High conductance variable orifice valve

Patent metadata

Field	Value
Publication number	US-12398808-B2
Application number	US-202318368144-A
Country	US
Kind code	B2
Filing date	Sep 14, 2023
Priority date	Sep 14, 2023
Publication date	Aug 26, 2025
Grant date	Aug 26, 2025

Abstract

Variable orifice valves comprising a first fixed plate, a second fixed plate and a movable plate between are described. The movable plate is connected to the first fixed plate and the second fixed plate by sealing elements. The movable plate is moved closer to or further from the first fixed plate by rotation of an actuator ring that rotates at least two rotary elements connected to the movable plate. A needle on the movable plate engages an opening in the valve to seal or open the valve to allow fluid flow. Methods of controlling flow of fluid through the variable orifice valve are also described.

First claim

What is claimed is:

1. A variable orifice valve comprising:
a first fixed plate at a first end of the variable orifice valve, the first fixed plate having a first side and a second side defining a first fixed plate thickness, the first fixed plate having an opening extending through the first fixed plate thickness;
a second fixed plate at a second end of the variable orifice valve, the second fixed plate having a first side and a second side defining a second fixed plate thickness, the second fixed plate having an opening extending through the second fixed plate thickness, the first side of the second fixed plate facing and spaced from the second side of the first fixed plate;
a movable plate positioned between the first fixed plate and the second fixed plate, the movable plate having a first side and a second side defining a movable plate thickness, the first side of the movable plate facing the second side of the first fixed plate and the second side of the movable plate facing the first side of the second fixed plate, the movable plate having a needle extending from the first side of the movable plate, the needle having a needle end sized to fit within the opening in the first fixed plate, the movable plate having at least one opening extending through the movable plate thickness adjacent the needle;
a first sealing element between the first fixed plate and the movable plate;
a second sealing element between the second fixed plate and the movable plate;
an actuator ring adjacent the first fixed plate, the actuator ring having a plurality of inwardly directed engagement elements on an inside surface thereof;
at least two rotary elements within the actuator ring, each of the rotary elements having a plurality of outwardly directed engagement elements on an outside surface thereof, each of the outwardly directed engagement elements configured to cooperatively interact with the inwardly directed engagement elements of the actuator ring; and
at least one connector between the first fixed plate and the movable plate, the at least one connector configured to move the movable plate upon rotation of the actuator ring.

2. The variable orifice valve of claim 1 , further comprising a first conduit extending from the first side of the first fixed plate.

3. The variable orifice valve of claim 2 , further comprising a second conduit extending from the second side of the second fixed plate.

4. The variable orifice valve of claim 3 , wherein each of the first conduit and the second conduit is configured to be connected to and form a fluid tight seal with a gas line.

5. The variable orifice valve of claim 2 , wherein the first conduit comprising outwardly facing engagement elements configured to cooperatively interact with the outwardly directed engagement elements of the rotary elements.

6. The variable orifice valve of claim 5 , wherein there are three or more rotary elements arranged symmetrically around the first conduit.

7. The variable orifice valve of claim 6 , wherein movement of the actuator ring around a central axis causes each of the rotary elements to rotate around a rotary element axis while remaining in a fixed location relative to the first conduit.

8. The variable orifice valve of claim 7 , wherein rotation of each rotary element causes a connector to rotate, the connector rotation causing movement of the movable plate.

9. The variable orifice valve of claim 1 , wherein each of the first sealing element and the second sealing element comprises a bellows.

10. The variable orifice valve of claim 9 , wherein the bellows comprise a high temperature material.

11. The variable orifice valve of claim 10 , wherein a maximum width of the needle end is sized to contact the second side of the first fixed plate at the opening through the first fixed plate to form a seal.

12. The variable orifice valve of claim 1 , wherein the needle has a conically shaped end.

13. The variable orifice valve of claim 12 , wherein the conically shaped end has a linear taper.

14. The variable orifice valve of claim 12 , wherein the conically shaped end has a non-linear taper.

15. The variable orifice valve of claim 1 , wherein the actuator ring further comprises knurling on an outside surface thereof.

16. The variable orifice valve of claim 1 , wherein the actuator ring has marking indicia on an outside surface or top surface thereof, the marking indicia indicating an amount that the variable orifice valve is open during rotation of the actuator ring.

17. The variable orifice valve of claim 1 , wherein there are at least six openings in the movable plate arranged around the needle to allow a fluid to pass through the movable plate.

18. The variable orifice valve of claim 1 , further comprising a motor connected to the actuator ring, the motor configured to rotate the actuator ring around a central axis.

19. The variable orifice valve of claim 18 , wherein the actuator ring is belt driven by the motor.

20. A variable orifice valve comprising:
a first fixed plate at a first end of the variable orifice valve, the first fixed plate having a first side and a second side defining a first fixed plate thickness, the first fixed plate having an opening extending through the first fixed plate thickness;
a second fixed plate at a second end of the variable orifice valve, the second fixed plate having a first side and a second side defining a second fixed plate thickness, the second fixed plate having an opening extending through the second fixed plate thickness, the first side of the second fixed plate facing and spaced from the second side of the first fixed plate;
a movable plate positioned between the first fixed plate and the second fixed plate, the movable plate having a first side and a second side defining a movable plate thickness, the first side of the movable plate facing the second side of the first fixed plate and the second side of the movable plate facing the first side of the second fixed plate, the movable plate having a needle extending from the first side of the movable plate, the needle having a needle end sized to fit within the opening in the first fixed plate, the movable plate having at least one opening extending through the movable plate thickness adjacent the needle, the needle end having a conical shape with a maximum width sized to contact the second side of the first fixed plate at the opening to form a seal;
a first sealing element between the first fixed plate and the movable plate, the first sealing element comprising a bellows;
a second sealing element between the second fixed plate and the movable plate, the second sealing element comprising a bellows;
an actuator ring adjacent the first fixed plate, the actuator ring having a plurality of inwardly directed engagement elements on an inside surface thereof;
at least three rotary elements within the actuator ring, each of the rotary elements having a plurality of outwardly directed engagement elements on an outside surface thereof, each of the outwardly directed engagement elements configured to cooperatively interact with the inwardly directed engagement elements of the actuator ring;
at least one connector between the first fixed plate and the movable plate, the at least one connector configured to move the movable plate upon rotation of the actuator ring;
a first conduit extending from the first side of the first fixed plate, the first conduit having a threaded end and outwardly facing engagement elements configured to cooperatively interact with the outwardly direct

Assignees

• Applied Materials Inc

Inventors

• Mustafa Muhannad
• Baluja Sanjeev

Classifications

• F16K13/00

  Other constructional types of cut-off apparatus (means for plugging pipes or hoses F16L55/10); Arrangements for cutting-off · CPC title

• F16K1/38 Primary

  of conical shape · CPC title

• F16K3/03

  with a closure member in the form of an iris-diaphragm · CPC title

• F16K1/54 Primary

  Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve · CPC title