Controlled deposition method of a donor material onto a target surface and plate therefor

Patent metadata

Field	Value
Publication number	US-12376237-B2
Application number	US-202117916861-A
Country	US
Kind code	B2
Filing date	Apr 1, 2021
Priority date	Apr 7, 2020
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

A method of depositing a donor material onto a target surface is provided herein, in which a first main side of a substrate is covered with a stretchable layer that is attaching thereto with a sealing around an enclosed area at the first main side, therewith defining an enclosure. The stretchable layer has an outer surface that faces away from the substrate, and that is patterned with one or more recessed areas filled with the donor material to be deposited. A relatively high pressure is provided in an interior of the enclosure so that its volume is increased and the patterned surface of the stretchable layer is pressed against the target surface. In that state of the stretchable layer the substrate is irradiated at a second main side opposite its first main side with photon radiation that has an intensity and a duration that causes a transfer of donor material from the one or more recessed areas to the target surface. Also a plate and a deposition device are provided.

First claim

The invention claimed is:

1. A plate for deposition of a donor material onto a target surface, the plate comprising:
a substrate including:
a first main side; and
a second main side that is opposite the first main side,
wherein the first main side is covered with a patterned layer having a patterned surface configured to be directed towards the target surface, and the patterned surface is patterned with one or more recessed areas configured to be filled with the donor material,
wherein the second main side is configured to receive photon radiation suitable to be transmitted through the substrate so as to enable a transfer of donor material from the one or more recessed areas to the target surface by providing the photon radiation to the second main side at an intensity and for a duration that is sufficient to cause the transfer,
wherein the patterned layer is made of a stretchable material that is attached to the first main side with a sealing around an enclosed area at said first main side, therewith defining an enclosure having an interior and an exterior,
wherein the interior of the enclosure has a volume that is dependent on a difference in a pressure in the interior relative to a pressure in the exterior, and
wherein an opening extends through the substrate towards the interior of the enclosure.

2. The plate according to claim 1 , wherein the stretchable layer is reinforced with one or more relatively rigid elements.

3. The plate according to claim 2 , wherein the one or more relatively rigid elements locally prevent stretching, but preserve flexibility, and
wherein the one or more relatively rigid elements are provided at a side facing away from the substrate with a dielectric coating that provides for an at least substantially uniform heatflux within the recessed portions, in that the dielectric coating has a higher reflectivity for monochromatic photon radiation with a predetermined wavelength incident on a bottom wall of a recessed portion than a reflectivity for said monochromatic radiation incident on a side wall of the recessed portion.

4. The plate according to claim 1 , wherein the stretchable layer is attached to the first main side of the substrate at further positions within the enclosed area.

5. The plate according to claim 1 , wherein a plurality of enclosures is formed on the substrate, each one of the plurality of enclosures having a respective stretchable layer or portion attached to the substrate with a respective enclosing sealing.

Assignees

• TNO

Inventors

• Hendriks Rob Jacob

Classifications

• H05K2203/107

  Using laser light · CPC title

• H05K3/107

  by filling grooves in the support with conductive material (H05K3/045, H05K3/101, H05K3/1258 and H05K3/465 take precedence) · CPC title

• C23C14/28

  by wave energy or particle radiation (C23C14/32 - C23C14/48 take precedence) · CPC title

• H05K3/1275

  by other printing techniques, e.g. letterpress printing, intaglio printing, lithographic printing, offset printing · CPC title

• H05K2201/09827

  Tapered, e.g. tapered hole, via or groove · CPC title