Plasma uniformity control in pulsed DC plasma chamber

Patent metadata

Field	Value
Publication number	US-12394596-B2
Application number	US-202117537270-A
Country	US
Kind code	B2
Filing date	Nov 29, 2021
Priority date	Jun 9, 2021
Publication date	Aug 19, 2025
Grant date	Aug 19, 2025

Abstract

Embodiments provided herein generally include apparatus, e.g., plasma processing systems and methods for the plasma processing of a substrate in a processing chamber. In some embodiments, aspects of the apparatus and methods are directed to improving process uniformity across the surface of the substrate, reducing defectivity on the surface of the substrate, or both. In some embodiments, the apparatus and methods provide for improved control over the uniformity of a plasma formed over the edge of a substrate and/or the distribution of ion energies at the surface of the substrate. The improved control over the plasma uniformity may be used in combination with substrate handling methods, e.g., de-chucking methods, to reduce particulate-related defectivity on the surface of the substrate. In some embodiments, the improved control over the plasma uniformity is used to preferentially clean accumulated processing byproducts from portions of the edge ring during an in-situ plasma chamber cleaning process.

First claim

What is claimed is:

1. A plasma processing system, comprising:
a substrate support assembly, comprising:
a support base;
a first electrode that is disposed over the support base and is spaced apart from the support base by a first portion of dielectric material;
a second portion of dielectric material disposed over the first electrode, the second portion of dielectric material forming a substrate supporting surface; and
a second electrode that is disposed a distance from a center of the first electrode and is spaced apart from the support base by a third portion of dielectric material;

one or more pulsed voltage waveform generators electrically coupled to the first and second electrodes;
a radio frequency (RF) generator electrically coupled to the support base, wherein:
the RF generator is configured to deliver an RF signal to the support base, and
the RF signal establishes a first RF waveform at the first electrode; and

an edge tuning circuit electrically coupled to the second electrode, wherein the edge tuning circuit is configured to adjust one or more characteristics of a second RF waveform established at the second electrode relative to one or more characteristics of the first RF waveform established at the first electrode;
a first transmission line electrically coupling a first pulsed voltage waveform generator of the one or more pulsed voltage waveform generators to the first electrode;
a first clamping network comprising a first direct-current (DC) voltage source and a first blocking capacitor, wherein the first DC voltage source is electrically coupled between a first point of the first transmission line and ground, the first point of the first transmission line between the first pulsed waveform generator and the first electrode;
a second transmission line electrically coupling a second pulsed voltage waveform generator of the one or more pulsed voltage waveform generators to the second electrode; and
a second clamping network comprising a second direct-current (DC) voltage source and a second blocking capacitor, wherein the second DC voltage source is electrically coupled between a second point of the second transmission line and ground, the second point of the second transmission line between the second pulsed waveform generator and the second electrode.

2. The plasma processing system of claim 1 , wherein the edge tuning circuit is configured to adjust the one or more characteristics of the second RF waveform relative to the one or more characteristics of the first RF waveform by changing one or a combination of:
(a) a voltage amplitude ratio between the second RF waveform at the second electrode and the first RF waveform at the first electrode;
(b) a phase difference between the second RF waveform at the second electrode and the first RF waveform at the first electrode; and
(c) a power ratio between the second RF waveform at the second electrode and the first RF waveform at the first electrode.

3. The plasma processing system of claim 1 , wherein the RF signal delivered by the RF generator is configured to ignite and maintain a plasma from gases or vapors delivered to a processing region of a processing chamber.

4. The plasma processing system of claim 3 , wherein the RF generator is configured to deliver the RF signal at a frequency of about 1 MHz or greater.

5. The plasma processing system of claim 4 , wherein the RF generator is configured to deliver the RF signal at a frequency of about 20 MHz or greater.

6. The plasma processing system of claim 1 , wherein the substrate support assembly is configured to establish the second RF waveform at the second electrode by capacitively coupling the second electrode to the support base through the third portion of dielectric material.

7. The plasma processing system of claim 6 , wherein a conductive edge ring is capacitively coupled to the second electrode.

8. The plasma processing system of claim 7 , further comprising a processing chamber, comprising:
a chamber lid, one or more chamber walls, and a chamber base that collectively define a processing volume, wherein
the processing chamber is configured to ignite and maintain a plasma of gases or vapors delivered to a processing region through capacitively coupling the plasma to the chamber lid and the substrate support assembly.

9. The plasma processing system of claim 1 , further comprising:
a chamber lid and one or more chamber walls, wherein the chamber lid faces the substrate support assembly and the chamber lid, the one or more chamber walls, and the substrate support assembly collectively define a processing region;
a system controller comprising memory and a processor; and
computer-implemented instructions stored in the memory which, when executed by the processor, are configured to perform a method of processing a substrate, comprising:
(i) igniting and maintaining a plasma from gases or vapors delivered to the processing region, wherein a first portion of the plasma is formed between the chamber lid and the first electrode, and a second portion of the plasma is formed between the chamber lid and the second electrode; and
(ii) adjusting, by use of the edge tuning circuit, one or more characteristics of the second RF waveform relative to one or more characteristics of the first RF waveform to change a ratio of a plasma density in the second portion of the plasma to a plasma density in the first portion of the plasma, wherein the respective plasma densities each comprise a number of free electrons per cm 3 of the first and second portions of the plasma.

10. The plasma processing system of claim 9 , wherein adjusting the one or more characteristics of the second RF waveform relative to the one or more characteristics of the first RF waveform increases the plasma density in the second portion of the plasma relative to the plasma density in the first portion of the plasma, and the method further comprises:
(iii) before or after (ii), lifting the substrate from the substrate support surface; and
(iv) after (iii), extinguishing the plasma.

11. The plasma processing system of claim 1 , wherein the edge tuning circuit is electrically coupled between the second electrode and ground.

12. The plasma processing system of claim 1 , wherein the edge tuning circuit is electrically coupled between the second electrode and the RF generator.

13. The plasma processing system of claim 1 , wherein the edge tuning circuit is electrically coupled to the second electrode, ground, and the RF generator.

14. The plasma processing system of claim 1 , wherein
the one or more pulsed voltage waveform generators are configured to establish respective first and second pulsed voltage waveforms at the first and second electrodes,
the first and second pulsed voltage waveforms each comprise a series of repeating cycles, and a waveform within each repeating cycle has a first portion that occurs during a first time interval and a second portion that occurs during a second time interval,
the waveform has a voltage peak in the first time interval, and
the waveform has a substantially positive slope, a substantially negative slope, or is substantially constant during at least a portion of the second time interval.

15. The plasma processing system of claim 1 , wherein
the first blocking capacitor is disposed on the first transmission line between the first pulsed waveform generator and the first point of the first transmission line, and
the second blocking capacitor is disposed on the second transmission line between the second pulsed waveform generator and the second point of the second transmission lin

Assignees

• Applied Materials Inc

Inventors

• Cui Linying
• Rogers James

Classifications

• H01J2237/334

  Etching · CPC title

• H01J37/32724

  Temperature · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32568

  Relative arrangement or disposition of electrodes; moving means · CPC title

• H01J37/3244

  Gas supply means · CPC title