Ultrasonic device

Patent metadata

Field	Value
Publication number	US-12415206-B2
Application number	US-202117469597-A
Country	US
Kind code	B2
Filing date	Sep 8, 2021
Priority date	Sep 16, 2020
Publication date	Sep 16, 2025
Grant date	Sep 16, 2025

Abstract

An ultrasonic sensor includes: a first substrate including an ultrasonic element; a first electrode and a second electrode on the first substrate; a second substrate having a through-hole that penetrates from a first surface facing the first substrate to a second surface; and a gap material that separates the first substrate and the second substrate from each other, in which in a plan view from a +Z direction, the through-hole overlaps with the first electrode and the second electrode, and the gap material surrounds the through-hole, the through-hole has a narrow portion, and a width of the narrow portion is smaller than a width of the through-hole in the first surface, in a direction orthogonal to the +Z direction.

First claim

What is claimed is:

1. An ultrasonic device comprising:
a first substrate including an ultrasonic element;
an electrode on the first substrate;
a second substrate having a through-hole that penetrates from a first surface facing the first substrate to a second surface opposite to the first surface;
a gap material formed of a curable resin and interposed between the electrode and the second substrate and separating the first substrate and the second substrate; and
a conductive resin electrically coupled to the electrode and disposed on a space surrounded by the electrode, the through-hole, and the gap material, wherein
the gap material is in direct contact with the second substrate,
the second substrate is stacked in a first direction with respect to the first substrate,
the conductive resin protrudes from the second substrate toward the first direction,
in a plan view from the first direction, the through-hole overlaps with the electrode, and the gap material surrounds the through-hole,
the through-hole has a narrow portion,
a width of the narrow portion is smaller than a width of the through-hole in the first surface, in a second direction orthogonal to the first direction, and
a width of the space surrounded by the electrode, the through-hole, and the gap material is equal to the width of the through-hole in the first surface.

2. The ultrasonic device according to claim 1 , wherein
the narrow portion is formed at the second surface, and
the width of the through-hole becomes smaller from the first surface toward the second surface in the second direction.

3. The ultrasonic device according to claim 1 , wherein
the narrow portion is formed between the first surface and the second surface.

4. The ultrasonic device according to claim 1 , wherein
the ultrasonic element does not overlap with the through-hole in the plan view from the first direction.

5. The ultrasonic device according to claim 2 , wherein
the ultrasonic element does not overlap with the through-hole in the plan view from the first direction.

6. The ultrasonic device according to claim 3 , wherein
the ultrasonic element does not overlap with the through-hole in the plan view from the first direction.

7. The ultrasonic device according to claim 1 , wherein
the narrow portion is formed at a middle portion of the first surface and the second surface,
the through-hole becomes smaller in a tapered shape from the first surface to the middle portion, and
the through-hole becomes smaller in the tapered shape from the second surface to the middle portion.

8. The ultrasonic device according to claim 1 , wherein a volume of the conductive resin is larger than an internal volume of the space surrounded by the electrode, the through-hole, and the gap material.

9. The ultrasonic device according to claim 1 , wherein
at least a portion of the electrode is on the ultrasonic element, and
at least the portion of the electrode is in direct contact with the ultrasonic element.

Assignees

• Seiko Epson Corp

Inventors

• Matsuda Hiroshi
• Kiyose Kanechika

Classifications

• G01S15/08

  Systems for measuring distance only (indirect measurement G01S15/46) · CPC title

• G01S7/521

  Constructional features · CPC title

• B06B1/0666 Primary

  used as a diaphragm · CPC title

• B06B1/0644 Primary

  using a single piezoelectric element (B06B1/0688 takes precedence) · CPC title