Pixel structure and image sensor including a nano antenna unit

Patent metadata

Field	Value
Publication number	US-12446337-B2
Application number	US-202217663284-A
Country	US
Kind code	B2
Filing date	May 13, 2022
Priority date	Nov 14, 2019
Publication date	Oct 14, 2025
Grant date	Oct 14, 2025

Abstract

A pixel structure and an image sensor are provided, to improve photoelectric conversion efficiency under a weak light condition and resolve a problem that an image generated in weak light is dim. The pixel structure includes a metallic ground plane, and a substrate unit cell located on the metallic ground plane. The pixel structure further includes a nano antenna unit that is located on the substrate unit cell and that includes one or more nano antennas, each of the one or more nano antennas corresponding to one optical band and including M parts A nano gap is formed between the M parts, a metal-insulator-metal diode is formed at the nano gap, and M is a multiple of 2. The pixel structure further includes a packaging unit that covers the nano antenna unit. The image sensor includes a plurality of pixel structures.

First claim

What is claimed is:

1. A pixel structure, comprising:
a metallic ground plane;
a substrate unit cell, wherein the substrate unit cell is located on the metallic ground plane;
a nano antenna unit, wherein the nano antenna unit is located on the substrate unit cell, and comprises one or more nano antennas, wherein each of the one or more nano antennas corresponds to one optical band, and comprises M parts, wherein a nano gap is formed between the M parts, wherein the M parts and the nano gap have a function of a metal-insulator-metal diode, wherein M is a multiple of 2, and wherein each of the M parts and a part adjacent to the part have different work functions; and
a packaging unit, wherein the packaging unit covers the nano antenna unit.

2. The pixel structure according to claim 1 , wherein each of the M parts and a part adjacent to the part are different metals in a same shape, a same metal in different shapes, or different metals in different shapes.

3. The pixel structure according to claim 1 , wherein a width of each of the M parts progressively decreases from a first location to a second location, wherein the first location is further away from the nano gap than the second location.

4. The pixel structure according to claim 1 , wherein a parameter of the substrate unit cell at a location of each nano antenna corresponds to an optical band corresponding to the nano antenna, and the parameter of the substrate unit cell comprises a thickness and a dielectric constant.

5. The pixel structure according to claim 1 , wherein the nano antenna comprises N antenna pairs, each of the N antenna pairs comprising two parts with a nano gap in between, wherein the N antenna pairs are parallel to the substrate unit cell, and are radically arranged in one of a linear shape, a cross shape, and a double-cross shape, and wherein N is an integer greater than or equal to 1.

6. The pixel structure according to claim 5 , wherein each part of the N antenna pairs is in a strip shape.

7. The pixel structure according to claim 1 , wherein the nano antenna comprises two parts with a nano gap in between, wherein the two parts are arranged in a bow-tie shape and are parallel to the substrate unit cell, wherein each of the two parts is a trapezoid in shape, and wherein the two trapezoids are arranged with shorter bases facing each other.

8. The pixel structure according to claim 1 , wherein the nano antenna comprises two parts with a nano gap in between, wherein a first part of the two parts is vertically disposed on the substrate unit cell, and a second part of the two parts is arranged facing the first part.

9. The pixel structure according to claim 8 , wherein the first part is a cone in shape, and is greater than the second part in size.

10. The pixel structure according to claim 1 , wherein an electrode line of the nano antenna is arranged at a location of each of the M parts, wherein the location is at a predetermined distance to the nano gap.

11. An image sensor, comprising:
a plurality of pixel structures;
wherein each of the plurality of pixel structures comprises:
a metallic ground plane;
a substrate unit cell, wherein the substrate unit cell is located on the metallic ground plane;
a nano antenna unit, wherein the nano antenna unit is located on the substrate unit cell, and comprises one or more nano antennas, wherein each of the one or more nano antennas corresponds to one optical band, and comprises M parts, wherein a nano gap is formed between the M parts, wherein the M parts and the nano gap have a function of a metal-insulator-metal diode, and wherein M is a multiple of 2; and
a packaging unit, wherein the packaging unit covers the nano antenna unit.

12. The image sensor of according to claim 11 , wherein each of the M parts and a part adjacent to the part have different work functions.

13. The image sensor of according to claim 11 , wherein each of the M parts and a part adjacent to the part are different metals in a same shape, a same metal in different shapes, or different metals in different shapes.

14. The image sensor of according to claim 11 , wherein a width of each of the M parts progressively decreases from a fist location to a second location, wherein the first location is further away from the nano gap than the second location.

15. The image sensor of according to claim 11 , wherein a parameter of the substrate unit cell at a location of each nano antenna corresponds to an optical band corresponding to the nano antenna, and the parameter of the substrate unit cell comprises a thickness and a dielectric constant.

16. The image sensor of according to claim 11 , wherein the nano antenna comprises N antenna pairs, each of the N antenna pairs comprising two parts with a nano gap in between, wherein the N antenna pairs are parallel to the substrate unit cell, and are radically arranged in one of a linear shape, a cross shape, and a double-cross shape, and wherein N is an integer greater than or equal to 1.

17. The image sensor of according to claim 16 , wherein each part of the N antenna pairs is in a strip shape.

18. The image sensor of according to claim 11 , wherein the nano antenna comprises two parts with a nano gap in between, wherein the two parts are arranged in a bow-tie shape and are parallel to the substrate unit cell, wherein each of the two parts is a trapezoid in shape, and wherein the two trapezoids are arranged with shorter bases facing each other.

19. An electronic product, comprising an image sensor, wherein the image sensor comprises:
a plurality of pixel structures;
wherein each of the plurality of pixel structures comprise:
a metallic ground plane;
a substrate unit cell, wherein the substrate unit cell is located on the metallic ground plane;
a nano antenna unit, wherein the nano antenna unit is located on the substrate unit cell, and comprises one or more nano antennas, wherein each of the one or more nano antennas corresponds to one optical band, and comprises M parts, wherein a nano gap is formed between the M parts, wherein the M parts and the nano gap have a function of a metal-insulator-metal diode, and wherein M is a multiple of 2; and
a packaging unit, wherein the packaging unit covers the nano antenna unit.

Assignees

• Huawei Tech Co Ltd

Inventors

• Yang Liang
• Liu Yongjun
• Yang Hui

Classifications

• H10W44/20

  at high-frequency [HF] or radio frequency [RF] · CPC title

• H10F30/22

  the devices having only one potential barrier, e.g. photodiodes · CPC title

• H10F39/018

  of hybrid image sensors · CPC title

• H10F39/806

  Optical elements or arrangements associated with the image sensors · CPC title

• H10F39/8023 Primary

  Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery · CPC title