Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Patent metadata

Field	Value
Publication number	US-12354840-B2
Application number	US-202418415492-A
Country	US
Kind code	B2
Filing date	Jan 17, 2024
Priority date	Sep 28, 2018
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A method for optimizing delivery of power to a plasma chamber is described. The method includes dividing each cycle of a low frequency (LF) radio frequency generator (RFG) into multiple time intervals. During each of the time intervals, a frequency offset of a high frequency (HF) RFG is generated for which the delivery of power is maximized. The frequency offsets provide a substantially inverse relationship compared to a voltage signal of the LF RFG for each cycle of the voltage signal. The frequency offsets for the time intervals are multiples of the low frequency. The substantially inverse relationship facilitates an increase in the delivery of power to the electrode. A total range of the frequency offsets from a reference HF frequency over the LF RF cycle depends on a power ratio of power that is supplied by the LF RFG and power that is supplied by the HF RFG.

First claim

What is claimed is:

1. A method for processing a substrate, comprising:
controlling a first radio frequency (RF) generator to generate a first RF signal based on a first plurality of frequency offsets, wherein the first plurality of frequency offsets are applied during a first portion of a first cycle of operation of a second RF generator to increase delivered power during the first portion; and
controlling the first RF generator to modify the first plurality of frequency offsets to apply a second plurality of frequency offsets, wherein the second plurality of frequency offsets are applied during a second portion of the first cycle of operation of the second RF generator to decrease the delivered power during the second portion.

2. The method of claim 1 , wherein the first portion occurs before or after the second portion, wherein the delivered power is power delivered from the first RF generator.

3. The method of claim 1 , wherein the delivered power is increased to maximize the delivered power during the first portion, and the delivered power is decreased to minimize the delivered power during the second portion.

4. The method of claim 1 , wherein the first plurality of frequency offsets are applied to a reference frequency of the first RF generator, wherein the second plurality of frequency offsets are applied to the reference frequency.

5. The method of claim 1 , wherein each of the first plurality of offsets is a function of a frequency of the second RF generator and a reference frequency of the first RF generator, wherein each of the second plurality of offsets is a function of the frequency of the second RF generator and the reference frequency of the first RF generator, wherein the frequency of the second RF generator varies with time.

6. The method of claim 1 , further comprising:
dividing each cycle of a voltage signal received from an output of an impedance matching circuit into a plurality of time intervals,
wherein said controlling the first RF generator to apply the first plurality of frequency offsets includes offsetting a reference frequency of the first RF generator during a first portion of the plurality of time intervals by a respective one of the first plurality of frequency offsets,
wherein said controlling the first RF generator to apply the second plurality of frequency offsets includes offsetting the reference frequency of the first RF generator during a second portion of the plurality of time intervals by a respective one of the second plurality of frequency offsets.

7. The method of claim 1 , wherein the first RF generator is controlled based on the first and second pluralities of frequency offsets to perform a first process on the substrate, the method further comprising:
controlling the first RF generator to apply a third plurality of frequency offsets during a first portion of a second cycle of operation of the second RF generator to decrease the delivered power during the first portion of the second cycle; and
controlling the first RF generator to modify the third plurality of frequency offsets to apply a fourth plurality of frequency offsets, wherein the fourth plurality of frequency offsets are applied during a second portion of the second cycle of operation of the second RF generator to increase the delivered power during the second portion,
wherein the first RF generator is controlled based on the third and fourth pluralities of frequency offsets to perform a second process on the substrate.

8. A controller for processing a substrate, comprising:
a processor configured to:
control a first radio frequency (RF) generator to generate a first RF signal based on a first plurality of frequency offsets, wherein the first plurality of frequency offsets are applied during a first portion of a first cycle of operation of a second RF generator to increase delivered power during the first portion; and
control the first RF generator to modify the first plurality of frequency offsets to apply a second plurality of frequency offsets, wherein the second plurality of frequency offsets are applied during a second portion of the first cycle of operation of the second RF generator to decrease the delivered power during the second portion; and

a memory device coupled to the processor.

9. The controller of claim 8 , wherein the first portion occurs before or after the second portion, wherein the delivered power is power delivered from the first RF generator.

10. The controller of claim 8 , wherein the delivered power is increased to maximize the delivered power during the first portion, and the delivered power is decreased to minimize the delivered power during the second portion.

11. The controller of claim 8 , wherein the first plurality of frequency offsets are applied to a reference frequency of the first RF generator, wherein the second plurality of frequency offsets are applied to the reference frequency.

12. The controller of claim 8 , wherein each of the first plurality of offsets is a function of a frequency of the second RF generator and a reference frequency of the first RF generator, wherein each of the second plurality of offsets is a function of the frequency of the second RF generator and the reference frequency of the first RF generator, wherein the frequency of the second RF generator varies with time.

13. The controller of claim 8 , wherein the processor is configured to:
divide each cycle of a voltage signal received from an output of an impedance matching circuit into a plurality of time intervals,
wherein to control the first RF generator to apply the first plurality of frequency offsets, the processor is configured to offset a reference frequency of the first RF generator during a first portion of the plurality of time intervals by a respective one of the first plurality of frequency offsets,
wherein to control the first RF generator to apply the second plurality of frequency offsets, the processor is configured to offset the reference frequency of the first RF generator during a second portion of the plurality of time intervals by a respective one of the second plurality of frequency offsets.

14. The controller of claim 8 , wherein the first RF generator is controlled based on the first and second pluralities of frequency offsets to perform a first process on the substrate, wherein the processor is configured to:
control the first radio RF generator to apply a third plurality of frequency offsets during a first portion of a second cycle of operation of the second RF generator to decrease the delivered power during the first portion of the second cycle; and
control the first RF generator to modify the third plurality of frequency offsets to apply a fourth plurality of frequency offsets, wherein the fourth plurality of frequency offsets are applied during a second portion of the second cycle of operation of the second RF generator to increase the delivered power during the second portion,
wherein the first RF generator is controlled based on the third and fourth pluralities of frequency offsets to perform a second process on the substrate.

15. A plasma system for processing a substrate, comprising:
a first radio frequency (RF) generator;
a second RF generator;
an impedance matching circuit coupled to the first RF generator via a first RF cable and to the second RF generator via a second RF cable;
a computer coupled to the first and second RF generators, wherein the computer is configured to:
control the first RF generator to generate a first RF signal based on a first plurality of frequency offsets, wherein the first plurality of frequency offsets are applied during

Assignees

• Lam Res Corp

Inventors

• Bhowmick Ranadeep
• Holland John
• Kozakevich Felix Leib
• Ji Bing
• Marakhtanov Alexei

Classifications

• H01J37/32926

  Software, data control or modelling · CPC title

• H01J37/32165 Primary

  Plural frequencies · CPC title

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title

• H01J37/32532

  Electrodes · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title