Mask and manufacturing method therefor

Patent metadata

Field	Value
Publication number	US-12351897-B2
Application number	US-202017607012-A
Country	US
Kind code	B2
Filing date	Dec 24, 2020
Priority date	Jan 3, 2020
Publication date	Jul 8, 2025
Grant date	Jul 8, 2025

Abstract

A mask includes a frame, at least one mask sheet, and a shielding plate. The frame includes a plurality of borders. The borders are connected end to end in sequence to form the frame with a first hollow region. A mask sheet includes a pattern region and non-pattern regions. The pattern region includes at least one evaporation hole. The shielding plate includes a plurality of shielding strips. The plurality of shielding strips are arranged crosswise to form a plurality of second hollow regions. Orthogonal projections of the second hollow regions on a plane perpendicular to a thickness direction of the frame are located within a range of an orthogonal projection of the first hollow region on the plane. An inner edge of an orthogonal projection of the frame on the plane is located within a range of an orthogonal projection of the shielding plate on the plane.

First claim

What is claimed is:

1. A mask, comprising:
a frame including a plurality of borders, the plurality of borders being connected end to end in sequence to form the frame with a first hollow region;
at least one mask sheet, each mask sheet including a pattern region and non-pattern regions, the pattern region including at least one evaporation hole, and the non-pattern regions being configured to be fixed to the frame, so that the pattern region is opposite to the first hollow region; and
a shielding plate including a plurality of shielding strips, the plurality of shielding strips being arranged crosswise to form a plurality of second hollow regions, and orthogonal projections of the second hollow regions on a plane perpendicular to a thickness direction of the frame being located within a range of an orthogonal projection of the first hollow region on the plane,
wherein the shielding plate and the at least one mask sheet are sequentially fixed on the frame in the thickness direction of the frame, and an inner edge of an orthogonal projection of the frame on the plane is located within a range of an orthogonal projection of the shielding plate on the plane;
wherein the plurality of shielding strips include a plurality of border shielding strips, and the plurality of border shielding strips are in one-to-one correspondence with the plurality of borders; and
for any border shielding strip of the plurality of border shielding strips, an orthogonal projection of the any border shielding strip on the plane is overlapped with an orthogonal projection of a border corresponding to the any border shielding strip on the plane.

2. The mask according to claim 1 , wherein the frame includes a first region and a second region;
the first region includes a portion of the frame fixed to the plurality of shielding strips, the portion of the frame fixed to the plurality of shielding strips is a shielding strip fixing region, and the second region includes a portion of the frame fixed to the at least one mask sheet; and
a thickness of the first region is less than a thickness of the second region, and the second region is closer to an outer edge of the frame than the first region.

3. The mask according to claim 2 , wherein a difference between the thickness of the second region and the thickness of the first region is equal to a thickness of the shielding plate.

4. The mask according to claim 1 , wherein for the any border shielding strip of the plurality of border shielding strips, the orthogonal projection of the any border shielding strip on the frame is located within a region where the border corresponding to the any border shielding strip is located.

5. The mask according to claim 1 , wherein for the any border shielding strip of the plurality of border shielding strips, the orthogonal projection of the any border shielding strip on the plane is partially overlapped with the orthogonal projection of the border corresponding to the any border shielding strip on the plane.

6. The mask according to claim 3 , wherein the shielding plate further includes at least one stretching pin located on an outer side of cach border shielding strip.

7. The mask according to claim 6 , wherein the first region further includes pin accommodating regions configured to accommodate stretching pins.

8. The mask according to claim 7 , wherein the first region further includes fitting allowance regions;
the fitting allowance regions are located between the shielding strip fixing region and the second region, and between the pin accommodating regions and the second region.

9. The mask according to claim 2 , wherein the plurality of borders include two first borders that are opposite to each other and two second borders that are opposite to each other;
the first region and the second region are included in the first borders and the second borders.

10. The mask according to claim 2 , wherein the plurality of borders include two first borders that are opposite to each other and two second borders that are opposite to each other;
the first region and the second region are included in the first borders; and
the first region is further included in the second borders.

11. The mask according to claim 10 , wherein a length of the pattern region is greater than a length of the first hollow region in a direction of a line connecting the two first borders that are opposite to each other.

12. The mask according to claim 1 , wherein the frame further includes first alignment holes that are non-overlapped with the at least one mask sheet and the shielding plate.

13. The mask according to claim 7 , wherein the frame further includes a second alignment hole, and the at least one stretching pin further includes a third alignment hole;
when the shielding plate is stretched on the frame, the second alignment hole is aligned with the third alignment hole.

14. The mask according to claim 1 , wherein the frame and the shielding plate are made of an iron-nickel alloy or stainless steel; and
the at least one mask sheet is made of an iron-nickel alloy.

15. The mask according to claim 1 , wherein the frame and the shielding plate are fixed in a welding manner; and
the frame and the at least one mask sheet are fixed in the welding manner.

16. A manufacturing method of a mask for manufacturing the mask according to claim 1 , wherein
the frame includes a first region and a second region, a thickness of the first region is less than a thickness of the second region, and the second region is closer to an outer edge of the frame than the first region;
the manufacturing method comprises:
stretching the shielding plate and welding the shielding plate to the first region of the frame, the inner edge of the orthogonal projection of the frame on the plane being located within the range of the orthogonal projection of the shielding plate on the plane; and
stretching the at least one mask sheet and welding the at least one mask sheet to the second region of the frame, the at least one mask sheet and the shielding plate being located on a same side of the frame;
wherein the plurality of shielding strips include a plurality of border shielding strips, and the plurality of border shielding strips are in one-to-one correspondence with the plurality of borders;
the inner edge of the orthogonal projection of the frame on the plane being located within the range of the orthogonal projection of the shielding plate on the plane, includes:
for the any border shielding strip of the plurality of border shielding strips, the orthogonal projection of the any border shielding strip on the plane is overlapped with the orthogonal projection of the border corresponding to the any border shielding strip on the plane.

17. The manufacturing method according to claim 16 , wherein the shielding plate further includes at least one stretching pin located on an outer side of each border shielding strip,
the first region includes a shielding strip fixing region and pin accommodating regions;
stretching the shielding plate and welding the shielding plate to the first region of the frame, includes:
placing the shielding plate on the frame, and fixing and stretching pins of the shielding plate through a stretcher, so that the plurality of border shielding strips are located in the shielding strip fixing region, and the stretching pins are located in the pin accommodating regions;
welding the plurality of border shielding strips to the shielding strip fixing region; and
welding the stretching pins to the pin accommodating regions.

18.

Assignees

• Chengdu Boe Optoelect Tech Co
• Boe Technology Group Co Ltd

Inventors

• Zhang Yuanqi
• Du Sen
• Luo Chang
• Ji Fengli
• Yang Xiaoyu
• Xu Qian

Classifications

• H10K71/164

  using vacuum deposition · CPC title

• H10K71/00

  Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title

• H10K71/166

  using selective deposition, e.g. using a mask · CPC title

• C23C14/24

  Vacuum evaporation · CPC title

• C23C14/042 Primary

  using masks · CPC title