Capacitor, memory device including the capacitor

Patent metadata

Field	Value
Publication number	US-12356643-B2
Application number	US-202217715473-A
Country	US
Kind code	B2
Filing date	Apr 7, 2022
Priority date	Sep 28, 2021
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A capacitor includes a lower electrode layer including a first conductive layer and a second conductive layer on the first conductive layer, the second conductive layer including SnO2 doped with an impurity; a dielectric layer on the second conductive layer, the dielectric layer including a rutile-phase oxide; and an upper electrode layer on the dielectric layer.

First claim

What is claimed is:

1. A capacitor comprising:
a lower electrode layer including a first conductive layer and a second conductive layer on the first conductive layer, the second conductive layer including SnO 2 doped with an impurity;
a dielectric layer on the second conductive layer, the dielectric layer including a rutile-phase oxide; and
an upper electrode layer on the dielectric layer,
wherein the impurity of the second conductive layer comprises at least one of niobium (Nb), or manganese (Mn), and
wherein a doping concentration of the impurity with respect to the second conductive layer is included in a range from 0.5 at % to 10 at %.

2. The capacitor of claim 1 , wherein a work function of the second conductive layer is included in a range from 4.3 eV to 5 eV.

3. The capacitor of claim 1 , wherein a thickness of the second conductive layer is included in a range from 1 nm to 100 nm.

4. The capacitor of claim 1 , wherein a resistivity of the second conductive layer is included in a range from 10 μΩcm to 4000 μΩcm.

5. The capacitor of claim 1 , wherein a sum of a thickness of the first conductive layer and a thickness of the second conductive layer is less than 10 nm.

6. The capacitor of claim 1 , wherein a permittivity of the dielectric layer is included in a range from 60 to 100.

7. The capacitor of claim 1 , wherein the rutile-phase oxide comprises titanium dioxide (TiO 2 ).

8. The capacitor of claim 1 , wherein
the rutile-phase oxide comprises titanium dioxide (TiO 2 ), and
the dielectric layer includes a dopant, the dopant comprising at least one of aluminum (Al), gallium (Ga), germanium (Ge), lanthanum (La), or yttrium (Y).

9. The capacitor of claim 1 , wherein the first conductive layer comprises titanium nitride (TiN).

10. The capacitor of claim 1 , wherein the first conductive layer comprises titanium nitride (TiN) doped with at least one of vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo), tungsten (W), platinum (Pt), rubidium (Ru), or iridium (Ir).

11. A memory device comprising:
a transistor including a source region and a drain region spaced apart from each other, a channel region between the source region and the drain region, and a gate electrode on the channel region;
a capacitor comprising
a lower electrode layer including a first conductive layer and a second conductive layer on the first conductive layer, the second conductive layer including SnO 2 doped with an impurity,
a dielectric layer on the second conductive layer, the dielectric layer including a rutile-phase oxide, and
an upper electrode on the dielectric layer; and
a contact plug electrically connecting the first conductive layer of the lower electrode to at least one of the drain region or the source region,
wherein the impurity of the second conductive layer comprises at least one of niobium (Nb), or manganese (Mn), and
wherein a doping concentration of the impurity with respect to the second conductive layer is included in a range from 0.5 at % to 10 at %.

12. The memory device of claim 11 , wherein the first conductive layer comprises titanium nitride (TiN).

Assignees

• Samsung Electronics Co Ltd

Inventors

• Lee Changsoo
• Kim Jinhong
• Kim Yongsung
• Park Jiwoon
• Lee Jooho
• Cho Yong-Hee

Classifications

• H10B12/31

  having a storage electrode stacked over the transistor · CPC title

• C23C16/45525

  Atomic layer deposition [ALD] · CPC title

• C23C16/405

  of refractory metals or yttrium · CPC title

• H10B12/315

  with the capacitor higher than a bit line · CPC title

• H10B12/033

  the capacitor extending over the transistor · CPC title