Powder for additive modeling, structure, semiconductor production device component, and semiconductor production device
US-2020346982-A1 · Nov 5, 2020 · US
US12409579B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-12409579-B2 |
| Application number | US-202418753120-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 25, 2024 |
| Priority date | Apr 24, 2018 |
| Publication date | Sep 9, 2025 |
| Grant date | Sep 9, 2025 |
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Provided are a method of manufacturing a ceramic article in which the improvement of mechanical strength, wear resistance, and machinability is achieved using a direct modeling system, and a ceramic article. The manufacturing method includes the steps of: (i) arranging powder containing ceramics as a main component on a base; (ii) irradiating a part or an entirety of the arranged powder with an energy beam to melt and solidify the powder, to thereby obtain an intermediate modeled article; (iii) causing the modeled article to absorb a metal component-containing liquid to impregnate the modeled article therewith; and (iv) subjecting the modeled article having absorbed the metal component-containing liquid to heat treatment.
Opening claim text (preview).
What is claimed is: 1. A ceramic article comprising three phases of: an X-phase of a first oxide containing a first element; a Y-phase of a second oxide containing a second element different from the first element; and a Z-phase of a third oxide containing a third element different from the first element and the second element, wherein the ceramic article is modeled by additive modeling, wherein the first oxide is an oxide contained in the X-phase in a largest molar ratio, the second oxide is an oxide contained in the Y-phase in a largest molar ratio, and the third oxide is an oxide contained in the Z-phase in a largest molar ratio, wherein the three phases form a eutectic structure with one another, wherein an average particle diameter x of crystal grains forming the X-phase, an average particle diameter y of crystal grains forming the Y-phase, and an average particle diameter z of crystal grains forming the Z-phase satisfy relationships of z/x<0.5 and z/y<0.5, and wherein the average particle diameter x and the average particle diameter y are each 5 μm or more. 2. The ceramic article according to claim 1 , wherein the average particle diameters x, y, and z satisfy relationships of z/x<0.35 and z/y<0.35. 3. The ceramic article according to claim 1 , wherein the average particle diameters x and y are each 5 μm to 30 μm. 4. The ceramic article according to claim 1 , wherein the average particle diameter z is less than 5 μm. 5. The ceramic article according to claim 1 , wherein a material forming the Z-phase is a metal oxide having a fluorite structure. 6. The ceramic article according to claim 1 , wherein the Z-phase contains a rare earth element in a ratio of 0.20 mol to 0.40 mol with respect to 1 mol of the third element contained in the Z-phase. 7. The ceramic article according to claim 1 , wherein the ceramic article contains the third element in an amount of 0.2 mol % to less than 3 mol % in metal elements forming the ceramic article. 8. The ceramic article according to claim 1 , wherein the third element is zirconium or hafnium. 9. The ceramic article according to claim 1 , wherein the first element is aluminium. 10. The ceramic article according to claim 1 , wherein the first element is silicon. 11. The ceramic article according to claim 1 , wherein the first element is silicon and the third element is aluminum. 12. The ceramic article according to claim 1 , wherein the second element is a rare earth element. 13. The ceramic article according to claim 1 , wherein the first element is aluminum or silicon, the second element is a rare earth element, and the third element is zirconium or hafnium. 14. The ceramic article according to claim 1 , wherein the second element is gadolinium or yttrium. 15. The ceramic article according to claim 1 , wherein the second element is terbium or praseodymium. 16. The ceramic article according to claim 1 , wherein the Y-phase contains the first element. 17. The ceramic article according to claim 1 , wherein the Z-phase contains a rare earth element. 18. The ceramic article according to claim 1 , wherein the crystal grains forming the Z-phase include a crystal grain contacting with at lease one of two crystal grains in the crystal grains forming the X-phase or two crystal grains in the crystal grains forming the Y-phase.
Local sintering, e.g. laser sintering · CPC title
Liquid infiltration of green bodies or pre-forms · CPC title
Computer aided shaping, e.g. rapid prototyping · CPC title
micrometer sized, i.e. from 1 to 100 micron · CPC title
Silicon oxide, silicic acids or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint · CPC title
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