Semiconductor device for particle measurement and method for operating the semiconductor device

Patent metadata

Field	Value
Publication number	US-12405202-B2
Application number	US-202318301469-A
Country	US
Kind code	B2
Filing date	Apr 17, 2023
Priority date	Apr 26, 2022
Publication date	Sep 2, 2025
Grant date	Sep 2, 2025

Abstract

The application relates to a semiconductor device for particle measurement having a cavity housing and a MEMS chip arranged inside the cavity housing. The housing includes a first opening, via which the cavity is connected to the surroundings and in which a first grating is arranged, which is capable by setting it to a first electrical potential of attracting particles from the surroundings and/or electrically charging them. The MEMS chip includes a membrane facing toward the first opening, which is capable by setting it to a second electrical potential of attracting particles. The application furthermore relates to a method for operating a semiconductor device having a cavity housing and a MEMS chip arranged inside the cavity housing.

First claim

The invention claimed is:

1. A semiconductor device for measuring particles having a cavity housing and a micro-electromechanical system (MEMS) chip arranged inside a cavity formed by the cavity housing,
wherein the cavity housing includes a first opening, via which the cavity is connected to a surroundings and in which a first grating is arranged, wherein the first grating is capable, by setting the first grating to a first electrical potential, of one or more of attracting particles from the surroundings or electrically charging the particles from the surroundings,
wherein the MEMS chip includes a membrane facing toward the first opening, wherein the membrane is configured to, by setting the membrane to a second electrical potential of attracting the particles from the surroundings.

2. The semiconductor device as claimed in claim 1 , wherein the cavity is connected to the surroundings via passages of the first grating and the passages are configured to enable the particles from the surroundings to reach the cavity.

3. The semiconductor device as claimed in claim 2 , wherein the first grating set to the first potential is capable of electrically charging the particles upon passage to the cavity.

4. The semiconductor device as claimed in claim 1 , wherein the MEMS chip is arranged on a wall of the cavity housing and the membrane is configured so that particles adhere to the membrane.

5. The semiconductor device as claimed in claim 4 , wherein the MEMS chip is arranged on a wall which is opposite to the first opening.

6. The semiconductor device as claimed in claim 4 , wherein the MEMS chip is configured to detect a resonance property of the membrane.

7. The semiconductor device as claimed in claim 6 , wherein the membrane is configured so that the resonance property is dependent on a mass of the particles adhere to the membrane.

8. The semiconductor device as claimed in claim 1 , wherein at least one electrode is attached to at least one further wall of the cavity housing, wherein the at least one electrode is settable to an electrode potential, and wherein the at least one electrode is capable of deflecting the particles.

9. The semiconductor device as claimed in claim 1 , wherein at least one magnet is attached to at least one further wall of the cavity housing, wherein the at least one magnet is capable of deflecting moving charged particles.

10. The semiconductor device as claimed in claim 1 , wherein the cavity housing includes a second opening, via which the cavity is connected to the surroundings and in which a second grating is arranged, wherein the second grating is capable, by setting it to a third electrical potential, of deflecting the particles.

11. The semiconductor device as claimed in claim 10 , wherein the cavity housing includes a third opening, via which the cavity is connected to the surroundings and in which a third grating is arranged, wherein the third grating is capable, by setting it to a fourth electrical potential, of at least one of deflecting the particles, attracting the particles from the surroundings, or electrically charging the particles.

12. The semiconductor device as claimed in claim 11 , wherein one of the first opening, the second opening, or the third opening is opposite of another one of the first opening, the second opening, or the third opening.

13. The semiconductor device as claimed in claim 11 , wherein a potential difference between one of the first grating, the second grating, or the third grating, the membrane, and a further one of the first grating, the second grating, or the third gratings is capable of at least one of
attracting the particles from the surroundings, or
electrically charging the particles from the surrounding, accelerating the particles from the surrounding at an angle toward the membrane, removing the particles adhering to the membrane, and discharging the particles from the cavity.

14. A method for operating a semiconductor device having a cavity housing and a micro-electromechanical system (MEMS) chip arranged inside a cavity formed by the cavity housing, wherein the cavity housing includes a first opening, via which the cavity is connected to a surroundings and in which a first grating is arranged, wherein the MEMS chip includes a membrane facing toward the first opening, wherein an operation in a first operating mode for particle measurement includes:
setting the first grating to a first electrical potential to configure the first grating to at least one of:
attract particles from the surroundings, or
electrically charge the particles from the surroundings;

setting the membrane to a second electrical potential to configure the membrane to attract the particles from the surroundings; and
repeatedly detecting a resonance property of the membrane.

15. The method as claimed in claim 14 , further comprising:
determining, based on the resonance property of the membrane, one or more of a property of the particles or a concentration of the particles in the surroundings of the semiconductor device.

16. The method as claimed in claim 14 , for operating the semiconductor device in a second operating mode for cleaning, wherein the cavity housing of the semiconductor device includes a second opening, via which the cavity is connected to the surroundings and in which a second grating is arranged, and wherein the cavity housing of the semiconductor device includes a third opening, via which the cavity is connected to the surroundings and in which a third grating is arranged, the method further comprising:
setting one of the first grating, the second grating, or the third grating to a third electrical potential, so that the one of the first grating, the second grating, or the third grating is capable of deflecting the particles;
setting the membrane of the MEMS chip to the second potential or a further potential;
setting a further one of the first grating, the second grating, or the third grating to a fourth electrical potential, so that the further one of the first grating, the second grating, or the third grating is capable of at least one of deflecting the particles from the surroundings, attracting the particles from the surroundings, or electrically charging the particles from the surroundings;
so that the potential difference between the one of the first grating the second grating, or the third grating, the membrane, and the further one of the first grating, the second grating, or the third grating is capable of
at least one of attracting the particles from the surroundings or electrically charging the particles from the surroundings,
accelerating the particles from the surroundings obliquely toward the membrane,
removing the particles adhering to the membrane, and
discharging the particles from the cavity.

17. The method as claimed in claim 14 , wherein the cavity is connected to the surroundings via passages of the first grating, and wherein the passages are configured to allow the particles to travel between the surroundings and the cavity.

18. The method as claimed in claim 17 , wherein the first grating is set to the first potential to configure the first grating to electrically charge the particles based on the particles traveling from the surroundings to the cavity.

Assignees

• Infineon Technologies Ag

Inventors

• Elian Klaus
• Heitzer Ludwig
• Merbeler Fabian
• Eberl Matthias
• Müller Thomas
• Allmeier Andreas
• Debie Derek
• Ghahremani Cyrus
• Pohl Jens
• Irrgang Christian

Classifications

• G01H13/00

  Measuring resonant frequency · CPC title

• G01N15/02

  Investigating particle size or size distribution (by measuring osmotic pressure G01N7/10; investigating sedimentation of particle suspensions G01N15/04; investigating individual particles G01N15/10) · CPC title

• G01N15/00 Primary

  Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials · CPC title

• G01N15/0266

  with electrical classification · CPC title

• G01N2015/0046

  in gas, e.g. smoke · CPC title