Chemical-mechanical polishing system with a potentiostat and pulsed-force applied to a workpiece

Patent metadata

Field	Value
Publication number	US-12420374-B2
Application number	US-202418652248-A
Country	US
Kind code	B2
Filing date	May 1, 2024
Priority date	Mar 12, 2020
Publication date	Sep 23, 2025
Grant date	Sep 23, 2025

Abstract

Shortcomings associated with insufficient control of a conventional CMP-process are obviated by providing an CMP-apparatus configured to complement a constant force (to which a workpiece that is being polished is conventionally exposed) with a time-alternating force and/or means for measuring an electrical characteristic of the CMP-process. The time-alternating force is applied with the use of a system component that is electrically isolated from the workpiece and that is disposed in the carrier-chick in which the workpiece is affixed for CMP-process, while the electrical characteristic is measured with the use of a judiciously-configured reservoir in which the used fluid is collected. The use of such CMP-apparatus.

First claim

What is claimed is:

1. A chemical-mechanical-polishing apparatus for polishing a workpiece, the apparatus comprising:
a table that is operably connected with a motor and a motor drive of the apparatus;
a reservoir formed above the table and removably carried by the table;
a carrier chuck having a chuck head containing a piezoelectric element disposed therein;
a microcontroller configured to at least govern an operation of the motor drive and modify one or more of parameters of the polishing based on measurement data representing said polishing and collected by a measurement system of the apparatus; and
the measurement system of the apparatus that includes an electrode holder.

2. An apparatus according to claim 1 , wherein the piezoelectric element is electrically connected to the microcontroller, and wherein one or more of the following conditions is satisfied:
(2A) the piezoelectric element is sandwiched between first and second electrically-insulating pads located in the chuck head; and
(2B) the apparatus is configured to tune a frequency of operation of the piezoelectric element; and
(2C) the piezoelectric element is dimensioned as a disk.

3. An apparatus according to claim 1 , further comprising:
a workpiece holder removably attached to the chuck head;
wherein the piezoelectric element is electrically connected to the microcontroller,
wherein the microcontroller is configured to perform one or more of the following:
(3A) adapting voltage applied to the piezoelectric element based at least in part on said measurement data; and
(3B) determining an eigenfrequency of mechanical vibrations of the apparatus; and
(3B) when the eigenfrequency of the mechanical vibrations of the apparatus has been determined based on the signal received by the microcontroller from the acoustic sensor, applying electrical pulses to the piezoelectric element at a frequency within a +/−30% range or within a +/−20% range or within a +/10% range or within a +/−5% range from the eigenfrequency of said mechanical vibrations to increase an amplitude of a time-alternating force transferred from the piezoelectric element to the workpiece holder.

4. An apparatus according to claim 1 , wherein the measurement system includes a first electrode that extends into the reservoir from the electrode holder and that is electrically connected at least to the microcontroller.

5. An apparatus according to claim 4 , wherein, when the apparatus includes said additional electrode that either extends into the reservoir from the electrode holder through the opening or is firmly embedded in the reservoir, the additional electrode is fluidly-sealed in the reservoir at least with respect to the table.

6. An apparatus according to claim 1 , wherein at least one of the following conditions is satisfied:
(5A) wherein the table is rotatable about an axis of rotation, wherein the apparatus includes a first electrode, and wherein the apparatus further comprises a potentiometer cooperated with at least the first electrode,
(5B) wherein the reservoir has an opening and said first electrode extends into the reservoir from the electrode holder through the opening,
(5C) wherein the measurement system includes an additional electrode that either extends into the reservoir from the electrode holder through the opening or is firmly embedded in the reservoir; and
(5D) wherein the additional electrode is operably coupled to the microcontroller and the potentiometer through the slip-ring and is either embedded in a wall of the reservoir or protrudes into the reservoir from the bottom.

7. An apparatus according to claim 1 , wherein said reservoir is dimensioned as a recess in a support component removably carried by the table.

8. An apparatus according to claim 7 , wherein:
(8A) the support component is configured to receive, at an up-facing surface thereof, a polishing pad with an adhesive layer; and/or
(8B) the reservoir has a bottom-facing the table and an opening facing the carrier chuck, the reservoir being dimensioned to have at least a portion thereof that is rotationally symmetric about an axis of rotation, the reservoir being centered on the axis of rotation and/or dimensioned as a rotationally-symmetric groove.

9. An apparatus according to claim 1 , further comprising a workpiece holder removably attached to the chuck head; wherein the chuck head includes an electrically insulating plate separating the piezoelectric element from the workpiece holder.

10. An apparatus according to claim 1 , further comprising
a workpiece holder removably attached to the chuck head, and
an electronic circuitry including a potentiometer and said microcontroller,
wherein said electronic circuitry is configured to control a force exerted by a first component located within the carrier chuck onto the workpiece holder.

11. An apparatus according to claim 1 ,
wherein the chuck head includes an acoustic sensor disposed therein and electrically connected with the microcontroller,
wherein the microcontroller is configured to receive a signal, from the acoustic sensor, representing mechanical vibrations of a component of the apparatus during an operation of the apparatus and to determine an eigenfrequency of said mechanical vibrations.

12. An apparatus according to claim 1 ,
wherein the table has an axis of rotation,
wherein said reservoir is dimensioned as a recess in a support component removably carried by the table, and
wherein the support component is rotationally symmetric about the axis of rotation and/or is electrically insulating with respect to at least the table.

13. An apparatus according to claim 12 , wherein one or more of the following conditions is satisfied:
(13A) an inlet of the reservoir is defined by a reservoir aperture such that the axis of rotation passes through the reservoir aperture;
(13B) the inlet of the reservoir is defined at a location of an up-facing surface of the support component, wherein said location is between the axis of rotation and an outer edge of the support component;
(13C) the inlet of the reservoir is between the outer perimeter of a polishing pad, operably positioned on and adhered to the up-facing surface of the support component, and the outer edge of the support component; and
(13D) an opening in the polishing pad and the inlet of the reservoir overlap at least in part when the polishing pad is operably positioned on and adhered to the up-facing surface of the support component.

14. A method for chemical-mechanical polishing of a workpiece, wherein the method comprises:
using the apparatus of claim 1 :
(i) positioning a support component containing the reservoir on the table of the apparatus;
(ii) securing the workpiece in the apparatus;
(iii) polishing the workpiece by at least:
a. rotating the support component and a polishing pad, adhered to an up-facing surface thereof on the table, about an axis of rotation of the table with respect to the workpiece while the workpiece is in contact with the polishing pad, and
b. delivering a slurry-containing liquid to the polishing pad; and
(iv) during said polishing the workpiece:

electrically-biasing a working electrode in the chuck head of the apparatus with respect to an additional electrode based on an electrical parameter that has been acquired with the use of a first electrode of the apparatus that extends into the reservoir and the additional electrode that is in contact with a slurry-containing liquid and the working electrode that is electrically-connected to a back side of the workpiece,
wherein the additional electrode either extends into the reservoir through an

Assignees

• Bruker Nano Inc

Inventors

• Gulkov Vladimir
• Yeremin Nikolay

Classifications

• B24B49/10

  involving electrical means (B24B49/02, B24B49/08 take precedence) · CPC title

• B24B49/006

  taking regard of the speed · CPC title

• B24B37/30

  for single side lapping of plane surfaces · CPC title

• B24B37/107

  in a rotary movement only, about an axis being stationary during lapping · CPC title

• B24B37/046

  using electric current · CPC title