Pedestal setup using camera wafer

Patent metadata

Field	Value
Publication number	US-12362153-B2
Application number	US-202017630218-A
Country	US
Kind code	B2
Filing date	Jul 24, 2020
Priority date	Jul 29, 2019
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a plane parallel to and above the top surface of the pedestal. The N pins are arranged perpendicularly to the plane along a circumference around the annular member. Each of the N pins includes threads engageable with respective threaded slots in the apparatus. Each of the N pins includes a conical end pointing towards the top surface of the pedestal and engageable with a periphery of the top surface of the pedestal. The method further comprises aligning a center of the annular member to a center of the pedestal by adjusting one or more of the N pins.

First claim

What is claimed is:

1. An apparatus comprising:
an annular member arranged along a first plane;
N first members extending from an outer diameter of the annular member perpendicularly to the first plane, where N is an integer greater than two, wherein a first portion of each of the N first members extends above the first plane, and wherein a second portion of each of the N first members extends below the first plane; and
N second members extending radially outward from the second portions of the N first members along a second plane that is parallel to the first plane, wherein each of the N second members lies between a different pair of the N first members.

2. The apparatus of claim 1 wherein the annular member, the N first members, and the N second members constitute a single structure.

3. The apparatus of claim 1 wherein the annular member, the N first members, and the N second members are made of a metal.

4. The apparatus of claim 1 further comprising N third members of equal lengths and made of a non-abrasive material respectively extending downward from the N second members perpendicularly to the second plane.

5. The apparatus of claim 4 further comprising:
N pins having equal lengths and conical ends and made of a non-abrasive material respectively extending downward from the N second members perpendicularly to the second plane,
wherein the N pins are equidistant from a center of the annular member and include threads engageable with threaded slots in the N second members.

6. The apparatus of claim 1 further comprising:
N third members of equal lengths and made of a non-abrasive material arranged in respective slots in the N second members,
wherein each of the N third members is arc-shaped and includes:
a first element fastened to a respective one of the N second members parallel to the second plane;
a second element extending perpendicularly from the first element below the second plane and below the respective one of the N second members; and
a third element extending perpendicularly from the first element below the second plane and below the respective one of the N second members, and extending less than the second element.

7. The apparatus of claim 6 wherein the first, second, and third elements constitute a single structure.

8. The apparatus of claim 6 wherein the first element has a greater arc length than the second and third elements.

9. The apparatus of claim 6 wherein distal ends of the third elements of the N third members lie in a plane parallel to the second plane.

10. The apparatus of claim 6 further comprising:
N pins of equal lengths and made of the non-abrasive material extending downward perpendicularly to the second plane through respective threaded slots in the N second members at the same radial distance from a center of the annular member,
wherein each of the N pins includes:
a top portion;
a conical bottom portion; and
a threaded portion between the top and bottom portions engageable with a respective one of the threaded slots.

Assignees

• Lam Res Corp

Inventors

• Kulkarni Prasanna
• Batzer Rachel E
• Tan Ted
• Krishnaswamy Vivekanandan
• Woonprasert Boonyarit
• Fiedler Shawn

Classifications

• H10P72/53

  using optical controlling means · CPC title

• H10P72/50

  for positioning, orientation or alignment · CPC title

• H01J37/32633

  Baffles · CPC title

• H01J37/32642

  Focus rings · CPC title

• H01J37/32715

  Workpiece holder · CPC title