Lens array and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-12360292-B2
Application number	US-202117765025-A
Country	US
Kind code	B2
Filing date	Mar 16, 2021
Priority date	Mar 16, 2021
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

Disclosed in embodiments of the present disclosure are a lens array and a manufacturing method thereof. The manufacturing method for the lens array includes the following steps: depositing a first film layer on a first substrate, and manufacturing and forming a tapered structure array through a patterning process; and depositing a second film layer on the tapered structure array, thereby covering a top of a tapered structure, so as to form a lenticular structure array, wherein a top of a lenticular structure is a cambered surface. The lens array is manufactured by the above manufacturing method, wherein the lens array includes a plurality of lenses arranged in an array, and the arch heights of the plurality of lenses are the same and larger than or equal to a set value.

First claim

What is claimed is:

1. A manufacturing method for a lens array, comprising:
depositing a first film layer on a first substrate;
forming a tapered structure array through a patterning process; and
depositing a second film layer on the tapered structure array;
wherein the second film layer covers a top of a tapered structure to form a lenticular structure array, and a top of a lenticular structure is a cambered surface;
wherein the method further comprises:
adopting the lenticular structure array as a template to form the lens array by two times of nano-imprint rubber transfer process;
wherein the adopting the lenticular structure array as the template to form the lens array by two times of nano-imprint rubber transfer process, comprise:
providing a second substrate;
depositing a second nano-imprint adhesive layer on the second substrate;
taking the lenticular structure array as an imprint template, and forming a lenticular groove array in the second nano-imprint adhesive layer by the nano-imprint process;
providing a third substrate;
depositing a third nano-imprint adhesive layer on the third substrate; and
taking the lenticular groove array as an imprint template, and forming a cylindrical lens array on the third nano-imprint adhesive layer by the nano-imprint process.

2. The manufacturing method for the lens array according to claim 1 , wherein the depositing the first film layer on the first substrate, and forming the tapered structure array through the patterning process, comprise:
coating a third film layer on the first film layer;
forming the third film layer into a grating structure pattern; and
etching the first film layer to form the tapered structure array by using the grating structure pattern as a mask.

3. The manufacturing method for the lens array according to claim 2 , wherein the etching the first film layer to form the tapered structure array, comprise:
adopting a dry-etching process to etch the first film layer to form the tapered structure array.

4. The manufacturing method for the lens array according to claim 2 , wherein
the forming the third film layer into the grating structure pattern, comprise:
forming a rectangular grating structure pattern; and
the etching the first film layer to form the tapered structure array, comprise:
etching the first film layer to form a pyramid structure array.

5. The manufacturing method for the lens array according to claim 4 , wherein the etching the first film layer to form the pyramid structure array, comprise:
etching the first film layer to form a triangular pyramid structure array.

6. The manufacturing method for the lens array according to claim 2 , wherein
the forming the third film layer into the grating structure pattern, comprise:
forming a circular grating structure pattern; and
the etching the first film layer to form the tapered structure array, comprise:
etching the first film layer to form a conical structure array.

7. The manufacturing method for the lens array according to claim 2 , wherein the coating the third film layer on the first film layer, and forming the third film layer into the grating structure pattern, comprise:
coating a first nano-imprint adhesive layer on the first film layer; and
adopting a nano-imprint process to form the grating structure pattern on the first nano-imprint adhesive layer.

8. The manufacturing method for the lens array according to claim 2 , wherein the coating the third film layer on the first film layer, and forming the third film layer into the grating structure pattern, comprise:
coating a photoresist layer on the first film layer; and
adopting a photoetching process to form the grating structure pattern.

9. The manufacturing method for the lens array according to claim 1 , wherein a transmittance of the third nano-imprint adhesive layer is larger than a transmittance of at least one of the first film layer or the second film layer; and/or
a refractive index of the third nano-imprint adhesive layer is larger than a refractive index of at least one of the first film layer or the second film layer.

10. The manufacturing method for the lens array according to claim 1 , wherein the depositing the first film layer on the first substrate, comprise:
depositing a SiO 2 film layer on the first substrate.

11. The manufacturing method for the lens array according to claim 1 , wherein the depositing the second film layer on the tapered structure array, comprise:
depositing a metal film layer on the tapered structure array.

12. The manufacturing method for the lens array according to claim 1 , wherein the depositing the second film layer on the tapered structure array, comprises:
adopting any one of chemical vapor deposition, magnetron sputtering deposition or an evaporation process to deposit the second film layer.

13. A lens array, manufactured by the manufacturing method according to claim 1 , wherein the lens array comprises a plurality of lenses arranged in an array;
the vaults of arch heights of the plurality of lenses are a same vault; and
the vaults of arch heights are larger than or equal to a set value.

14. The lens array according to claim 13 , wherein the set value is 30 μm.

15. The lens array according to claim 14 , wherein a gap is provided between adjacent lenses.

16. The lens array according to claim 14 , wherein bottoms of adjacent lenses are connected with each other.

17. The manufacturing method for the lens array according to claim 1 , wherein a transmittance of the third nano-imprint adhesive layer is larger than a transmittance of at least one of the first film layer or the second film layer.

18. The manufacturing method for the lens array according to claim 1 , wherein a refractive index of the third nano-imprint adhesive layer is larger than a refractive index of at least one of the first film layer or the second film layer.

Assignees

• Boe Technology Group Co Ltd

Inventors

• Song Mengya
• Guo Kang
• Li Duohui
• Gu Xin

Classifications

• G02B3/005

  arranged along a single direction only, e.g. lenticular sheets (G02B3/0043 takes precedence) · CPC title

• H10F39/12

  Image sensors · CPC title

• G02B3/0056

  arranged along two different directions in a plane, e.g. honeycomb arrangement of lenses (G02B3/0043 takes precedence; miniaturised objectives for electronic devices employing wafer level optics G02B13/0085) · CPC title

• G02B3/0018 Primary

  Reflow, i.e. characterized by the step of melting microstructures to form curved surfaces, e.g. manufacturing of moulds and surfaces for transfer etching · CPC title