Bulk acoustic wave resonator and method of manufacturing bulk acoustic wave resonator

Patent metadata

Field	Value
Publication number	US-12451863-B2
Application number	US-202217888633-A
Country	US
Kind code	B2
Filing date	Aug 16, 2022
Priority date	Aug 19, 2021
Publication date	Oct 21, 2025
Grant date	Oct 21, 2025

Abstract

A method of manufacturing a bulk acoustic wave (BAW) resonator according to an embodiment of the present invention may include: forming a lower electrode above a substrate; forming a nitrogen layer on an upper surface of the lower electrode through nitrogen (N 2 ) plasma surface treatment; forming a piezoelectric layer made of an AlScN material above the nitrogen layer to align an upper surface of the piezoelectric layer to an N polarity; and forming an upper electrode above the piezoelectric layer aligned to the N polarity.

First claim

What is claimed:

1. A method of manufacturing a bulk acoustic wave (BAW) resonator, comprising:
forming a lower electrode above a substrate;
forming a nitrogen layer on an upper surface of the lower electrode through nitrogen (N 2 ) plasma surface treatment;
forming a piezoelectric layer made of an AlScN material above the nitrogen layer to align an upper surface of the piezoelectric layer to an N polarity; and
forming an upper electrode above the piezoelectric layer aligned to the N polarity.

2. The method of claim 1 , further comprising, after forming the lower electrode, removing contaminants from the upper surface of the lower electrode through argon (Ar) plasma surface treatment on the lower electrode.

3. The method of claim 1 , further comprising, after forming the nitrogen layer, cooling a high-temperature state due to the argon plasma surface treatment and formation of the nitrogen layer to a predetermined temperature or less.

4. The method of claim 3 , wherein the predetermined temperature or a deposition process temperature of the AlScN material is 280[° C.] or more and 320[° C.] or less.

5. The method of claim 1 , wherein in the piezoelectric layer, a composition ratio of the AlScN material is Al 1-x Sc x N, and X is 0.05 or more and 0.43 or less.

6. A method of manufacturing a bulk acoustic wave (BAW) resonator, comprising:
forming a lower electrode above a substrate;
forming an aluminum layer on an upper surface of the lower electrode;
forming a piezoelectric layer made of an AlScN material above the aluminum layer to align an upper surface of the piezoelectric layer to an Al polarity; and
forming an upper electrode above the piezoelectric layer aligned to the Al polarity.

7. The method of claim 6 , further comprising, after forming the lower electrode, removing contaminants from the upper surface of the lower electrode through argon (Ar) plasma surface treatment on the lower electrode.

8. The method of claim 6 , further comprising, after forming the aluminum layer, cooling a high-temperature state due to the argon plasma surface treatment and formation of the aluminum layer to a predetermined temperature or less.

9. The method of claim 8 , wherein the predetermined temperature or a deposition process temperature of the AlScN material is in a range of 280[° C.] or more and 320[° C.] or less.

10. The method of claim 6 , wherein in the piezoelectric layer, a composition ratio of the AlScN material is Al 1-x Sc x N, and X is 0.05 or more and 0.43 or less.

11. A bulk acoustic wave (BAW) resonator comprising:
a substrate;
a lower electrode formed above the substrate;
a piezoelectric layer formed above the lower electrode; and
an upper electrode formed above the piezoelectric layer,
wherein:
the lower electrode has a nitrogen layer formed by plasma surface treatment,
the piezoelectric layer is present in a form that includes at least scandium (Sc) above the formed nitrogen layer, and
an upper surface of the piezoelectric layer is aligned to an N polarity.

12. The BAW resonator of claim 11 , wherein contamination is removed from an upper surface of the lower electrode through argon (Ar) plasma surface treatment.

13. The BAW resonator of claim 11 , wherein the piezoelectric layer consists of AlScN including scandium, a composition ratio of the AlScN material is Al 1-x Sc x N, and X is 0.05 or more and 0.43 or less.

14. A bulk acoustic wave (BAW) resonator comprising:
a substrate;
a lower electrode formed above the substrate;
a piezoelectric layer formed above the lower electrode; and
an upper electrode formed above the piezoelectric layer,
wherein:
the lower electrode has an aluminum layer formed on an upper surface thereof,
the piezoelectric layer is formed above the formed aluminum layer, and
an upper surface of the piezoelectric layer is aligned to an Al polarity.

15. The BAW resonator of claim 14 , wherein contamination is removed from the upper surface of the lower electrode through argon (Ar) plasma surface treatment.

16. The BAW resonator of claim 14 , wherein the piezoelectric layer consists of AlScN including scandium, a composition ratio of the AlScN material is Al 1-x Sc x N, and X is 0.05 or more and 0.43 or less.

Assignees

• Wisol Co Ltd

Inventors

• Jang Jin Nyoung
• Kim Kang Ho
• Choi Yun Sik
• Kwon Joon Sung

Classifications

• H03H9/131

  consisting of a multilayered structure · CPC title

• H03H3/02 Primary

  for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title

• H03H2003/0071

  of bulk acoustic wave and surface acoustic wave elements in the same process · CPC title

• H03H9/178

  of a laminated structure of multiple piezoelectric layers with inner electrodes · CPC title

• H03H9/02015

  Characteristics of piezoelectric layers, e.g. cutting angles · CPC title