Semiconductor component including a dielectric layer

Patent metadata

Field	Value
Publication number	US-12396366-B2
Application number	US-202017612677-A
Country	US
Kind code	B2
Filing date	Jun 23, 2020
Priority date	Jul 5, 2019
Publication date	Aug 19, 2025
Grant date	Aug 19, 2025

Abstract

A semiconductor component that includes at least one dielectric layer and at least one first electrode and one second electrode. In addition, at least two defect types different from one another are present in the dielectric layer. These at least two defect types different from one another move along localized defect states, each at an average effective distance, in the direction of one of the two electrodes as a function of an operating voltage that is applied between the first electrode and the second electrode, and an operating temperature that is present. The average effective distance is greater than 3.2 nm.

First claim

What is claimed is:

1. A semiconductor component, comprising:
at least one dielectric layer; and
at least one first electrode and one second electrode;
wherein at least two defect types different from one another being present in the dielectric layer, the at least two different defect types moving along localized defect states, each case having the same average effective distance a 0 , in a direction of one of the first and second electrodes, as a function of an operating voltage applied between the first electrode and the second electrode, and an operating temperature that is present, and a 0 >3.2 nm.

2. The semiconductor component as recited in claim 1 , wherein a 0 >3.24 nm.

3. The semiconductor component as recited in claim 1 , wherein at least three defect types different from one another are present in the dielectric layer.

4. The semiconductor component as recited in claim 1 , wherein the dielectric layer is a polycrystalline oxidic high-k dielectric, wherein the dielectric layer is selected from a PZT layer or a KNN layer.

5. The semiconductor component as recited in claim 4 , wherein the dielectric layer is a sputtered PZT layer.

6. The semiconductor component as recited in claim 5 , wherein the sputtered PZT layer has a deposition temperature of less than 500° C.

7. The semiconductor component as recited in claim 5 , wherein the sputtered PZT layer has a composition of Pb 1.3 (Zr 0.52 Ti 0.48 )O 3 .

Assignees

• Bosch Gmbh Robert

Inventors

• Monteiro Diniz Reis Daniel
• Pantel Daniel
• Schatz Frank
• Tomaschko Jochen
• Mews Mathias
• Schary Timo

Classifications

• H10N30/704 Primary

  based on piezoelectric or electrostrictive films or coatings · CPC title

• H10N30/8554 Primary

  Lead-zirconium titanate [PZT] based · CPC title

• H10N30/87

  Electrodes or interconnections, e.g. leads or terminals · CPC title

• H10N30/076

  by vapour phase deposition · CPC title

• H10N30/2047 Primary

  Membrane type · CPC title