Substrate treating apparatus

Patent metadata

Field	Value
Publication number	US-12381097-B2
Application number	US-202117399153-A
Country	US
Kind code	B2
Filing date	Aug 11, 2021
Priority date	Aug 24, 2020
Publication date	Aug 5, 2025
Grant date	Aug 5, 2025

Abstract

The present disclosure provides a substrate treating apparatus. The substrate treating apparatus includes a support unit that supports a substrate, and a laser unit that irradiates a laser beam to the substrate supported by the support unit, the laser unit includes an irradiation member that irradiates the laser beam, a lens disposed on a travel path of the laser beam irradiated by the irradiation member to be rotatable, and a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens.

First claim

What is claimed is:

1. A substrate treating apparatus comprising:
a support unit configured to support a substrate; and
a laser unit configured to irradiate a laser beam to the substrate supported by the support unit,
wherein the laser unit includes:
an irradiation member configured to irradiate the laser beam;
a housing coupled to the irradiation member;
a lens disposed in the housing and on a travel path of the laser beam irradiated by the irradiation member; and
a reflection member having an inclined surface for changing the travel path of the laser beam that passed through the lens;
wherein the lens and the reflection member are rotatable, and the irradiation member and the housing are fixed;
wherein a pair of lenses are provided;
wherein the reflection member is coupled to any one of the pair of lenses;
wherein the reflection member has a conical shape, an upper end of which is truncated.

2. The substrate treating apparatus of claim 1 , wherein the pair of lenses and the reflection member are rotated in the same direction about the same axis of rotation.

3. The substrate treating apparatus of claim 1 , wherein each of the cylindrical lenses has a shape, one surface of which is a planar surface that is flat, and an opposite surface of which is a curved surface.

4. The substrate treating apparatus of claim 1 , further comprising:
a controller,
wherein the controller controls the laser unit to move the reflection member upwards and downwards to change an irradiation location of the laser beam irradiated to the substrate.

5. The substrate treating apparatus of claim 1 , wherein the irradiation member irradiates a laser beam in a p-polarization state.

6. The substrate treating apparatus of claim 5 , wherein the inclined surface of the reflection member is inclined such that an incident angle of the laser beam in the p-polarization state, which is irradiated to the substrate, is a Brewster's angle.

7. The substrate treating apparatus of claim 5 , further comprising:
a controller,
wherein the controller controls the laser unit to move the reflection member upwards and downwards such that an incident angle of the laser beam, which is irradiated to the substrate, is a Brewster's angle.

Assignees

• Semes Co Ltd

Inventors

• Jeong Ji Hoon
• Kim Won-Geun
• Chung Young Dae
• Kim Tae Shin
• Lee Jee Young

Classifications

• H10P72/0431 Primary

  Apparatus for thermal treatment · CPC title

• H10P72/0436 Primary

  mainly by radiation · CPC title

• B23K26/352

  for surface treatment · CPC title

• B08B7/0042

  by laser · CPC title

• G02B3/06

  with cylindrical or toric faces · CPC title