System for a semiconductor fabrication facility and method for operating the same
US-11380566-B2 · Jul 5, 2022 · US
US12438026B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12438026-B2 |
| Application number | US-202318518461-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 23, 2023 |
| Priority date | Jun 12, 2020 |
| Publication date | Oct 7, 2025 |
| Grant date | Oct 7, 2025 |
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A method for operating a conveying system is provided. An overhead hoist transport (OHT) vehicle is provided, wherein the OHT vehicle includes a gripping member configured to grip and hold a carrier, and a receiver configured to receive a signal. The signal is transmitted to the receiver of the OHT vehicle. The OHT vehicle is moved toward the carrier, and the carrier is gripped by the gripping member of the OHT vehicle. A lifting force is determined based on a weight of a carrier, a number of workpieces in the carrier, or a vertical distance between the OHT vehicle and the carrier, and the lifting force is applied to the carrier.
Opening claim text (preview).
What is claimed is: 1. A method for operating a conveying system, comprising: positioning an overhead hoist transport (OHT) vehicle over a first load port; transmitting a first data to the OHT vehicle, wherein the first data includes information of a weight of a first carrier, a number of workpieces in the first carrier, and a first vertical distance between the OHT vehicle and the first carrier; applying a first lifting force to the first carrier on the first load port, wherein the first lifting force is determined based on the first data; positioning the OHT vehicle over a second load port; transmitting a second data to the OHT vehicle, wherein the second data includes information of a weight of a second carrier, a number of workpieces in the second carrier and a second vertical distance between the OHT vehicle and the second carrier; and applying a second lifting force to the second carrier on the second load port, wherein the second lifting force is determined based on the second data, and the first lifting force is different from the second lifting force, wherein the first lifting force is a minimum force required to lift the first carrier calculated by a control unit of the OHT vehicle, and the second lifting force is a minimum force required to lift the second carrier calculated by the control unit. 2. The method of claim 1 , further comprising: providing a first downward force subject to the first carrier; sending a notification if the first downward force is greater than the first lifting force; and lifting the first carrier if the first downward force is equal to or less than the first lifting force. 3. The method of claim 2 , further comprising: stopping application of the first lifting force if the first downward force is greater than the first lifting force. 4. The method of claim 1 , wherein the first lifting force is an upward force substantially equal to a first downward force of a total weight of the first carrier and the workpieces in the first carrier. 5. The method of claim 1 , further comprising: detecting whether the first carrier is lifted by the first lifting force after the application of the first lifting force. 6. The method of claim 5 , wherein the detection is performed by a sensor disposed on the first load port. 7. The method of claim 5 , wherein the detection is performed by a sensor disposed on the OHT vehicle. 8. The method of claim 1 , further comprising: calculating a first lifting torque according to the weight of the first carrier, the number of workpieces in the first carrier and the first vertical distance between the OHT vehicle and the first carrier; generating the first lifting torque by a hoisting motor of a hoisting member of the OHT; and converting the first lifting torque to the first lifting force by a belt of the hoisting member connecting to the hoisting motor. 9. The method of claim 1 , further comprising: lifting the first carrier with the first lifting force; or sending an alert if the first carrier cannot be lifted with the first lifting force. 10. The method of claim 1 , further comprising: detecting the first vertical distance between the OHT vehicle and the first carrier; and sending a notification if the first vertical distance does not decrease after the application of the first lifting force. 11. A method for operating a conveying system, comprising: providing an overhead hoist transport (OHT) vehicle including a gripping member, a control unit, and a receiver; positioning the OHT vehicle over a first load port; transmitting a first data to the receiver of the OHT vehicle, wherein the first data includes information of a weight of a first carrier, a number of workpieces in the first carrier, and a first vertical distance between the OHT vehicle and the first carrier; applying a first minimum force to the first carrier on the first load port, wherein the first minimum force is determined based on the first data, comprising: gripping the first carrier by the gripping member; and calculating the first minimum force applied to the first carrier by the gripping member based on the information of the first data by the control unit; positioning the OHT vehicle over a second load port; transmitting a second data to the receiver of the OHT vehicle, wherein the second data includes information of a weight of a second carrier, a number of workpieces in the second carrier, and a second vertical distance between the OHT vehicle and the second carrier; and applying a second minimum force to the second carrier on the second load port, wherein the second lifting force is determined based on the second data, comprising: gripping the second carrier by the gripping member; and calculating a second minimum force applied on the second carrier by the gripping member based on the information of the second data by the control unit, wherein the first minimum force is different from the second minimum force. 12. The method of claim 11 , wherein the weight of the second carrier is different from the weight of the first carrier. 13. The method of claim 11 , wherein the first data and the second data are wirelessly transmitted to the OHT vehicle. 14. The method of claim 11 , further comprising: lifting the first carrier with the first minimum force; or sending an alert if the first carrier cannot be lifted with the first minimum force. 15. The method of claim 11 , further comprising: lifting the second carrier with the second minimum force; or sending an alert if the second carrier cannot be lifted with the second minimum force. 16. A method for operating a conveying system, comprising: positioning an overhead hoist transport (OHT) vehicle over a first carrier, wherein the first carrier is on a first load port; transmitting a first data to the OHT vehicle, wherein the first data includes information of a weight of the first carrier, a number of workpieces in the first carrier, and a first vertical distance between the OHT vehicle and the first carrier; calculating a first minimum force for lifting the first carrier by a control unit of the OHT vehicle based on the first data; applying the first minimum force to the first carrier; positioning the OHT vehicle over a second carrier, wherein the second carrier is on a second load port; and transmitting a second data to the OHT vehicle, wherein the second data includes information of a weight of the second carrier, a number of workpieces in the second carrier and a second vertical distance between the OHT vehicle and the second carrier, wherein a total weight of the second carrier and the workpieces in the second carrier is different from a total weight of the first carrier and the workpieces in the first carrier; calculating a second minimum force for lifting the second carrier by the control unit of the OHT vehicle based on the second data; and applying the second minimum force to the second carrier, wherein the first minimum force is different from the second minimum force. 17. The method of claim 16 , further comprising: detecting whether the first carrier is lifted by the first minimum force after the application of the first minimum force. 18. The method of claim 16 , further comprising: detecting whether the second carrier is lifted by the second minimum force after the application of the second minimum force. 19. The method of claim 17 , further comprising: sending an alert if the first carrier cannot be lifted with the first minimum force. 20. The method o
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