System for a semiconductor fabrication facility and method for operating the same

Patent metadata

Field	Value
Publication number	US-11380566-B2
Application number	US-202017134211-A
Country	US
Kind code	B2
Filing date	Dec 25, 2020
Priority date	Jun 28, 2017
Publication date	Jul 5, 2022
Grant date	Jul 5, 2022

Abstract

A system for a semiconductor fabrication facility includes a manufacturing tool including a load port, a maintenance crane, a rectangular zone overlapping with the load port of the manufacturing tool, a plurality of first sensors at corners of the rectangular zone, an OHT vehicle, a second sensor on the OHT vehicle, a third sensor on the load port, and a control unit. The first sensors are configured to detect a location of the maintenance crane and to generate a first location data. The second sensor is configured to generate a second location data. The control unit is configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle. The control unit further sends signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

First claim

What is claimed is:

1. A method for operating a system for a semiconductor fabrication facility, comprising:
providing a manufacturing tool comprising a load port, a maintenance tool comprising a maintenance crane, a transporting tool comprising an overhead hoisting transporting (OHT) vehicle, and a control unit;
defining a danger zone overlapping the load port;
detecting a location of the maintenance crane of the maintenance tool;
detecting a location of the OHT vehicle;
prohibiting the maintenance crane from entering the danger zone when the OHT vehicle enters the danger zone; and
disabling the OHT vehicle when the maintenance crane entering the danger zone.

2. The method of claim 1 , further comprising:
allowing the OHT vehicle aligning to the load port when the OHT vehicle enters the danger zone; and
performing a handshaking function between the OHT vehicle and the load port to permit a load operation or an unload operation.

3. The method of claim 1 , wherein the disabling of the OHT vehicle further comprises interrupting a handshaking function between the OHT vehicle and the load port to prohibit a load operation or an unload operation.

4. The method of claim 1 , wherein the prohibiting of the maintenance crane from entering the danger zone and the disabling of the OHT vehicle are alternatively performed by the control unit.

5. A method for operating a system for a semiconductor fabrication facility, comprising:
providing a manufacturing tool comprising a load port, a maintenance crane, an OHT vehicle, and a control unit;
defining a danger zone overlapping the load port of the manufacturing tool;
detecting a location of the maintenance crane by at least a first sensor and generating a first location data of the maintenance crane;
detecting a location of the OHT vehicle by a second sensor and generating a second location data of the OHT vehicle; and
switching, by the control unit, between a first mode when the second location data overlaps with the danger zone and a second mode when the first location data overlaps with the danger zone.

6. The method of claim 5 , further comprising collecting the first location data by a data collector of the control unit.

7. The method of claim 5 , further comprising switching between the first mode and the second mode by an interface panel of the control unit.

8. The method of claim 5 , further comprising prohibiting the maintenance crane from entering the danger zone when the control unit switches to the first mode.

9. The method of claim 8 , further comprising allowing the OHT vehicle aligning to the load port in the first mode.

10. The method of claim 9 , further comprising sending signals to the second sensor and a third sensor on the load port in the first mode.

11. The method of claim 10 , further comprising performing a handshaking function, by the second sensor and the third sensor, to permit a load operation or an unload operation when the OHT vehicle is aligned to the load port.

12. The method of claim 5 , further comprising disabling the OHT vehicle when the control unit switches to the second mode.

13. The method of claim 12 , further comprising interrupting a handshaking function between the second sensor and a third sensor on the load port to prohibit a load operation or an unload operation in the second mode.

14. A system for a semiconductor fabrication facility, comprising:
a manufacturing tool comprising a load port;
a maintenance crane;
a rectangular zone overlapping with the load port of the manufacturing tool;
a plurality of first sensors at corners of the rectangular zone, wherein the first sensors are configured to detect a location of the maintenance crane and generate a first location data;
an OHT vehicle;
a second sensor on the OHT vehicle configured to generate a second location data;
a third sensor on the load port; and
a control unit configured to receive the first location data of the maintenance crane and the second location data of the OHT vehicle, and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

15. The system of claim 14 , wherein a width of the rectangular zone is greater than a width of the load port.

16. The system of claim 14 , wherein the control unit comprises:
a data collector configured to collect the first location data from the first sensors; and
an interface panel configured to receive the first location data from the data collector and send signals to the second sensor and the third sensor or to cut off the signal to the second sensor.

17. The system of claim 14 , wherein the second sensor and the third sensor perform a handshaking function to permit a load operation or an unload operation when the OHT vehicle enters the rectangular zone and aligns to the load port.

18. The system of claim 17 , wherein the maintenance crane is prohibited from entering the rectangular zone when performing the load operation or the unload operation.

19. The system of claim 14 , wherein the control unit cuts off the signal to the second sensor when the maintenance crane enters the rectangular zone.

20. The system of claim 19 , wherein when the signal to the second sensor is cut off, a handshaking function between the second sensor and the third sensor is interrupted, and a load operation or an unload operation is prohibited.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Li Fu-Hsien
• Yu Sheng-Kang
• Tung Chi-Feng
• Shen Hsiang Yin
• Li Guancyun

Classifications

• H10P72/3222

  Loading to or unloading from a conveyor · CPC title

• H10P72/3221 Primary

  Overhead conveying · CPC title

• H10P72/3214

  by means of a cart or a vehicle · CPC title

• H10P72/3212

  the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips or lead frames · CPC title

• H10P72/3202

  Mechanical details, e.g. rollers or belts · CPC title