Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof

Patent metadata

Field	Value
Publication number	US-12370649-B2
Application number	US-202017430774-A
Country	US
Kind code	B2
Filing date	Feb 11, 2020
Priority date	Feb 13, 2019
Publication date	Jul 29, 2025
Grant date	Jul 29, 2025

Abstract

An abrasive article includes a plurality of abrasive features disposed on one or more abrasive elements. Each of the one or more abrasive elements includes a base having a first major surface from which the plurality of abrasive features extends. A first set of the plurality of abrasive features (i) has an average height, H 1avg , (ii) a standard deviation of less than 10% of H 1avg , and (iii) comprises between 5 and 130 abrasive features.

First claim

What is claimed is:

1. An abrasive article comprising:
a plurality of abrasive features disposed on one or more abrasive elements, each of the one or more abrasive elements comprising a base having a first major surface from which the plurality of abrasive features extend;
wherein a first set of the plurality of abrasive features (i) has an average height, H 1avg , (ii) has a standard deviation of less than 10% of H 1avg , and (iii) comprises between 5 and 130 abrasive features;
wherein a second set of the plurality of abrasive features has (i) an average height, H 2avg , and (ii) a standard deviation of less than 10% of H 2avg , wherein H 1ave is at least 5 microns greater than H 2avg ;
wherein cross sectional areas of each of the plurality of features of the second set of plurality of abrasive features (i) taken in a plane that is parallel to the first major surface of the bases, and (ii) at a position along the second set of abrasive features that is 50% or less of the H 2avg , cumulatively, is at least 5% of the cumulative projected areas of the of the one or more abrasive elements.

2. The abrasive article of claim 1 , wherein the second set of the plurality of abrasive features comprises at least 100 abrasive features.

3. The abrasive article of claim 1 , the plurality of abrasive features of the first set of plurality of abrasive features and their respective abrasive element bases, as a collective, are monolithic.

4. The abrasive article of claim 1 , wherein the first set of plurality of abrasive features are precisely shaped features.

5. The abrasive article of claim 1 , wherein an areal density of the first set of plurality of abrasive features is between 0.01 to 0.30/cm 2 .

6. The abrasive article of claim 1 , wherein an areal density of the second set of plurality of abrasive features is between 0.2 to 33.0/cm 2 .

7. The abrasive article of claim 1 , wherein the one or more abrasive elements comprise a carbide ceramic.

8. The abrasive article of claim 7 , wherein carbide ceramic is silicon carbide, boron carbide, zirconium carbide, titanium carbide, tungsten carbide or combinations thereof.

9. The abrasive article of claim 1 , wherein the one or more abrasive elements are at least 99% by weight silicon carbide, based on the total weight of the base and the plurality of abrasive features.

10. The abrasive article of claim 1 , wherein a porosity of the abrasive elements is less than 3%.

11. The abrasive article of claim 1 , further comprising a chemical vapor deposited or physical vapor deposited coating disposed on the plurality of abrasive features.

12. The abrasive article of claim 1 , further comprising a carrier plate having a first major surface; wherein the one or more abrasive elements are coupled to the first major surface of the carrier plate.

13. A method of conditioning a polishing pad, the method comprising:
performing a CMP operation using a polishing pad; and
contacting a working surface of the polishing pad with a working surface of the abrasive article of claim 1 .

Assignees

• 3M Innovative Properties Company

Inventors

• Fritz Matthew C
• Xie Junqing
• Laraia Vincent J

Classifications

• H10P52/402

  of semiconductor materials · CPC title

• B24B53/017

  Devices or means for dressing, cleaning or otherwise conditioning lapping tools · CPC title

• B24B37/26

  characterised by the shape of the lapping pad surface, e.g. grooved · CPC title

• B24B37/14

  characterised by the composition or properties of the plate materials · CPC title

• B24D11/00 Primary

  Constructional features of flexible abrasive materials; Special features in the manufacture of such materials · CPC title