide the input drive signal, via at least one of amplitude modulation and phase modulation, with variation of the input drive signal related to a deflection or displacement characteristic of the MEMS device.

Assignees

• Univ Leland Stanford Junior

Inventors

• Manosalvas-Kjono Sandra
• Quan Ronald
• Solgaard Olav
• Sun Zhanghao

Classifications

• B81B3/0021

  Transducers for transforming electrical into mechanical energy or vice versa (dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00) · CPC title

• B81B2201/038

  Microengines and actuators not provided for in B81B2201/031 - B81B2201/037 · CPC title

• B81C99/003

  Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B7/02

  containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS] (B81B7/04 takes precedence) · CPC title