Vertical-cavity surface-emitting laser array with isolated cathodes and a common anode

Patent metadata

Field	Value
Publication number	US-11855413-B2
Application number	US-202017135511-A
Country	US
Kind code	B2
Filing date	Dec 28, 2020
Priority date	Jun 22, 2020
Publication date	Dec 26, 2023
Grant date	Dec 26, 2023

Abstract

A vertical-cavity surface-emitting laser (VCSEL) array may include an n-type substrate layer and an n-type metal on a bottom surface of the n-type substrate layer. The n-type metal may form a common anode for a group of VCSEL. The VCSEL array may include a bottom mirror structure on a top surface of the n-type substrate layer. The bottom mirror structure may include one or more bottom mirror sections and a tunnel junction to reverse a carrier type within the bottom mirror structure. The VCSEL array may include an active region on the bottom mirror structure and an oxidation layer to provide optical and electrical confinement. The VCSEL array may include an n-type top mirror on the active region, a top contact layer over the n-type top mirror, and a top metal on the top contact layer. The top metal may form an isolated cathode for the VCSEL array.

First claim

What is claimed is:

1. A vertical-cavity surface-emitting laser (VCSEL) array, comprising:
an n-type substrate layer having a top surface and a bottom surface;
an n-type metal on the bottom surface of the n-type substrate layer, the n-type metal forming a common anode for a group of VCSEL arrays including the VCSEL array;
a bottom mirror structure on the top surface of the n-type substrate layer, the bottom mirror structure comprising:
one or more bottom mirror sections that include an n-type bottom mirror section on the top surface of the n-type substrate layer, and
a tunnel junction to reverse a carrier type on the n-type bottom mirror section;

an active region on the bottom mirror structure;
an oxidation layer to provide optical and electrical confinement of VCSELs of the VCSEL array;
an n-type top mirror on the active region;
a top contact layer over the n-type top mirror; and
a top metal on the top contact layer, the top metal forming an isolated cathode for the VCSEL array.

2. The VCSEL array of claim 1 , wherein the top contact layer is an n-type contact layer and the top metal is another n-type metal, the n-type contact layer being on the n-type top mirror and the other n-type metal being on the n-type contact layer.

3. The VCSEL array of claim 1 , wherein the oxidation layer is under the active region and is on or in the bottom mirror structure.

4. The VCSEL array of claim 1 , wherein the oxidation layer is over the active region and is on or in the n-type top mirror.

5. The VCSEL array of claim 1 , wherein the one or more bottom mirror sections includes a p-type bottom mirror section,
wherein the p-type bottom mirror section is on the tunnel junction and the active region is on the p-type bottom mirror section.

6. The VCSEL array of claim 1 , further comprising another tunnel junction, the other tunnel junction being on the n-type top mirror,
wherein the top contact layer is a p-type contact layer and the top metal is p-type metal, the p-type contact layer being on the other tunnel junction and the p-type metal being on the p-type contact layer.

7. The VCSEL array of claim 1 , wherein the group of VCSEL arrays is on a same integrated circuit.

8. An optical device, comprising:
a plurality of vertical-cavity surface-emitting laser (VCSEL) arrays, the plurality of VCSEL arrays including:
an n-type metal on a first surface of an n-type substrate layer, the n-type metal forming a common anode for each VCSEL array of the plurality of VCSEL arrays;
a bottom mirror structure on a second surface of the n-type substrate layer, the bottom mirror structure comprising:
at least one bottom mirror section that includes an n-type bottom mirror section on the second surface of the n-type substrate layer, and
a tunnel junction to reverse a carrier type on the n-type bottom mirror section;

an active region on the bottom mirror structure;
an oxidation layer to provide optical and electrical confinement of VCSELs included in the plurality of VCSEL arrays;
an n-type top mirror on the active region;
a top contact layer over the n-type top mirror; and
a top metal on the top contact layer, the top metal forming isolated cathodes for each VCSEL array of the plurality of VCSEL arrays.

9. The optical device of claim 8 , wherein the top contact layer is an n-type contact layer and the top metal is another n-type metal, the n-type contact layer being on the n-type top mirror and the other n-type metal being on the n-type contact layer.

10. The optical device of claim 8 , wherein the oxidation layer is under the active region and is on or in the bottom mirror structure.

11. The optical device of claim 8 , wherein the oxidation layer is over the active region and is on or in the n-type top mirror.

12. The optical device of claim 8 , wherein the at least one bottom mirror section includes a p-type bottom mirror section,
wherein the p-type bottom mirror section is on the tunnel junction and the active region is on the p-type bottom mirror section.

13. The optical device of claim 8 , wherein the plurality of VCSEL arrays further comprises another tunnel junction, the other tunnel junction being on the n-type top mirror,
wherein the top contact layer is a p-type contact layer and the top metal is p-type metal, the p-type contact layer being on the other tunnel junction and the p-type metal being on the p-type contact layer.

14. A method, comprising:
forming an n-type metal on a first surface of an n-type substrate layer, the n-type metal providing a common anode for a plurality of vertical-cavity surface-emitting laser (VCSEL) arrays;
forming a bottom mirror structure on a second surface of the n-type substrate layer, the bottom mirror structure comprising:
one or more bottom mirror sections that include an n-type bottom mirror section on the second surface of the n-type substrate layer, and
a tunnel junction to reverse a carrier type on the n-type bottom mirror section;

forming an active region on the bottom mirror structure;
forming an oxidation layer to provide optical and electrical confinement of VCSELs of included in the plurality of VCSEL arrays;
forming an n-type top mirror on the active region;
forming a top contact layer over the n-type top mirror; and
forming a top metal on the top contact layer, the top metal providing an isolated cathode for each VCSEL array of the plurality the VCSEL arrays.

15. The method of claim 14 , wherein the top contact layer is an n-type contact layer and the top metal is another n-type metal, the n-type contact layer being on the n-type top mirror and the other n-type metal being on the n-type contact layer.

16. The method of claim 14 , wherein the oxidation layer is under the active region and is on or in the bottom mirror structure.

17. The method of claim 14 , wherein the one or more bottom mirror sections include a p-type bottom mirror section,
wherein the p-type bottom mirror section is on the tunnel junction and the active region is on the p-type bottom mirror section.

18. The method of claim 14 , further comprising:
forming another tunnel junction, the other tunnel junction being on the n-type top mirror.

19. The method of claim 18 , wherein the top contact layer is a p-type contact layer and the top metal is p-type metal, the p-type contact layer being on the other tunnel junction and the p-type metal being on the p-type contact layer.

20. The method of claim 14 , wherein the plurality of VCSEL arrays is on a same integrated circuit.

Assignees

• Lumentum Operations Llc

Inventors

• Zhao Guowei
• Peters Matthew Glenn
• Yang Jun
• Hegblom Eric R

Classifications

• H01S5/18361 Primary

  Structure of the reflectors, e.g. hybrid mirrors · CPC title

• H01S5/04256

  characterised by the configuration · CPC title

• H01S5/18311

  using selective oxidation · CPC title

• H01S5/3416

  tunneling through barriers · CPC title

• H01S5/423

  having a vertical cavity · CPC title