Vertical-cavity surface-emitting laser array with isolated cathodes and a common anode

Patent metadata

Field	Value
Publication number	US-12418160-B2
Application number	US-202318390648-A
Country	US
Kind code	B2
Filing date	Dec 20, 2023
Priority date	Jun 22, 2020
Publication date	Sep 16, 2025
Grant date	Sep 16, 2025

Abstract

A vertical-cavity surface-emitting laser (VCSEL) array may include an n-type substrate layer and an n-type metal on a bottom surface of the n-type substrate layer. The n-type metal may form a common anode for a group of VCSEL. The VCSEL array may include a bottom mirror structure on a top surface of the n-type substrate layer. The bottom mirror structure may include one or more bottom mirror sections and a tunnel junction to reverse a carrier type within the bottom mirror structure. The VCSEL array may include an active region on the bottom mirror structure and an oxidation layer to provide optical and electrical confinement. The VCSEL array may include an n-type top mirror on the active region, a top contact layer over the n-type top mirror, and a top metal on the top contact layer. The top metal may form an isolated cathode for the VCSEL array.

First claim

What is claimed is:

1. A vertical-cavity surface-emitting laser (VCSEL) array, comprising:
an n-type substrate layer having a top surface and a bottom surface;
an n-type metal on the bottom surface of the n-type substrate layer, the n-type metal forming a common anode for a group of VCSEL arrays including the VCSEL array;
an n-type bottom mirror section on the top surface of the n-type substrate layer;
a first tunnel junction to reverse a carrier type on the n-type bottom mirror section;
a second tunnel junction, the second tunnel junction being on an n-type top mirror;
a p-type top contact layer on the second tunnel junction; and
a p-type metal on the p-type top contact layer; and
a driver circuit to provide current to the VCSEL array, the driver circuit comprising at least one of:
one or more n-channel metal oxide semiconductor field-effect transistors (MOSFETs), or
one or more n-p-n bi-polar junction transistors (BJTs).

2. The VCSEL array of claim 1 , wherein the group of VCSEL arrays is on a same integrated circuit.

3. The VCSEL array of claim 1 , wherein the driver circuit comprises a plurality of n-channel MOSFETs.

4. The VCSEL array of claim 1 , wherein the driver circuit comprises a plurality of n-p-n BJTs.

5. The VCSEL array of claim 1 , further comprising:
an oxidation layer to provide optical and electrical confinement of VCSELs of the VCSEL array;
an active region over the oxidation layer; and
the n-type top mirror on the active region.

6. The VCSEL array of claim 5 , wherein the oxidation layer is under the active region and is on or in a bottom mirror structure.

7. The VCSEL array of claim 5 , wherein the oxidation layer is over the active region and is on or in the n-type top mirror.

8. An optical device, comprising:
a plurality of vertical-cavity surface-emitting laser (VCSEL) arrays, the plurality of VCSEL arrays including:
an n-type substrate layer having a top surface and a bottom surface;
an n-type metal on the bottom surface of the n-type substrate layer, the n-type metal forming a common anode for the plurality of VCSEL arrays including the VCSEL array;
an n-type bottom mirror section on the top surface of the n-type substrate layer;
a first tunnel junction to reverse a carrier type on the n-type bottom mirror section;
a second tunnel junction, the second tunnel junction being on an n-type top mirror;
a p-type top contact layer on the second tunnel junction; and
a p-type metal on the p-type top contact layer; and

driver circuitry to provide current to the plurality of VCSEL arrays, the driver circuitry comprising at least one of:
one or more n-channel metal oxide semiconductor field-effect transistors (MOSFETs), or
one or more n-p-n bi-polar junction transistors (BJTs).

9. The optical device of claim 8 , wherein the plurality of VCSEL arrays are on a same integrated circuit.

10. The optical device of claim 8 , wherein the driver circuitry comprises a plurality of n-channel MOSFETs.

11. The optical device of claim 8 , wherein the driver circuitry comprises a plurality of n-p-n BJTs.

12. The optical device of claim 8 , further comprising:
an oxidation layer to provide optical and electrical confinement of VCSELs of the VCSEL array;
an active region over the oxidation layer; and
the n-type top mirror on the active region.

13. The optical device of claim 12 , wherein the oxidation layer is under the active region and is on or in a bottom mirror structure.

14. The optical device of claim 12 , wherein the oxidation layer is over the active region and is on or in an n-type top mirror.

15. A method, comprising:
forming an n-type metal on a first surface of an n-type substrate layer, the n-type metal providing a common anode for a plurality of vertical-cavity surface-emitting laser (VCSEL) arrays;
forming an n-type bottom mirror section on a second surface of the n-type substrate layer;
forming a first tunnel junction to reverse a carrier type on the n-type bottom mirror section;
forming a second tunnel junction on an n-type mirror;
forming a p-type top contact layer on the second tunnel junction;
forming a p-type metal on the p-type top contact layer; and
providing current to the plurality of VCSEL arrays via driver circuitry, the driver circuitry comprising at least one of:
one or more n-channel metal oxide semiconductor field-effect transistors (MOSFETs), or
one or more n-p-n bi-polar junction transistors (BJTs).

16. The method of claim 15 , further comprising:
forming an oxidation layer to provide optical and electrical confinement of VCSELs of the VCSEL arrays;
forming an active region over the oxidation layer; and
forming the n-type top mirror on the active region.

17. The method of claim 16 , further comprising:
forming the oxidation layer under the active region and on or in a bottom mirror structure.

18. The method of claim 16 , further comprising:
forming the oxidation layer over the active region and on or in the n-type top mirror.

19. The method of claim 15 , further comprising:
wherein the plurality of VCSEL arrays are formed on a same integrated circuit.

Assignees

• Lumentum Operations Llc

Inventors

• Zhao Guowei
• Peters Matthew Glenn
• Yang Jun
• Hegblom Eric R

Classifications

• H01S5/3416

  tunneling through barriers · CPC title

• H01S5/04256

  characterised by the configuration · CPC title

• H01S5/423

  having a vertical cavity · CPC title

• H01S5/18311

  using selective oxidation · CPC title

• H01S5/04252

  characterised by the material · CPC title