Automated material handling system (AMHS) rail methodology

Patent metadata

Field	Value
Publication number	US-12358729-B2
Application number	US-202117484973-A
Country	US
Kind code	B2
Filing date	Sep 24, 2021
Priority date	Apr 30, 2021
Publication date	Jul 15, 2025
Grant date	Jul 15, 2025

Abstract

A system and method for rail management of an overhead transport (“OHT”) system of an associated automated material handing system (“AMHS”) that includes a controller in communication with the OHT system, including vehicles traveling on rails of the OHT. The rail management system also includes a turntable located on a portion of the OHT and equipped with a set of fixed rails. Upon receipt of a request to rotate the turntable from a first run-through direction to a second run-through direction, the controller engages at least one stopper sensor located near the turntable. The controller then directs the turntable to rotate from the first run-through direction to the second run-through direction. After completion, the controller disengages the at least one stopper to enable vehicles to travel directly in the second run-through direction.

First claim

What is claimed is:

1. A method for automatic material handling system (“AMHS”) rail control of a semiconductor wafer transport system, comprising:
receiving, at a controller including a processor in communication with memory, a request to rotate a turntable on an overhead transport (“OHT”) of the AMHS from a first run-through direction to a second run-through direction, the turntable having a set of parallel rails providing a rotatable intersection of a first OHT fixed rail section aligned with the first run-through direction with the turntable at a first position and a second OHT fixed rail section aligned with the second run-through direction with the turntable at a second position;
prior to rotating the turntable, the controller purging the first OHT fixed rail section of one or more first wafer carrier vehicles moving on the first OHT fixed rail section to allow the one or more first wafer carrier vehicles to complete travel across the turntable;
prior to rotating the turntable and after purging the first OHT fixed rail section, the controller detecting and stopping subsequent first wafer carriers traveling on the first OHT fixed rail section by activating at least one first stopper sensor positioned on the first OHT fixed rail section, the first stopper sensor located proximate to the turntable and the first wafer carrier vehicle stopping prior to transiting the turntable;
prior to rotating the turntable the controller detecting and stopping a second wafer carrier vehicle moving on the second OHT fixed rail section by activating at least one second stopper sensor positioned on the second OHT fixed rail section, the second stopper sensor located proximate to the turntable and the second wafer carrier vehicle stopping prior to transiting the turntable;
rotating the turntable from the first run-through direction to the second run-through direction while receiving an alignment signal from at least one alignment sensor pair positioned on the turntable and positioned proximate to the turntable on the second OHT fixed rail section, the alignment signal representative of a relative alignment of the turntable with respect to the second OHT fixed rail section; and
in response to a completed rotation of the turntable from the first run-through direction to the second run-through direction indicated by the alignment signal, the controller deactivating the oner or more second stopper sensors and instructing the stopped second wafer carrier vehicle to continue movement along one of the first fixed rail section and the second OHT fixed rail section to transit the turntable along the second run-through direction.

2. The method of claim 1 , further comprising the controller detecting and stopping two or more first wafer carrier vehicles on the first OHT fixed rail section proximate to the turntable in response to the detection of the two or more first wafer carrier vehicles using two or more second stopper sensors.

3. The method of claim 1 , further comprising receiving, from at least two alignment sensor pairs, the alignment signal relative to alignment of the turntable with respect to the second OHT fixed rail section.

4. The method of claim 1 , wherein the step of the controller detecting and stopping a first wafer carrier vehicle is in response to the received alignment sensor signal.

5. The method of claim 1 , wherein the step of the controller detecting and stopping one or more first wafer carrier vehicles further comprises sending a command to the one or more first wafer carrier vehicles to stop movement of the first wafer carrier vehicles.

6. The method of claim 1 , further comprising receiving a switch complete signal from the turntable, wherein the step of the controller detecting and stopping subsequent first wafer carrier vehicles is in response to the received switch complete signal.

7. The method of claim 1 , further comprising purging two or more first wafer carrier vehicles traveling in the first run-through direction on the first OHT fixed rail section prior to the controller detecting and stopping the subsequent first OHT wafer carrier vehicles.

8. The method of claim 7 , wherein stopping the subsequent first OHT wafer carrier vehicles further comprises disabling a power supply associated with the subsequent first OHT wafer carrier vehicles.

9. The method of claim 8 , further comprising enabling the power supply associated with the subsequent first OHT wafer carrier vehicles in response to an output of the at least one alignment sensor pair.

10. The method of claim 1 , further comprising generating an alert in response to an output of the at least one alignment sensor pair indicative of a misalignment of the turntable.

11. A semiconductor wafer transport system rail management system comprising:
an overhead transport (“OHT”) system of an associated automated material handling system (“AMHS”) comprising a plurality of fixed rails and at least one wafer carrier vehicle configured to travel along the plurality of fixed rails;
a controller comprising a processor in communication with memory, the controller in electronic communication with the overhead transport system;
a turntable having a set of parallel fixed rails positioned thereon, the turntable located on a portion of the OHT and providing a rotatable intersection of a first OHT fixed rail section aligned with a first run-through direction with the turntable at a first position and a second OHT fixed rail section aligned with a first run-through direction with the turntable at a second position;
wherein the memory further stores instructions that are executed by the processor causing the processor to:
receive a request to rotate the turntable from the first run-through direction to the second run-through direction,
prior to rotating the turntable, purge the first OHT fixed rail section of one or more first wafer carrier vehicles moving on the first OHT fixed rail section to allow the one or more first wafer carrier vehicles to complete travel across the turntable;
prior to rotating the turntable, and after purging the first OHT fixed rail section, detect and stop subsequent first wafer carriers traveling on the first OHT fixed rail section by activating at least one first stopper sensor positioned on the first OHT fixed rail section, the first stopper sensor located proximate to the turntable and the first wafer carrier vehicle stopping prior to transiting the turntable;
prior to rotating the turntable, detect and stop a second wafer carrier vehicle moving on the second fixed rail section by activating at least one second stopper sensor positioned on the second OHT fixed rail section, the second stopper sensor located proximate to the turntable and the second wafer carrier vehicle stopping prior to transiting the turntable;
rotate the turntable from the first run-through direction to the second run-through direction while receiving an alignment signal from at least one alignment sensor pair positioned on the turntable and positioned proximate to the turntable on the second OHT fixed rail section, the alignment signal representative of a relative alignment of the turntable with respect to the second OHT fixed rail section; and
in response to a completed rotation of the turntable from the first run-through direction to the second run-through direction indicated by the alignment signal, deactivating the oner or more second stopper sensors and instructing the stopped second wafer carrier vehicle to continue movement along the second OHT fixed rail section to transit the turntable along the second run-through direction.

12. The rail management system of claim 11 , further comprising at least two alignment sensor pairs pos

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Li Guancyun
• Chang Ching-Jung

Classifications

• H10P72/3221 Primary

  Overhead conveying · CPC title

• H10P72/3216

  using a general scheme of a conveying path within a factory · CPC title

• H10P72/3208

  Changing the direction of the conveying path · CPC title

• B65G49/07

  for semiconductor wafers {Not used, see H10P72/00}(specially adapted for conveying of semiconductor wafers during manufacture or treatment of semiconductor or electric solid state devices or components H10P72/00) · CPC title

• B65G47/648

  about a vertical axis · CPC title